Resources Contact Us Home
Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device

Image Number 6 for United States Patent #8105435.

The inhomogeneous energy distribution at the beam spot on the irradiated surface is caused by a structural problem and processing accuracy of the cylindrical lens array forming an optical system. According to the present invention, in the optical system for forming a rectangular beam spot, an optical system for homogenizing the energy distribution of the shorter side direction of a rectangular beam spot of a laser light on an irradiated surface is replaced with a light guide. The light guide is a circuit that can confine emitted beams in a certain region and guide and transmit its energy flow in parallel with the axis of a path thereof.

  Recently Added Patents
Systems and methods for identifying malicious domains using internet-wide DNS lookup patterns
Phase locking loop
Circuit device for preventing radiation emission in portable terminal with two cameras
Housekeeping cart
Fixing apparatus
Media used in digital high speed inkjet web press printing
Display screen or portion thereof with graphical user interface
  Randomly Featured Patents
Method and apparatus utilizing communication means hierarchy to configure or monitor an interface device
Method for moving a shearbar in a forage harvester
Air actuated flow control/load breaker/gas seal unit
Arrangement for handling banknotes and/or other documents
Reduced area imaging devices utilizing selected charge integration periods
Extensible electrical cable assembly
Systems and methods of trading closed loans, debt, and other financial obligations
Method for quantitation of collagen in tissue