Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Heat treatment method for preventing substrate deformation










Image Number 4 for United States Patent #8030225.

A heat treatment method which can prevent heat deformation of a substrate caused during a heat treatment process on the substrate with a thin film formed on its surface is provided. The heat treatment method in accordance with the present invention includes (a) stacking a second substrate 10b on a first substrate 10a; and (b) stacking a weight 20 on the second substrate 10b, wherein the first substrate 10a and the second substrate 10b are stacked, with thin films 12 of the substrates 10a and 10b being in contact with each other. In accordance with the present invention, deformation of the substrate can be prevented by stacking the substrates, with thin films formed on the substrates being in contact with each other, and placing a weight on the stacked substrates during the heat treatment process.








 
 
  Recently Added Patents
Messenger bag
System and method for the analysis of biodiesel
Method and apparatus for communications
Data driver and liquid crystal display device using the same
Pallet
Packet communication system and packet communication method, and node and user device
Resistor and manufacturing method thereof
  Randomly Featured Patents
Method and apparatus for measuring transient electromagnetic and electrical energy components propagated in an earth formation
Apparatus for hanging items from vehicles
Pressure sensitive field effect device
Method and apparatus for extruding glass tubing
Adjustable food shield
Child's aromatherapy cleaning implement
Parenteral formulations of 1-diphenylmethyl-4-((2-(4-methylphenyl)-5-methyl-1H-imidazol-4-yl)methyl )piperazine
Strut bearing
Baler with a weighing device
Method and apparatus for generating hollow and non-hollow solid representations of volumetric data