Resources Contact Us Home
Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing

Image Number 11 for United States Patent #8075698.

A substrate processing unit comprises a processing vessel for receiving a substrate, a cleaning gas supply system for supplying cleaning gas to the processing vessel so as to clean the interior of the processing vessel, an exhauster for exhausting the processing vessel, an operating state detector for detecting the operating state of the exhauster, and an end point detector for detecting the end point of the cleaning on the basis of the detection result from the operating state detector.

  Recently Added Patents
Suspension with flexure having laminated structure and bonding pads on opposing surfaces thereof, and head gimbal assembly and disk drive unit with the same
Pharmaceutical composition comprising gabapentin or an analogue thereof and an .alpha.-aminoamide and its analgesic use
Secure data exchange between data processing systems
Patient programmer with automated MRI compatibility verification for active implantable medical device
Method for installing industrial components in an environment
Backside structure and methods for BSI image sensors
Image sensing apparatus and method of controlling the image sensing apparatus
  Randomly Featured Patents
Collapsible circuit board mount
Method and apparatus for making bags
Driving device for LED module
Digital signal encoding/decoding apparatuses and related methods
Fish bait protector
Laminar stream spout attachment
Refractory insulation
Fuel cut control system for internal combustion engine
A/D converter utilizing successive approximation
Dispenser for a drawer-type dishwasher