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Apparatus and methods for ambient air abatement of electronic manufacturing effluent










Image Number 5 for United States Patent #8003067.

An abatement system is provided which includes 1) an abatement unit adapted to abate effluent; and 2) an ambient air supply system. The ambient air supply system includes an air moving device, wherein the ambient air supply system is adapted to supply ambient air to the abatement unit for use as an oxidant. Numerous other aspects are provided.








 
 
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