Resources Contact Us Home
Heat treatment method for preventing substrate deformation

Image Number 4 for United States Patent #8030225.

A heat treatment method which can prevent heat deformation of a substrate caused during a heat treatment process on the substrate with a thin film formed on its surface is provided. The heat treatment method in accordance with the present invention includes (a) stacking a second substrate 10b on a first substrate 10a; and (b) stacking a weight 20 on the second substrate 10b, wherein the first substrate 10a and the second substrate 10b are stacked, with thin films 12 of the substrates 10a and 10b being in contact with each other. In accordance with the present invention, deformation of the substrate can be prevented by stacking the substrates, with thin films formed on the substrates being in contact with each other, and placing a weight on the stacked substrates during the heat treatment process.

  Recently Added Patents
Bioactive agent-loaded heart-targeting nanoparticles
Image processor
Dihydronaphthyridinyl(organo)methanone analogs as positive allosteric mGluR5 modulators
Far field telemetry operations between an external device and an implantable medical device during recharge of the implantable medical device via a proximity coupling
Systems and methods for adaptive error thresholds or adaptive modulation schemes based on atmospheric conditions
Cable exit trough with insert
Conductive polymer and a solid electrolytic capacitor using the same as a solid electrolyte
  Randomly Featured Patents
Orthopedic device
OFDM signal organized so as to simplify reception
System and method for receiving and decoding electromagnetic transmissions within a well
System for predicting or detecting a fault in a solenoid utilization system
Use of a bacterial component to enhance targeted delivery of polynucleotides to cells
Method and system to determine the geographic location of a network user
Combination man overboard personal rescue light
Automatic document feeder and registration system therefor
Interface between vendors and customers that uses intelligent agents