Resources Contact Us Home
Method of enhancing lithography capabilities during gate formation in semiconductors having a pronounced surface topography

Image Number 6 for United States Patent #8101512.

In a mesa isolation configuration for forming a transistor on a semiconductor island, an additional planarization step is performed to enhance the uniformity of the gate patterning process. In some illustrative embodiments, the gate electrode material may be planarized, for instance, on the basis of CMP, to compensate for the highly non-uniform surface topography, when the gate electrode material is formed above the non-filled isolation trenches. Consequently, significant advantages of the mesa isolation strategy may be combined with a high degree of scalability due to the enhancement of the critical gate patterning process.

  Recently Added Patents
Automatically selecting a paper with increased dimensions than originally desired for printing and adding advertisement content to the increased dimensional area of the paper
Hybrid fiber constructions to mitigate creep in composites
Range extension techniques for a wireless local area network
Cake knife handle
Method for parking or exiting a parking bay and for avoiding a collision of a vehicle, and corresponding assistance systems and vehicle
Method and apparatus for transmitting and receiving extension information of component carrier in wireless communication system
Method and apparatus for monitoring and/or controlling the curing of cements used in medical procedures
  Randomly Featured Patents
Light source unit and light irradiation unit, and device manufacturing method
Phase locked loop circuit having automatic adjustment for free-running frequency of voltage controlled oscillator
Caisson removal process
Anti-collision system
Decoder system for data encoded with interleaving and redundancy coding
Method of making battered and breaded food compositions using calcium pectins
Remote controller
Food additive intended for human consumption and as animal feed and foodstuffs containing it
Portable power working machine
Prismatic battery