Resources Contact Us Home
Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus

Image Number 5 for United States Patent #8114568.

A substrate for use in a lithographic projection apparatus. The substrate includes a sealing coating that covers at least a part of a first interface between two layers on the substrate, or between a layer and the substrate, and does not extend to a central portion of the substrate.

  Recently Added Patents
Device for determining the absolute angular position of the steering wheel of an electric power-assisted steering column of a motor vehicle using weighted dynamic parameters of the vehicle
Automated solar collector installation design including ability to define heterogeneous design preferences
Semiconductor arrangement with a solder resist layer
Method for producing SOI substrate and SOI substrate
Imaging apparatus having selection unit to select focus detection areas
Optical power measurement method, optical line terminal and optical network unit
Decontamination apparatus and method
  Randomly Featured Patents
Process for the preparation of ammonium alkoxides
Method of manufacturing semiconductor device and chemical mechanical polishing apparatus
Puzzle having moveable tiles and transparent retainer
Method and apparatus for forming a curved slot
Apparatus for encrusting jam
Tunable hybrid bracket assembly
Lamp assembly
Radius arm support for a driving axle
Trenching attachment for an earth moving bucket
Light source apparatus for WDM optical communication and optical communication system