Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing










Image Number 11 for United States Patent #8075698.

A substrate processing unit comprises a processing vessel for receiving a substrate, a cleaning gas supply system for supplying cleaning gas to the processing vessel so as to clean the interior of the processing vessel, an exhauster for exhausting the processing vessel, an operating state detector for detecting the operating state of the exhauster, and an end point detector for detecting the end point of the cleaning on the basis of the detection result from the operating state detector.








 
 
  Recently Added Patents
Sponge
Carbon nanotube fiber spun from wetted ribbon
Bundled flexible cable with water resistant structure
Modular utility rack
Simulation tool for air traffic communications security
Video conference
Solar power system with communication network utilizing magnetic fields
  Randomly Featured Patents
Transducing phages of Actinomycetales
Sampling arrangement
Nasal aspiration device
Backlash acceleration control method
Method for producing a fibrous web and twin mesh former for performing said method
Nuclear binding assay for steroid receptor functionality in cancerous cells
Underreamer with adjustable arm extension
Combined wet-wet differential and gage transducer employing a common housing
Deviation correction apparatus for optical disc light beams
Step-down gear unit