Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Heat treatment method for preventing substrate deformation










Image Number 4 for United States Patent #8030225.

A heat treatment method which can prevent heat deformation of a substrate caused during a heat treatment process on the substrate with a thin film formed on its surface is provided. The heat treatment method in accordance with the present invention includes (a) stacking a second substrate 10b on a first substrate 10a; and (b) stacking a weight 20 on the second substrate 10b, wherein the first substrate 10a and the second substrate 10b are stacked, with thin films 12 of the substrates 10a and 10b being in contact with each other. In accordance with the present invention, deformation of the substrate can be prevented by stacking the substrates, with thin films formed on the substrates being in contact with each other, and placing a weight on the stacked substrates during the heat treatment process.








 
 
  Recently Added Patents
Methods for measuring media performance associated with adjacent track interference
Color image forming apparatus with contact control of process units
Passive charge cord release system for an electric vehicle
Antenna array system
Large scale data storage system with fault tolerance
Eye therapy system
Apparatus and method for performing lawful intercept in group calls
  Randomly Featured Patents
Boat window
Steaming device with a rinsing feature
Toothbrush sterilizer with automatic control
Module channel for acquiring and tracking in a radio communication system
Tubular stent with oval struts
Motion information extraction system
Boot
Method of producing epoxides
Reducing level of interference chemicals in water circulation of wood-based fibre suspension processes
Methods of receiving signaling information in a communication network supporting a broadcast-multicast service