Resources Contact Us Home
Method for manufacturing display device

Image Number 12 for United States Patent #8043901.

The present invention relates to a method for manufacturing a display device including a p-channel thin film transistor and an n-channel thin film transistor having a microcrystalline semiconductor film each of which are an inverted-staggered type, and relates to a method for formation of an insulating film and a semiconductor film which are included in the thin film transistor. Two or more kinds of high-frequency powers having different frequencies are supplied to an electrode for generating glow discharge plasma in a reaction chamber. High-frequency powers having different frequencies are supplied to generate glow discharge plasma, so that a thin film of a semiconductor or an insulator is formed. High-frequency powers having different frequencies (different wavelength) are superimposed and applied to the electrode of a plasma CVD apparatus, so that densification and uniformity of plasma for preventing the effect of surface standing wave of plasma can be realized.

  Recently Added Patents
Image reproduction system and image reproduction processing program
Solar energy converter with improved photovoltaic efficiency, frequency conversion and thermal management permitting super highly concentrated collection
Decoding and presentation time stamps for MPEG-4 advanced video coding
Business card assembly
System and method for enabling image recognition and searching of remote content on display
Apoptosis inductor extracted from potato, potato foodstuff containing the inductor, and processed product thereof
Positive electrode active material for nonaqueous electrolyte secondary battery
  Randomly Featured Patents
Method and arrangement for lambda control
Fluorescent lamp fixture
Differential apparatus
Method of monitoring a vehicle interior
Camera system and method for picture sharing using geotagged pictures
Semiconductor devices, a system including semiconductor devices and methods thereof
System for controlling triggering of adsorber regeneration
Heavy truck bug and gravel shield
Automatic resetting target