Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma processing apparatus










Image Number 8 for United States Patent #8075733.

A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a processing material, is placed and which holds the processing material in the chamber; and a vacuuming unit that is connected to the chamber to discharge the gas in the chamber, in which the chamber, a part for providing gas into the chamber of the gas supply unit, a part for introducing a microwave into the chamber of the microwave supply unit, the object-placing electrode, and the vacuuming unit are disposed coaxially with the center axis of the chamber, and the part for introducing a microwave includes a microwave rotation generator that rotates a polarization plane of the input microwave and supplies the microwave to the chamber.








 
 
  Recently Added Patents
Veronica plant named `Amethyst Plume`
Interference suppressing OFDM system for wireless communications
Charged particle source with multiple selectable particle emitters
System, apparatus, and method for fast startup of USB devices
Method for encoding signal, and method for decoding signal
Picture information coding device and coding method
Communication network management system, method and program, and management computer
  Randomly Featured Patents
Brake assembly for skateboard
Microelectronic contacts with asperities and methods of making same
Process for terminating polyphenylene ethers reactions with amino carboxylic acids and reducing agents
Process and apparatus for impregnation and expansion of tobacco
Identifying a potential breakpoint location in a code path in a computer program based upon the frequency of execution of the code path as identified in collected profile data
Camera with integral flash unit
Method and device for removing light
Vest
Short-range wireless communication
Composition for antiperspirant aerosol