Resources Contact Us Home
Method of fabricating nitride-based compound layer, GaN substrate and vertical structure nitride-based semiconductor light emitting device

Image Number 4 for United States Patent #8026156.

In a method for fabricating a nitride-based compound layer, first, a GaN substrate is prepared. A mask layer with a predetermined pattern is formed on the GaN substrate to expose a partial area of the GaN substrate. Then a buffer layer is formed on the partially exposed GaN substrate. The buffer layer is made of a material having a 10% or less lattice mismatch with GaN. Thereafter, the nitride-based compound is grown laterally from a top surface of the buffer layer toward a top surface of the mask layer and the nitride-based compound layer is vertically grown to a predetermined thickness. Also, the mask layer and the buffer layer are removed via wet-etching to separate the nitride-based compound layer from the GaN substrate.

  Recently Added Patents
Monitoring agent programs in a distributed computing platform
Methods and apparatus for monitoring communication through identification of priority-ranked keywords
Bicycle shifting method
Method of sheet alignment and method of post-processing comprising the same and method of image formation
Lithographic apparatus and device manufacturing method
Shape based similarity of continuous wave doppler images
Using sets of OTDR receive fibers with different lengths of marker events to verify optical fiber connectivity
  Randomly Featured Patents
Temperature sensing device for metering fluids
Method and apparatus for determining quantitative measures of flow parameters
Clustering system and method
Apparatus and method for preventing gas-surge in a welding gas delivery system
Methods for making stators for electric motors
Disk unit having a slide-restricting member for easy disk-exchanging operation
Apparatus and method for spinal fixation system
Post design for corrosion resistance railing and method for installation
Position demodulating method and circuit of disk apparatus
High-speed planting method and machine