Resources Contact Us Home
Plasma processing apparatus

Image Number 13 for United States Patent #8038836.

A plasma processing apparatus includes a barrier wall member disposed between a plasma generation chamber and a processing chamber to separate the plasma generation chamber from the processing chamber. The barrier wall member assumes a fin structure achieved by disposing in a radial pattern numerous plate-like fin members extending from a central area thereof toward a peripheral edge. An upper end portion of each fin member overlaps a lower end portion of an adjacent fin member. The fin members are disposed with gaps formed between them and are made to range upward with a tilt along the circumferential direction.

  Recently Added Patents
Tungsten barrier and seed for copper filled TSV
Developing cartridge
Managing method and apparatus for servicing contents provided by content provider
Method for generating codewords
Flip flop shoe
Method of driving stereoscopic display apparatus and stereoscopic display apparatus
Portable communication terminal, communication method and control program
  Randomly Featured Patents
Methods and apparatus for managing asynchronous dependent I/O for a virtual fibre channel target
Apparatus for providing a portable source of high pressure gas
Funtionally structured distributed data processing system
Horizon-to-horizon TVRO antenna mount
Apparatus for transporting hazardous materials
Flowline connector
Bound, active cellular organelles and method of producing same
Market data recovery
Ring chuck to hold 200 and 300 mm wafer
Radio communication system