Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device










Image Number 6 for United States Patent #8105435.

The inhomogeneous energy distribution at the beam spot on the irradiated surface is caused by a structural problem and processing accuracy of the cylindrical lens array forming an optical system. According to the present invention, in the optical system for forming a rectangular beam spot, an optical system for homogenizing the energy distribution of the shorter side direction of a rectangular beam spot of a laser light on an irradiated surface is replaced with a light guide. The light guide is a circuit that can confine emitted beams in a certain region and guide and transmit its energy flow in parallel with the axis of a path thereof.








 
 
  Recently Added Patents
Metal foil laminate, substrate for mounting LED, and light source device
High-order harmonic device of cavity filter
Apparatus and method for transmitting and receiving data streams in wireless system
Motor vehicle, toy and/or replica
Integrated monitoring in problem management in service desk
Thin film transistor and flat panel display device including the same
DRAM refresh method and system
  Randomly Featured Patents
Interface for a display screen for an electronic device
Process for preparation of 4H-4-oxo-quinolizine-3-carboxylic acid
Absorbent interlabial device comprising a fluid acquisition/transfer complex
Convertible rotisserie/kebab cooking device
Vibratory pipe wrench
Disc-type coil
Medium having photographically recorded digital audio bits
Pet chew with 4 buttons
Early-late correlation for timing error correction in data communication receivers
Optical disc, optical disc unit and method of controlling the optical disc unit