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Phase and frequency control of a radio frequency generator from an external source










Image Number 3 for United States Patent #8110991.

Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit controls the phase and/or the frequency of a RF generator.








 
 
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