Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device










Image Number 6 for United States Patent #8105435.

The inhomogeneous energy distribution at the beam spot on the irradiated surface is caused by a structural problem and processing accuracy of the cylindrical lens array forming an optical system. According to the present invention, in the optical system for forming a rectangular beam spot, an optical system for homogenizing the energy distribution of the shorter side direction of a rectangular beam spot of a laser light on an irradiated surface is replaced with a light guide. The light guide is a circuit that can confine emitted beams in a certain region and guide and transmit its energy flow in parallel with the axis of a path thereof.








 
 
  Recently Added Patents
Method and system for filtering home-network content
Method for switching channels in a wireless communication network
Systems and methods for online search recirculation and query categorization
Profiling activity through video surveillance
Differentiated PSIP table update interval technology
Light fitting
Interactive program guide systems and processes
  Randomly Featured Patents
Wagering device display
Method and system for client-side caching
Driving device
Double-sided cooling isolated packaged power semiconductor device
Noise dosimetery
Scale for measuring dimension of article and scale to be used in the same
Breastfeeding garment
SONOS memory device having curved surface and method for fabricating the same
Decoding and detailed analysis of captured frames in an IEEE 802.11 wireless LAN
Parser translator system and method