Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing










Image Number 11 for United States Patent #8075698.

A substrate processing unit comprises a processing vessel for receiving a substrate, a cleaning gas supply system for supplying cleaning gas to the processing vessel so as to clean the interior of the processing vessel, an exhauster for exhausting the processing vessel, an operating state detector for detecting the operating state of the exhauster, and an end point detector for detecting the end point of the cleaning on the basis of the detection result from the operating state detector.








 
 
  Recently Added Patents
Synthesized interoperable communications
Method and apparatus for information exchange over a web based environment
Front exterior of an automotive tail lamp
Integrated wire carrier for electrode array
Thermoplastic resin composition
Thermoforming sheet loading apparatus and method
Magnetic memory and method of manufacturing the same
  Randomly Featured Patents
Telewriting device
Method of forming shared contact structure
Method for resource allocation & scheduling, and system therefor
Solid catalyst component for .alpha.-olefin polymerization and process for producing .alpha.-olefin polymer
Magnesium dichloride-based adducts and catalyst components obtained therefrom
Intramyocardial injection of autologous bone marrow
Use of .alpha.-alkylglucosides and .alpha.-alkylglucoside esters as anti-microbial an agents
Method and apparatus for producing burnt material and for generating electrical energy
Co-access bipolar ablation probe
Lantana plant named `2003.219`