Resources Contact Us Home
Method of manufacturing semiconductor device and substrate processing apparatus

Image Number 4 for United States Patent #8110491.

A manufacturing method of a semiconductor device of the present invention includes the step of forming an insulating film on a substrate, and the step of forming a high dielectric constant insulating film on the insulating film, and the step of forming a titanium aluminum nitride film on the high dielectric constant insulating film, wherein in the step of forming the titanium aluminum nitride film, formation of an aluminum nitride film and formation of a titanium nitride film are alternately repeated, and at that time, the aluminum nitride film is formed firstly and/or lastly.

  Recently Added Patents
Peptides useful in the treatment and/or care of skin, mucous membranes, scalp and/or hair and their use in cosmetic or pharmaceutical compositions
Ice data collection system
Optical scanner and image-forming device
Irreversible thermochromic ink compositions
Pharmaceutical compositions of paclitaxel, paclitaxel analogs or paclitaxel conjugates and related methods of preparation and use
Apparatus and method for information processing, program, and recording medium
Cabinet door with tread pattern
  Randomly Featured Patents
System and method employing last occurrence and sliding window technique for determining a minimum and maximum value
N-type polyacetylene and a process for producing the same
MUROS modulation using linear baseband combinations with linear gaussian pulse shaping for two users on one timeslot used by non-DARP and DARP remote stations
Spray gun having air cap with unique spray shaping features
Semiconductor integrated circuit and method of controlling the same
Single speed gear assembly for a wheelchair
Lid with an adjustable pouring and venting arrangement, particularly for primary color or paint containers utilized for car bodywork
Splice variants of BRCA1
Base of a housing of a device for measuring running speed, running distance and step frequency
Weld repair of superalloy materials