Resources Contact Us Home
Plasma processing apparatus

Image Number 8 for United States Patent #8075733.

A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a processing material, is placed and which holds the processing material in the chamber; and a vacuuming unit that is connected to the chamber to discharge the gas in the chamber, in which the chamber, a part for providing gas into the chamber of the gas supply unit, a part for introducing a microwave into the chamber of the microwave supply unit, the object-placing electrode, and the vacuuming unit are disposed coaxially with the center axis of the chamber, and the part for introducing a microwave includes a microwave rotation generator that rotates a polarization plane of the input microwave and supplies the microwave to the chamber.

  Recently Added Patents
Method for restricting the use of an application program, system for authenticating the user of a measuring apparatus, authentication server, client apparatus and storage medium
Method, base station and system for adjusting cell wireless configuration parameter
Biodegradable aliphatic-aromatic copolyester for use in nonwoven webs
Solid-state imaging device, method for manufacturing solid-state imaging device, and electronic apparatus
Method for editing a media clip in a mobile terminal device, a terminal device utilizing the method and program means for implementing the method
Isolation rings for blocking the interface between package components and the respective molding compound
Polarization preserving front projection screen microstructures
  Randomly Featured Patents
Packet coalescing
Room temperature curable surface coatings and methods of producing and applying same
Dual unit cable stay building
Multi-positioner machining system
Universal slip-in seat for stand-up jet ski
Micropipette, micropipette system, and method for using micropipette
Process for killing cells
Motor speed controller
Voltage level shifting apparatus
Light-emitting material comprising photoactive group-bonded polysilsesquioxane having a ladder structure, thin film using the same and organic electronic device comprising the same