Resources Contact Us Home
Optical integrated device manufacturing process

Image Number 6 for United States Patent #7998356.

The invention relates to a process for manufacturing an integrated optical device. The method involves forming a silicon dioxide multilayer structure on a silicon substrate containing, in a first region a core layer of a waveguide of the optical device. The core includes an electromagnetic radiation inlet/outlet A trench in a second region of the multilayer structure adjacent said first region is formed by a an anisotropic etching, the trench including side walls and a bottom wall spaced from the Substrate. The method further involves forming a coating layer of the side walls and the bottom wall of the trench; defining an opening in the bottom wall by at least partially removing the coating layer in order to expose the lower silicon dioxide of the multilayer structure; performing an isotropic etch through said opening in order to remove, starting from the exposed silicon dioxide, the multilayer structure silicon dioxide until forming a recess in the multilayer structure having a first wall at least one essentially planar portion inclined relative to the substrate. Such inclined portion extends at least partially in the first region, and includes the inlet/outlet port.

  Recently Added Patents
Slide hinge and remote control with a slide hinge
Immunological tests for the presence of bacteria which make use of antibodies obtained using a specific method
System and method of time-resolved, three-dimensional angiography
Name search using a ranking function
Double-clocked specialized processing block in an integrated circuit device
Medical device having a bimaterial valve
System and method for operating a radio communication apparatus with a communication channel for discontinuous data transmission
  Randomly Featured Patents
Universal, portable exercise apparatus adaptable to fit a chair
Advancement of pipe elements in the ground
Process monitoring system for real time statistical process control
Spaceblock scoops for enhanced rotor cavity heat transfer
Friction connector for optical flats in interferometers
Fuel cell power system
Non self-aligned shallow trench isolation process with disposable space to define sub-lithographic poly space
Chair apparatus for use in transport means
Continuously variable transmission
Object-to-relational data converter mapping attributes to object instance into relational tables