Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing










Image Number 11 for United States Patent #8075698.

A substrate processing unit comprises a processing vessel for receiving a substrate, a cleaning gas supply system for supplying cleaning gas to the processing vessel so as to clean the interior of the processing vessel, an exhauster for exhausting the processing vessel, an operating state detector for detecting the operating state of the exhauster, and an end point detector for detecting the end point of the cleaning on the basis of the detection result from the operating state detector.








 
 
  Recently Added Patents
Food safety printer
(4930
Reovirus for the treatment of cellular proliferative disorders
Data processing apparatus and data processing method for reducing an uneven color made up of two or more ink colors
Method and system for dynamically representing distributed information
Method and apparatus for belling plastic pipe
Pixel circuit
  Randomly Featured Patents
Orthopedic device
Self-tuning clock recovery phase-locked loop circuit
Method and apparatus for orienting magnetic flakes
Supported nanoparticle catalysts manufactured using caged catalyst atoms
Adhesive book cover
Engine cooler
Device for reproducing a recorded still image with a general-purpose computer
Electrodes possessing pH indicator
Personal navigator system
Personal weighing scale