Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing










Image Number 11 for United States Patent #8075698.

A substrate processing unit comprises a processing vessel for receiving a substrate, a cleaning gas supply system for supplying cleaning gas to the processing vessel so as to clean the interior of the processing vessel, an exhauster for exhausting the processing vessel, an operating state detector for detecting the operating state of the exhauster, and an end point detector for detecting the end point of the cleaning on the basis of the detection result from the operating state detector.








 
 
  Recently Added Patents
Method for manufacturing non-volatile memory device, non-volatile memory element, and non-volatile memory device
Use of emerging non-volatile memory elements with flash memory
Information terminal, setting information distribution server, right information distribution server, network connection setting program and method
(4930
Method and apparatus for storing email messages
Automated solar collector installation design including ability to define heterogeneous design preferences
Input device with photodetector pairs
  Randomly Featured Patents
Device for adjusting the position of a sliding roof [cover ] which can be raised
Aerosol cap
Mobile interoperability workstation controller having video capabilities within an incident communications network
Deep filter element suitable for replacing a shallow filter element and having a support frame made from thin stock
Remote health management system
Combined electrical safety outlet and timer
Inorganic electroluminescence device
Variable wall mining machine
Illuminating device for a stereo microscope
Coding using a mapping between a syntax element and a code word