Resources Contact Us Home
Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device

Image Number 6 for United States Patent #8105435.

The inhomogeneous energy distribution at the beam spot on the irradiated surface is caused by a structural problem and processing accuracy of the cylindrical lens array forming an optical system. According to the present invention, in the optical system for forming a rectangular beam spot, an optical system for homogenizing the energy distribution of the shorter side direction of a rectangular beam spot of a laser light on an irradiated surface is replaced with a light guide. The light guide is a circuit that can confine emitted beams in a certain region and guide and transmit its energy flow in parallel with the axis of a path thereof.

  Recently Added Patents
Digital camera dock having movable guide pins
Double diffused metal oxide semiconductor device and manufacturing method thereof
Identification of websites that break out of frames
System and method for updating firmware
Semiconductor thin film, thin film transistor, method for manufacturing same, and manufacturing equipment of semiconductor thin film
Deflection device for a scanner with Lissajous scanning
  Randomly Featured Patents
Electrical connector
Small game carrier
Magnetic recording apparatus and positioning correction method
Orthodontic bracket and clip
System for creating a near real time surface log
Flat heating element
Oxygen therapy face mask
Microplate lid
Multi-cylinder engine
Heterogeneous multi-level extendable indexing for general purpose annotation systems