Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma processing apparatus










Image Number 8 for United States Patent #8075733.

A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a processing material, is placed and which holds the processing material in the chamber; and a vacuuming unit that is connected to the chamber to discharge the gas in the chamber, in which the chamber, a part for providing gas into the chamber of the gas supply unit, a part for introducing a microwave into the chamber of the microwave supply unit, the object-placing electrode, and the vacuuming unit are disposed coaxially with the center axis of the chamber, and the part for introducing a microwave includes a microwave rotation generator that rotates a polarization plane of the input microwave and supplies the microwave to the chamber.








 
 
  Recently Added Patents
Process for preparing soybean curd using micronized solution of soybean curd
Managing aging of silicon in an integrated circuit device
Light receiving element with offset absorbing layer
LED illumination systems
Method and apparatus for wireless transmission of diagnostic information
Sensor apparatus and information processing apparatus
Picture quality control method and image display using same
  Randomly Featured Patents
Process for constructing a wooden building
Methods and systems for data processing and their applications
Superconducting energy storage magnet
Stereospecific process for the preparation of furo[3,4-c]pyridine, enantiomer, compounds thus obtained and therapeutical compositions thereof
Use of aqueous dispersions as heat-seal adhesives
Tub spout
Compounds as inhibitors of hepatitis C virus NS3 serine protease
Connectors with adjustable elements to prevent undesired coupling of adjacent conduits
Method and system for dispatching semiconductor lots to manufacturing equipment for fabrication
Animal trap and trigger mechanism