Resources Contact Us Home
High-rate groove pattern

Image Number 3 for United States Patent #8062103.

The invention provides a polishing pad useful for polishing at least one of a magnetic, optical and semiconductor substrate in the presence of a polishing medium with a polishing pad. The polishing pad comprises a center, an inner region surrounding the center, a transition region connecting grooves from the inner region to an outer region surrounding the inner region. The outer region has multiple grooves with a high-rate path. The transition region is adjacent the outer region and within a radius from the center defined as follows: .times..times..times..times..times..times. ##EQU00001## ##EQU00001.2## .times..function..times..theta..times..times..function..times..theta..tim- es..times..times..times..times..theta..times..times. ##EQU00001.3## with the inner region originating continuous grooves that extend uninterrupted to the outer region.

  Recently Added Patents
Train car for proppant containers
Brushless electric motor or generator in shell construction
Method and apparatus for optimizing paging in a communication network
Image processing system, image processing method and program for image processing
Inspection systems and methods for detecting defects on extreme ultraviolet mask blanks
Probiotic enriched and low organic acid food products
Statistical identification of instances during reconciliation process
  Randomly Featured Patents
Method of manufacturing an edge reflection type surface acoustic wave device
Process for the preparation of benzyl-metal compounds and process for the preparation of 4-phenyl-1-butenes by the use of the same
Luggage cover
Underwater trenching apparatus
Buffing wheel
Waveform generator, semiconductor testing device and semiconductor device
Activated carbon systems for facilitating use of dimethyl sulfoxide (DMSO) by removal of same, related compounds, or associated odors
Lateral connection for a via-less thin film resistor
Separable recombinable multi-part container with separately sealed chambers
High-power cladding-pumped broadband fiber source and amplifier