Resources Contact Us Home
Plasma processing apparatus

Image Number 13 for United States Patent #8038836.

A plasma processing apparatus includes a barrier wall member disposed between a plasma generation chamber and a processing chamber to separate the plasma generation chamber from the processing chamber. The barrier wall member assumes a fin structure achieved by disposing in a radial pattern numerous plate-like fin members extending from a central area thereof toward a peripheral edge. An upper end portion of each fin member overlaps a lower end portion of an adjacent fin member. The fin members are disposed with gaps formed between them and are made to range upward with a tilt along the circumferential direction.

  Recently Added Patents
Method of making an array of nucleic acid colonies
Denial of service (DoS) attack prevention through random access channel resource reallocation
ESD protection device and method for producing the same
Brushless electric motor or generator in shell construction
Keypoint descriptor generation by complex wavelet analysis
Adaptive input interface
Process for producing polyols
  Randomly Featured Patents
Combined liquid dispenser, container shroud and cupholder
High capacity water misting gun
ATM switch circuit configuration system
Multiple throttle mechanism for internal combustion engines
Fluorescence observation apparatus
Construction set game cube
Article handling mechanism for attachment to warehouse trucks
System of articulated legs for toy figures
Automatic transmission
Apparatus and method for ultrasonically cleaning irradiated nuclear fuel assemblies