Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device










Image Number 6 for United States Patent #8105435.

The inhomogeneous energy distribution at the beam spot on the irradiated surface is caused by a structural problem and processing accuracy of the cylindrical lens array forming an optical system. According to the present invention, in the optical system for forming a rectangular beam spot, an optical system for homogenizing the energy distribution of the shorter side direction of a rectangular beam spot of a laser light on an irradiated surface is replaced with a light guide. The light guide is a circuit that can confine emitted beams in a certain region and guide and transmit its energy flow in parallel with the axis of a path thereof.








 
 
  Recently Added Patents
Managing imaging of computing devices
Method for drug screening and characterization by calcium flux
Magnetic element with top shield coupled side shield lamination
Selecting from a plural of energy saving modes
Semiconductor device and method for manufacturing the same
Jacket liner
Dual use photovoltaic system
  Randomly Featured Patents
Dynamic range enhancement scheme for imagers
Impact resistant door skin, door including the same, and method of manufacturing an impact resistant door skin from a pre-formed door skin
System and method for generating a custom application
Method and apparatus for progressively deleting media objects from storage
Wide-angle optical system for door viewer
All fiber magneto-optic on-off switch for networking applications
Sprinkler having liquid supply pressure balance in stand by mode
Agricultural machine for swathing products lying on the ground
Method and apparatus for induction heating of an elongated workpiece
Electroactive high storage capacity polyacetylene-co-polysulfur materials and electrolytic cells containing same