Resources Contact Us Home
Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device

Image Number 6 for United States Patent #8105435.

The inhomogeneous energy distribution at the beam spot on the irradiated surface is caused by a structural problem and processing accuracy of the cylindrical lens array forming an optical system. According to the present invention, in the optical system for forming a rectangular beam spot, an optical system for homogenizing the energy distribution of the shorter side direction of a rectangular beam spot of a laser light on an irradiated surface is replaced with a light guide. The light guide is a circuit that can confine emitted beams in a certain region and guide and transmit its energy flow in parallel with the axis of a path thereof.

  Recently Added Patents
End to end email monitor
Organic light emitting display device and method of manufacturing the same
System and method for browsing tabbed-heterogeneous windows
Biphotonic photosensitizers, nanoparticles containing the same and their use as drugs
Method of interfacing a host operating through a logical address space with a direct file storage medium
Processing data using information embedded in a data request
  Randomly Featured Patents
System and method for driving displays with single latch pixels
Industrial robot
Optical element
System and method for transmitting downlink schedule in WiMax/WiBro relay system
Method and apparatus for forming thin film
Kit for detecting Her-2/neu gene by site-specific metal deposition
Method and device for manufacturing a medical lead
Devices and associated methods for furcating fiber optic cables
Manipulating a compressed video stream
Device for introducing additional air into intake passage leading to combustion chamber