Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device










Image Number 6 for United States Patent #8105435.

The inhomogeneous energy distribution at the beam spot on the irradiated surface is caused by a structural problem and processing accuracy of the cylindrical lens array forming an optical system. According to the present invention, in the optical system for forming a rectangular beam spot, an optical system for homogenizing the energy distribution of the shorter side direction of a rectangular beam spot of a laser light on an irradiated surface is replaced with a light guide. The light guide is a circuit that can confine emitted beams in a certain region and guide and transmit its energy flow in parallel with the axis of a path thereof.








 
 
  Recently Added Patents
Performance monitoring of advanced process control systems
Oscillator circuit which compensates for external voltage supply, temperature and process
Method and system for routing telephony communications together with modified calling party identifier information
Endotracheal tube
System for determining potential lot consolidation during manufacturing
Integrated circuit devices having conductive structures with different cross sections
Apparatus and sensor for adjusting vertical sensor-alignment
  Randomly Featured Patents
Drilling assembly for making boreholes with undercuts
Disc-clamping mechanism and disc driving apparatus
Call admission control in ATM network
Fiber-optical connector system
Catalyst for aromatization of alkanes, process of making and using thereof
Method and apparatus for analyzing the end face of a multifiber ferrule
Method for iron removal from wine and other beverages
Adhesion of high-melting perfluoroplastic materials
Picture coding apparatus and method thereof
Telemetry transmitter holder