Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing semiconductor device and substrate processing apparatus










Image Number 4 for United States Patent #8110491.

A manufacturing method of a semiconductor device of the present invention includes the step of forming an insulating film on a substrate, and the step of forming a high dielectric constant insulating film on the insulating film, and the step of forming a titanium aluminum nitride film on the high dielectric constant insulating film, wherein in the step of forming the titanium aluminum nitride film, formation of an aluminum nitride film and formation of a titanium nitride film are alternately repeated, and at that time, the aluminum nitride film is formed firstly and/or lastly.








 
 
  Recently Added Patents
Highly detectable pilot structure
Disk-based storage device having read channel memory that is selectively accessible to disk controller
XDSL system and signal transmission method, sending device, and receiving device of xDSL system
Adjusting dental prostheses based on soft tissue
Adaptive contact window wherein the probability that an answering user/expert will respond to a question corresponds to the answering users having response rates that are based on the time of
Base station device and wireless communication method
Engineered enzymes with methionine-gamma-lyase enzymes and pharmacological preparations thereof
  Randomly Featured Patents
Image processing apparatus, image processing method, and program product for executing the method
Perforated web feeding apparatus
Electric air heating furnace
Receivers, methods, and computer program products for an analog modem that receives data signals from a digital modem
Coarse-grained look-up table architecture
Systems and methods to temporarily transfer funds to a member
Nuclear magnetic resonance systems
High speed FFT processor
Low profile additives for polyester resin systems based on asymmetric glycols and aromatic diacids
Land vehicle floatable and steerable in water