Resources Contact Us Home
Optical integrated device manufacturing process

Image Number 6 for United States Patent #7998356.

The invention relates to a process for manufacturing an integrated optical device. The method involves forming a silicon dioxide multilayer structure on a silicon substrate containing, in a first region a core layer of a waveguide of the optical device. The core includes an electromagnetic radiation inlet/outlet A trench in a second region of the multilayer structure adjacent said first region is formed by a an anisotropic etching, the trench including side walls and a bottom wall spaced from the Substrate. The method further involves forming a coating layer of the side walls and the bottom wall of the trench; defining an opening in the bottom wall by at least partially removing the coating layer in order to expose the lower silicon dioxide of the multilayer structure; performing an isotropic etch through said opening in order to remove, starting from the exposed silicon dioxide, the multilayer structure silicon dioxide until forming a recess in the multilayer structure having a first wall at least one essentially planar portion inclined relative to the substrate. Such inclined portion extends at least partially in the first region, and includes the inlet/outlet port.

  Recently Added Patents
Tint block image generation program and tint block image generation device
Substrate and patterning device for use in metrology, metrology method and device manufacturing method
Method and system for a low-power client in a wide area network
Multi-bank queuing architecture for higher bandwidth on-chip memory buffer
Synergistic fungicidal interactions of 5-fluorocytosine and other fungicides
Socket type MEMS device with stand-off portion
  Randomly Featured Patents
Multiple cylinder engine
Methods and circuits for single-memory dynamic cell multivalue data storage
Folding hanger for at least one watersport garment
Range tracker utilizing spectral analysis
Rotation detector having two pairs of symmetrically positioned magnetoresistive element circuits
Method of manufacturing a coil inductor
Apparatus and method for controlling exhaust pressure
Method and apparatus for controlling an instrumentation system
P-Phenoxy-alkylphenones and corresponding alcohols
Headstock of a stringed musical instrument