Resources Contact Us Home
Optical integrated device manufacturing process

Image Number 3 for United States Patent #7998356.

The invention relates to a process for manufacturing an integrated optical device. The method involves forming a silicon dioxide multilayer structure on a silicon substrate containing, in a first region a core layer of a waveguide of the optical device. The core includes an electromagnetic radiation inlet/outlet A trench in a second region of the multilayer structure adjacent said first region is formed by a an anisotropic etching, the trench including side walls and a bottom wall spaced from the Substrate. The method further involves forming a coating layer of the side walls and the bottom wall of the trench; defining an opening in the bottom wall by at least partially removing the coating layer in order to expose the lower silicon dioxide of the multilayer structure; performing an isotropic etch through said opening in order to remove, starting from the exposed silicon dioxide, the multilayer structure silicon dioxide until forming a recess in the multilayer structure having a first wall at least one essentially planar portion inclined relative to the substrate. Such inclined portion extends at least partially in the first region, and includes the inlet/outlet port.

  Recently Added Patents
Cardiac function management integrating cardiac contractility modulation
System and method for providing advertising content using a group training system
Unified recovery
Decision management system and method
Photoelectric conversion device
Advertising system and method
Manipulation of an alternative respiratory pathway in photo-autotrophs
  Randomly Featured Patents
3D stereo browser for the internet
System and method for corneal astigmatic axis marking
Method of controlling telecommunications signalling
Uniaxial horizontal sensor
Packet processing using encapsulation and decapsulation chains
Hinge for a shower screen door
Press for the continuous production of boards
Precoding with reduced feedback for coordinated multipoint transmission on the downlink
Sheet conveyance apparatus having movable guide ribs and image forming apparatus
Support for moving cylindrical elements and method and conveyor using such supports