Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma processing apparatus










Image Number 8 for United States Patent #8075733.

A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a processing material, is placed and which holds the processing material in the chamber; and a vacuuming unit that is connected to the chamber to discharge the gas in the chamber, in which the chamber, a part for providing gas into the chamber of the gas supply unit, a part for introducing a microwave into the chamber of the microwave supply unit, the object-placing electrode, and the vacuuming unit are disposed coaxially with the center axis of the chamber, and the part for introducing a microwave includes a microwave rotation generator that rotates a polarization plane of the input microwave and supplies the microwave to the chamber.








 
 
  Recently Added Patents
Piperidine compounds, pharmaceutical composition comprising the same and its use
Production of L-ribose and other rare sugars
Bar connecting apparatus with clip advance
Catalytic cracking catalyst compositions having improved bottoms conversion
System and method for managing individual use of a mobile telecommunications account
Therapeutic uses of inhibitors of RTP801
Safety detection and protection system for power tools
  Randomly Featured Patents
Apparatus for analyzing semiconductor memories
Method for forming polysilicon-germanium gate in CMOS transistor and device made thereby
Self-centering drill bit with pilot tip
Multi-phase gas-type circuit-interrupter substitution modular construction
Light-emitting element and iridium complex
Shoulder strap apparatus for carrying weaponry on the person
Carrying and storage case
Ink leakage control arrangement for an ink cartridge
D.C. Impulsion motor
Temporary lighting fixture having a fastener