Resources Contact Us Home
Optical integrated device manufacturing process

Image Number 6 for United States Patent #7998356.

The invention relates to a process for manufacturing an integrated optical device. The method involves forming a silicon dioxide multilayer structure on a silicon substrate containing, in a first region a core layer of a waveguide of the optical device. The core includes an electromagnetic radiation inlet/outlet A trench in a second region of the multilayer structure adjacent said first region is formed by a an anisotropic etching, the trench including side walls and a bottom wall spaced from the Substrate. The method further involves forming a coating layer of the side walls and the bottom wall of the trench; defining an opening in the bottom wall by at least partially removing the coating layer in order to expose the lower silicon dioxide of the multilayer structure; performing an isotropic etch through said opening in order to remove, starting from the exposed silicon dioxide, the multilayer structure silicon dioxide until forming a recess in the multilayer structure having a first wall at least one essentially planar portion inclined relative to the substrate. Such inclined portion extends at least partially in the first region, and includes the inlet/outlet port.

  Recently Added Patents
Regulating a supply voltage provided to a load circuit
Systems and methods for optimizing capital structure of a financial institution
High voltage fast recovery trench diode
System and method for outputting virtual textures in electronic devices
Circuitry testing module and circuitry testing device
Watch chain
Power management systems and designs
  Randomly Featured Patents
Delivering method in ATM point-to-multipoint connection
Apron for a bathtub or the like
Process for forming circuit with laser
Amplifier circuit
Photothermographic material
Apparatus and method for aiming a particle beam
Suspension ceiling grid with end connector
Error correction using finite fields of odd characteristics on binary hardware
Control device for a differential feed of a sewing machine