Resources Contact Us Home
Plasma processing apparatus

Image Number 13 for United States Patent #8038836.

A plasma processing apparatus includes a barrier wall member disposed between a plasma generation chamber and a processing chamber to separate the plasma generation chamber from the processing chamber. The barrier wall member assumes a fin structure achieved by disposing in a radial pattern numerous plate-like fin members extending from a central area thereof toward a peripheral edge. An upper end portion of each fin member overlaps a lower end portion of an adjacent fin member. The fin members are disposed with gaps formed between them and are made to range upward with a tilt along the circumferential direction.

  Recently Added Patents
Systems and methods for assigning a template to an existing network configuration
Changing a system clock rate synchronously
Methods and apparatus to determine impressions using distributed demographic information
Soybean cultivar CL1013663
System for controlled release of an active principle and method for preparation
Package for product
Verification of a portable consumer device in an offline environment
  Randomly Featured Patents
Image processing system, projector, program, information storage medium and image processing method
Lubricant for metal forming
Under garment providing support
Impurity control in HDP-CVD DEP/ETCH/DEP processes
Story telling game and apparatus
Retainer for revolver yoke stud
Alkenylphosphonic and -phosphinic acid esters, process for their preparation, hydrogels produced using them, and their use
Instantaneous radioiodination of rose bengal at room temperature and a cold kit therefor
Heat exchanger core assembly for engine cooling system
Mouthpiece valve for escape breathing apparatus