Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for planarization of wafer and method for formation of isolation structure in top metal layer










Image Number 11 for United States Patent #8058175.

The invention discloses a planarization method for a wafer having a surface layer with a recess, comprises: forming an etching-resist layer on the surface layer to fill the entire recess; etching the etching-resist layer and the surface layer, till the surface layer outside the recess is flush to or lower than the bottom of the recess, the etching speed of the surface layer being higher than that of the etching-resist layer; removing the etching-resist layer; and etching the surface layer to a predetermined depth. The method can avoid concentric ring recesses on the surface of the wafer resulted from a chemical mechanical polishing (CMP) process in the prior art, and can be used to obtain a wafer surface suitable for optical applications.








 
 
  Recently Added Patents
Transparent zebrafish and preparation method thereof
Portable stand for computer
Apparatus and methods for providing efficient space-time structures for preambles, pilots and data for multi-input, multi-output communications systems
Horizontal cable manager
Pyridazine compounds for controlling invertebrate pests
Nitrogen-doped carbon-supported cobalt-iron oxygen reduction catalyst
Nucleotide sequence coding for variable regions of .beta. chains of human T lymphocyte receptors, corresponding peptide segments and the diagnostic and therapeutic uses
  Randomly Featured Patents
Flatware
Optical apparatus, and wavelength conversion laser light source, image display apparatus, and laser light source device adopting such optical apparatus
Aircraft valve assemblies including clamp-specific baulking tab arrays and methods for the manufacture thereof
Device for separating in a continuous process particles from a first liquid and introducing the separated particles into a second liquid
Shock isolation for selective call receivers
Computer controlled lighting system with distributed processing
Optical modulator and optical communication system
Electrical module
Apparatus and methods for gas extraction
Method of making conductor contacts having enhanced reliability