Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for planarization of wafer and method for formation of isolation structure in top metal layer










Image Number 11 for United States Patent #8058175.

The invention discloses a planarization method for a wafer having a surface layer with a recess, comprises: forming an etching-resist layer on the surface layer to fill the entire recess; etching the etching-resist layer and the surface layer, till the surface layer outside the recess is flush to or lower than the bottom of the recess, the etching speed of the surface layer being higher than that of the etching-resist layer; removing the etching-resist layer; and etching the surface layer to a predetermined depth. The method can avoid concentric ring recesses on the surface of the wafer resulted from a chemical mechanical polishing (CMP) process in the prior art, and can be used to obtain a wafer surface suitable for optical applications.








 
 
  Recently Added Patents
Optical receiver and optical transfer apparatus
Vehicle-mounted camera stabilized passively by vibration isolators
Coordinate locating method and apparatus
Frame syncrhonization in orthogonal frequency-division multiplexing systems
Human and mouse targeting peptides identified by phage display
HYR1 as a target for active and passive immunization against Candida
Treatment devices with deliver-activated inflatable members, and associated systems and methods for treating the spinal cord and other tissues
  Randomly Featured Patents
Method for analyzing blood test sample and dry analytical element and analytical kit utilizing the method
Rocker recliner
Controlling mechanical response characteristics of a disc drive actuator by adjusting a fastener engaging the actuator shaft to vary axial force on the bearing assembly
Organic electroluminescent display and manufacturing method thereof, electro-optic device and manufacturing method thereof, and electronic device
Variable displacement supercharging system and method for detecting abnormality of supercharging system
Method of making a lithium-bromine cell
Antitheft bicycle handlebar bag
Image distributing system
Thermal processing apparatus
Flexible magnetic disc sheet