Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma processing apparatus










Image Number 8 for United States Patent #8075733.

A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a processing material, is placed and which holds the processing material in the chamber; and a vacuuming unit that is connected to the chamber to discharge the gas in the chamber, in which the chamber, a part for providing gas into the chamber of the gas supply unit, a part for introducing a microwave into the chamber of the microwave supply unit, the object-placing electrode, and the vacuuming unit are disposed coaxially with the center axis of the chamber, and the part for introducing a microwave includes a microwave rotation generator that rotates a polarization plane of the input microwave and supplies the microwave to the chamber.








 
 
  Recently Added Patents
Tris-quaternary ammonium salts and methods for modulating neuronal nicotinic acetylcholine receptors
Encoding method, encoding apparatus, decoding method, decoding apparatus, and system
Basic solar module for a device collecting solar radiation
Neural stimulation systems, devices and methods
Polymorph of nilotinib hydrochloride
Display screen or portion thereof with graphical user interface
Frameless video system
  Randomly Featured Patents
Electroplating method by transmitting electric current from a ball side
Robot
Arrangement for reducing nitrogen oxides in exhaust gases
Stabilizing adjustable brackets for designing and constructing a swing set/play set system
Power-saving printer which controls fixing device based on print data presence
Recorded image detection system for updatable microfilm
Anchoring bolt
High efficiency catalyst for high bulk density polyethylene
TCP window size performance optimization in wireless networks
Device for detecting a parameter associated with the state of a vehicle, especially an automobile