Resources Contact Us Home
Optical integrated device manufacturing process

Image Number 3 for United States Patent #7998356.

The invention relates to a process for manufacturing an integrated optical device. The method involves forming a silicon dioxide multilayer structure on a silicon substrate containing, in a first region a core layer of a waveguide of the optical device. The core includes an electromagnetic radiation inlet/outlet A trench in a second region of the multilayer structure adjacent said first region is formed by a an anisotropic etching, the trench including side walls and a bottom wall spaced from the Substrate. The method further involves forming a coating layer of the side walls and the bottom wall of the trench; defining an opening in the bottom wall by at least partially removing the coating layer in order to expose the lower silicon dioxide of the multilayer structure; performing an isotropic etch through said opening in order to remove, starting from the exposed silicon dioxide, the multilayer structure silicon dioxide until forming a recess in the multilayer structure having a first wall at least one essentially planar portion inclined relative to the substrate. Such inclined portion extends at least partially in the first region, and includes the inlet/outlet port.

  Recently Added Patents
Process for shaping polymeric articles
Carbon dioxide capture system and methods of capturing carbon dioxide
Focusing apparatus that effectively sets a focus area of an image when a focusing mode is changed
Image heating apparatus
Di and tri- substituted oxathiazine derivatives, method for the production, method for the production thereof, use thereof as medicine and drug containing said derivatives and use thereof
Low power voltage controlled oscillator (VCO)
Incrementally increasing deployment of gateways
  Randomly Featured Patents
Boot for motorcycling
Linear switching regulator
Razor handle
Bicycle flexible joint
Filter including rim
Methods of retarding cementitious compositions
Heavy duty and medium pneumatic radial tire
Microorganisms for therapy
Preparation of a stable dispersion from TDI residue and its use in the production of polyurethane compositions