Resources Contact Us Home
Method for manufacturing display device

Image Number 12 for United States Patent #8043901.

The present invention relates to a method for manufacturing a display device including a p-channel thin film transistor and an n-channel thin film transistor having a microcrystalline semiconductor film each of which are an inverted-staggered type, and relates to a method for formation of an insulating film and a semiconductor film which are included in the thin film transistor. Two or more kinds of high-frequency powers having different frequencies are supplied to an electrode for generating glow discharge plasma in a reaction chamber. High-frequency powers having different frequencies are supplied to generate glow discharge plasma, so that a thin film of a semiconductor or an insulator is formed. High-frequency powers having different frequencies (different wavelength) are superimposed and applied to the electrode of a plasma CVD apparatus, so that densification and uniformity of plasma for preventing the effect of surface standing wave of plasma can be realized.

  Recently Added Patents
Reserving a time block in a calendar application to account for a travel time between geographic locations of appointments
Method for operation of multi-layer-multi-turn high efficiency inductors
VGPU: a real time GPU emulator
Method and system for presenting live video from video capture devices on a computer monitor
Polishing composition
Cathode material for lithium ion secondary battery and lithium ion secondary battery using it
  Randomly Featured Patents
Pressure transmitter housing
Clip driver
Electrical outlet box
Managing memory systems containing components with asymmetric characteristics
Connector and connector attachment structure
Homogeneous laundry detergent slurries containing amphoteric surface-active agents
Deposition heaters
Toner projection system
Digital memory cell device
Method of preparing quaternized amidoamine surfactants