Resources Contact Us Home
Method of manufacturing semiconductor device and semiconductor device

Image Number 12 for United States Patent #8084340.

A method of manufacturing a semiconductor device whereby, even in cases where ions are implanted into a shallow region of a semiconductor substrate when a deep well is formed, the influence of the ions on a MOSFET can be removed, thereby eliminating the need for increasing the chip area. A photoresist with a thickness matching the wavelength of exposure light is formed over the semiconductor substrate and then is exposed to the exposure light to form a photoresist pattern with an opening corresponding to a region for forming a first well. Subsequently, using the photoresist pattern as a mask, ions are implanted to form the first well, and after the photoresist pattern is removed, an epitaxial layer is grown over the semiconductor substrate. Consequently, the deep well is virtually located deeper in level than at the time of the ion implantation by an amount corresponding to the thickness of the epitaxial layer.

  Recently Added Patents
Method and system for providing status of a machine
Method and apparatus for map transmission in wireless communication system
Mobile communication device
Semiconductor device and manufacturing method thereof
Methods and systems for temporarily sharing position data between mobile-device users
Methods for the production of aligned carbon nanotubes and nanostructured material containing the same
Power converter for an LED assembly and lighting application
  Randomly Featured Patents
Detecting novel document content
Process for printing on corrugated paper board
Image forming apparatus having a controller that controls a potential
Support stand for shelf
User interface systems and methods for manipulating and viewing digital documents
Method and apparatus for test case evaluation using a cyclic redundancy checker
Vehicle upfront sensor
Fender for automotive vehicle
Electrosurgical generator
Methods, devices and computer program products for presenting screen content