Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for planarization of wafer and method for formation of isolation structure in top metal layer










Image Number 12 for United States Patent #8058175.

The invention discloses a planarization method for a wafer having a surface layer with a recess, comprises: forming an etching-resist layer on the surface layer to fill the entire recess; etching the etching-resist layer and the surface layer, till the surface layer outside the recess is flush to or lower than the bottom of the recess, the etching speed of the surface layer being higher than that of the etching-resist layer; removing the etching-resist layer; and etching the surface layer to a predetermined depth. The method can avoid concentric ring recesses on the surface of the wafer resulted from a chemical mechanical polishing (CMP) process in the prior art, and can be used to obtain a wafer surface suitable for optical applications.








 
 
  Recently Added Patents
Memory circuit and method of forming the same using reduced mask steps
Process for producing a plasma protein-containing medicament with reduced concentration of citrate and metals
Vehicle window opening and closing control device
Method and device for peer arrangement in single substream upload P2P overlay networks
Distortion compensation device, distortion compensation method, and radio transmitter
Sink
Printing apparatus having extendable functionality and method thereof
  Randomly Featured Patents
Chip package and method for fabricating the same
Car towing apparatus with surge brake
Hydraulic work machine
Combined handle and casing for a window operator
Method for improved wireless optical communication and frames for use in a wireless optical communication system
Mastering tools and systems and methods for forming a plurality of cells on the mastering tools
ESD protection structure
Anticoagulant peptidyl-arginine aldehyde derivatives
Automatic notification in a sequential process
WiMAX R6 control architecture