Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device










Image Number 6 for United States Patent #8105435.

The inhomogeneous energy distribution at the beam spot on the irradiated surface is caused by a structural problem and processing accuracy of the cylindrical lens array forming an optical system. According to the present invention, in the optical system for forming a rectangular beam spot, an optical system for homogenizing the energy distribution of the shorter side direction of a rectangular beam spot of a laser light on an irradiated surface is replaced with a light guide. The light guide is a circuit that can confine emitted beams in a certain region and guide and transmit its energy flow in parallel with the axis of a path thereof.








 
 
  Recently Added Patents
Architectural panel with bamboo rings light density embossed surface
Lithographic apparatus and device manufacturing method
Diameter signaling for mobile IPv4
Catheter with multiple electrode assemblies for use at or near tubular regions of the heart
Single well reservoir characterization apparatus and methods
Systems, methods, and devices for selling transaction instruments via web-based tool
Commissioning incoming packet switched connections
  Randomly Featured Patents
Fabrication of three dimensional container diode for use with multi-state material in a non-volatile memory cell
Travel radio alarm clock
Swivel lantern
Water gun
Measuring agglutination parameters
Cooler support
Method for consigning ordered commodities
Counter circuit for controlling the operation of a quartz clock with "one touch" or "fast" electrical resetting of the time
Quick release light fixture
Technique for creating a zero reference for an external pressure transducer