Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma processing apparatus










Image Number 8 for United States Patent #8075733.

A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a processing material, is placed and which holds the processing material in the chamber; and a vacuuming unit that is connected to the chamber to discharge the gas in the chamber, in which the chamber, a part for providing gas into the chamber of the gas supply unit, a part for introducing a microwave into the chamber of the microwave supply unit, the object-placing electrode, and the vacuuming unit are disposed coaxially with the center axis of the chamber, and the part for introducing a microwave includes a microwave rotation generator that rotates a polarization plane of the input microwave and supplies the microwave to the chamber.








 
 
  Recently Added Patents
Avalanche photo diode and method of manufacturing the same
Late loading rich media
Radiation-emitting semiconductor chip and method for producing a radiation-emitting semiconductor chip
Methods for processing 2Nx2N block with N being positive integer greater than four under intra-prediction mode and related processing circuits thereof
Wire catalyst for hydrogenation/dehydrogenation reaction and manufacturing method therefor
Packet bundling at the PDCP layer
Method for indicating the process of leaving a parking space
  Randomly Featured Patents
Method and apparatus for sensing air pressure in pneumatic suspension units for vehicles
Image processing apparatus and method
Message-driven processor in a concurrent computer
Call control
Thrombopoietin mimetics
Method of making ultrasonically welded, staked of swaged components in an implantable medical device
Polycrystalline diamond compact including a non-uniformly leached polycrystalline diamond table and applications therefor
Method and system for auto discovery of IP-based network elements
Linear bearing for continuous longitudinal movement
Semiconductor device and method for operating the same