Resources Contact Us Home
Method of manufacturing semiconductor device and semiconductor device

Image Number 11 for United States Patent #8084340.

A method of manufacturing a semiconductor device whereby, even in cases where ions are implanted into a shallow region of a semiconductor substrate when a deep well is formed, the influence of the ions on a MOSFET can be removed, thereby eliminating the need for increasing the chip area. A photoresist with a thickness matching the wavelength of exposure light is formed over the semiconductor substrate and then is exposed to the exposure light to form a photoresist pattern with an opening corresponding to a region for forming a first well. Subsequently, using the photoresist pattern as a mask, ions are implanted to form the first well, and after the photoresist pattern is removed, an epitaxial layer is grown over the semiconductor substrate. Consequently, the deep well is virtually located deeper in level than at the time of the ion implantation by an amount corresponding to the thickness of the epitaxial layer.

  Recently Added Patents
System and method for removing oxide from a sensor clip assembly
Methods and systems to accomplish variable width data input
Location-type tagging using collected traveler data
Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus
Wire catalyst for hydrogenation/dehydrogenation reaction and manufacturing method therefor
Identifying multi-component carrier cells
  Randomly Featured Patents
System for metering and auditing the dots or drops or pulses produced by a digital printer in printing an arbitrary graphic
Metal vapor discharge lamp
Communication assistance system and method
Genetic test for hereditary neuromuscular disease
Separation of thiosulfate from Stretford solution
Integrally molded clip and clip assembly
RNAi-mediated inhibition of HIF1A for treatment of ocular angiogenesis
Fluid filtration system including replaceable filter module
Expandable wheel assembly