Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device










Image Number 6 for United States Patent #8105435.

The inhomogeneous energy distribution at the beam spot on the irradiated surface is caused by a structural problem and processing accuracy of the cylindrical lens array forming an optical system. According to the present invention, in the optical system for forming a rectangular beam spot, an optical system for homogenizing the energy distribution of the shorter side direction of a rectangular beam spot of a laser light on an irradiated surface is replaced with a light guide. The light guide is a circuit that can confine emitted beams in a certain region and guide and transmit its energy flow in parallel with the axis of a path thereof.








 
 
  Recently Added Patents
Probiotic Bifidobacterium strains
Image forming apparatus and method for making density correction in a low resolution image based on edge determination
RF power amplifier circuit with mismatch tolerance
System and method for providing a path avoidance feature in a network environment
Method and system of channel detecting and reporting, terminal, and management center
Power supply device
Liquid crystal display device
  Randomly Featured Patents
Soil decontamination system
Snap device for airbag container
Soccer training and practice device
Desiccant apparatus and method
Apparatus and method for preparing coffee with a fine-bubble froth layer, in particular cappuccino
Percutaneous administration of nitroglycerine
Easily split substrates for the quantification of proteases
5-Substituted-4-oxo-PGI.sub.1 derivatives, PGI.sub.1 compounds of similar structure, their pharmaceutical methods and process for the preparation of said compounds
Methods for treating cancer
Gun cabinet