Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma processing apparatus










Image Number 13 for United States Patent #8038836.

A plasma processing apparatus includes a barrier wall member disposed between a plasma generation chamber and a processing chamber to separate the plasma generation chamber from the processing chamber. The barrier wall member assumes a fin structure achieved by disposing in a radial pattern numerous plate-like fin members extending from a central area thereof toward a peripheral edge. An upper end portion of each fin member overlaps a lower end portion of an adjacent fin member. The fin members are disposed with gaps formed between them and are made to range upward with a tilt along the circumferential direction.








 
 
  Recently Added Patents
Method for controlling a clutch unit
Film deposition method and film deposition apparatus
Imaging device, display device, control method, and method for controlling area change
Low thermal bridge building components
Garden furniture
Substrate treating apparatus and substrate treating method
Fluidic conduit with repeated disturbance of laminar flow
  Randomly Featured Patents
Lens-fitted photographic film package
Polyacrylamide hydrogel as a soft tissue filler endoprosthesis
Device for forming channels using detectors spaced out on a circular base
Snow making using low pressure air and water injection
Atomic analyzer
Loading and unloading station for conveyors with suspended trolley driving systems
Card shuffler with card rank and value reading capability
In-plane field type liquid crystal display device comprising liquid crystal molecules with more than two kinds of reorientation directions
Main shaft device for machine tools
Process for making holograms and holography device