Resources Contact Us Home
Optical integrated device manufacturing process

Image Number 6 for United States Patent #7998356.

The invention relates to a process for manufacturing an integrated optical device. The method involves forming a silicon dioxide multilayer structure on a silicon substrate containing, in a first region a core layer of a waveguide of the optical device. The core includes an electromagnetic radiation inlet/outlet A trench in a second region of the multilayer structure adjacent said first region is formed by a an anisotropic etching, the trench including side walls and a bottom wall spaced from the Substrate. The method further involves forming a coating layer of the side walls and the bottom wall of the trench; defining an opening in the bottom wall by at least partially removing the coating layer in order to expose the lower silicon dioxide of the multilayer structure; performing an isotropic etch through said opening in order to remove, starting from the exposed silicon dioxide, the multilayer structure silicon dioxide until forming a recess in the multilayer structure having a first wall at least one essentially planar portion inclined relative to the substrate. Such inclined portion extends at least partially in the first region, and includes the inlet/outlet port.

  Recently Added Patents
Battery module
Communication apparatus, and method and program for controlling same
Latch-up free ESD protection
System and method for receiving MBMS broadcasting service
Method of preparing enteric hard capsule and enteric hard capsule prepared thereby
Optical cable plug-in detection
Remedy for overactive bladder comprising acetic acid anilide derivative as the active ingredient
  Randomly Featured Patents
Method and apparatus for lancet launching device integrated onto a blood-sampling cartridge
Motion image recording apparatus and digital camera
Automotive wheel
Di- and trivalent small molecule selectin inhibitors
Scan method and topology for capacitive sensing
Electronic scale having function of compensating for air pressure changes in glove box
Carbon nanotube signal modulator and photonic transmission device
Autonomous boundary detection system for echocardiographic images
Hardware unit for parsing an XML document
Cyclic C.sub.6 ketones in perfumes