Resources Contact Us Home
Method for manufacturing display device

Image Number 12 for United States Patent #8043901.

The present invention relates to a method for manufacturing a display device including a p-channel thin film transistor and an n-channel thin film transistor having a microcrystalline semiconductor film each of which are an inverted-staggered type, and relates to a method for formation of an insulating film and a semiconductor film which are included in the thin film transistor. Two or more kinds of high-frequency powers having different frequencies are supplied to an electrode for generating glow discharge plasma in a reaction chamber. High-frequency powers having different frequencies are supplied to generate glow discharge plasma, so that a thin film of a semiconductor or an insulator is formed. High-frequency powers having different frequencies (different wavelength) are superimposed and applied to the electrode of a plasma CVD apparatus, so that densification and uniformity of plasma for preventing the effect of surface standing wave of plasma can be realized.

  Recently Added Patents
Light-emitting device, film-forming method and manufacturing apparatus thereof, and cleaning method of the manufacturing apparatus
Methods and systems for identifying and changing resolutions to cause an aspect ratio of a printed image to match an aspect ratio of image data
Battery cell separator
Motor vehicle, toy and/or replica
Mode detection for DVB receiver
Optical receiver and optical transfer apparatus
Maize hybrid X95C382
  Randomly Featured Patents
Heat exchangers with clusters of straight or corrugated tubes, especially to systems for supporting the tubes at fixed and movable axial levels
Methods and apparatus for injection molding and injection blow molding multi-layer plastic and the articles made thereby
Animal ear covering
Multi-lamps instant start electronic ballast
Oligomeric compounds and compositions for use in modulation of small non-coding RNAs
Optical microscope using an interferometric source of two-color, two-beam entangled photons
Data transmitter-receiver, bidirectional data transmitting system, and data transmitting-receiving method
Fire door lock mechanism
Headlamp for vehicle
Trolling motor steering control