Resources Contact Us Home
Method for manufacturing display device

Image Number 12 for United States Patent #8043901.

The present invention relates to a method for manufacturing a display device including a p-channel thin film transistor and an n-channel thin film transistor having a microcrystalline semiconductor film each of which are an inverted-staggered type, and relates to a method for formation of an insulating film and a semiconductor film which are included in the thin film transistor. Two or more kinds of high-frequency powers having different frequencies are supplied to an electrode for generating glow discharge plasma in a reaction chamber. High-frequency powers having different frequencies are supplied to generate glow discharge plasma, so that a thin film of a semiconductor or an insulator is formed. High-frequency powers having different frequencies (different wavelength) are superimposed and applied to the electrode of a plasma CVD apparatus, so that densification and uniformity of plasma for preventing the effect of surface standing wave of plasma can be realized.

  Recently Added Patents
Method and apparatus for controlling peak amplifier and doherty power amplifier
Intelligent and automated code deployment
Portion of a display panel with an unhappy facial expression icon
Methods of operating non-volatile memory devices during write operation interruption, non-volatile memory devices, memories and electronic systems operating the same
Catalysts and process for producing aldehydes
Image display device and method of changing first EDID with second EDID wherein the second EDID information is compatible with image display device
Method for manufacturing semiconductor device
  Randomly Featured Patents
Portion of a carton
Shaft assembly
Display device capable of color display used in operation mode setting of image formation apparatus
Single file conveyor system
Method of forming dynamic membrane on stainless steel support
Preparation of ammonium rare earth double oxalates and rare earth oxides produced therefrom
Threshold correction circuit, integrated circuit with threshold correction function, and circuit board with threshold correction function
Mouth guard retainer
Exterior surface configuration of a vehicle front light
EV drivetrain inverter with V/HZ optimization