Resources Contact Us Home
Plasma processing apparatus

Image Number 8 for United States Patent #8075733.

A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a processing material, is placed and which holds the processing material in the chamber; and a vacuuming unit that is connected to the chamber to discharge the gas in the chamber, in which the chamber, a part for providing gas into the chamber of the gas supply unit, a part for introducing a microwave into the chamber of the microwave supply unit, the object-placing electrode, and the vacuuming unit are disposed coaxially with the center axis of the chamber, and the part for introducing a microwave includes a microwave rotation generator that rotates a polarization plane of the input microwave and supplies the microwave to the chamber.

  Recently Added Patents
Imaging apparatus having selection unit to select focus detection areas
Methods and devices for enforcing network access control utilizing secure packet tagging
Polarization preserving front projection screen microstructures
Anti-proliferative and anti-inflammatory agent combination for treatment of vascular disorders with an implantable medical device
Using rule induction to identify emerging trends in unstructured text streams
Optimizing federated and ETL'd databases with considerations of specialized data structures within an environment having multidimensional constraint
Method and device for peer arrangement in single substream upload P2P overlay networks
  Randomly Featured Patents
TV program database
Milking parlour and method for the production thereof
Stent having tapered struts
Optical power divider and fabrication method thereof
Method to make an endless, flat, flexible belt of pourable plastics
Side chain halogenated alkylphenyl haloformates and derivatives
Method for producing ketones and phenols
Method and arrangement for damping wall movement
Method and apparatus for cooling a winding in the rotor of an electrical machine