Resources Contact Us Home
Optical integrated device manufacturing process

Image Number 6 for United States Patent #7998356.

The invention relates to a process for manufacturing an integrated optical device. The method involves forming a silicon dioxide multilayer structure on a silicon substrate containing, in a first region a core layer of a waveguide of the optical device. The core includes an electromagnetic radiation inlet/outlet A trench in a second region of the multilayer structure adjacent said first region is formed by a an anisotropic etching, the trench including side walls and a bottom wall spaced from the Substrate. The method further involves forming a coating layer of the side walls and the bottom wall of the trench; defining an opening in the bottom wall by at least partially removing the coating layer in order to expose the lower silicon dioxide of the multilayer structure; performing an isotropic etch through said opening in order to remove, starting from the exposed silicon dioxide, the multilayer structure silicon dioxide until forming a recess in the multilayer structure having a first wall at least one essentially planar portion inclined relative to the substrate. Such inclined portion extends at least partially in the first region, and includes the inlet/outlet port.

  Recently Added Patents
Systems and methods for dissipating an electric charge while insulating a structure
Adaptive block pre-fetching method and system
Methods, systems, and physical computer storage media for processing a plurality of input/output request jobs
Etch resistant clearcoat
Dynamic rebasing of persisted time information
Sericin cationic nanoparticles for application in products for hair and dyed hair
Display screen with an animated graphical user interface
  Randomly Featured Patents
Asymmetrical 1:2 chromium and cobalt complexes of further substituted 6- or 7-amino-1-hydroxy-2-(nitro-phenylazo)-3-sulfonapthalenes
Braking indicator
Methods, systems and apparatuses for white balance calibration
Method for predicting inductance and self-resonant frequency of a spiral inductor
Method for recording an operation time of an air bag system and an apparatus for performing the same
Electronic timer
Device for opening a sealant container, sealant container, and method of opening the sealant container
Drive device and apparatus equipped with said drive device
Third hand stand and method of using the same
Surface configuration of a front bumper for a vehicle