Resources Contact Us Home
Optical integrated device manufacturing process

Image Number 3 for United States Patent #7998356.

The invention relates to a process for manufacturing an integrated optical device. The method involves forming a silicon dioxide multilayer structure on a silicon substrate containing, in a first region a core layer of a waveguide of the optical device. The core includes an electromagnetic radiation inlet/outlet A trench in a second region of the multilayer structure adjacent said first region is formed by a an anisotropic etching, the trench including side walls and a bottom wall spaced from the Substrate. The method further involves forming a coating layer of the side walls and the bottom wall of the trench; defining an opening in the bottom wall by at least partially removing the coating layer in order to expose the lower silicon dioxide of the multilayer structure; performing an isotropic etch through said opening in order to remove, starting from the exposed silicon dioxide, the multilayer structure silicon dioxide until forming a recess in the multilayer structure having a first wall at least one essentially planar portion inclined relative to the substrate. Such inclined portion extends at least partially in the first region, and includes the inlet/outlet port.

  Recently Added Patents
Near-field optical disk having surface plasmon amplification by stimulated emission of radiation
Method, apparatus and article for detection of transponder tagged objects, for example during surgery
Display screen or portion thereof with animated graphical user interface
Wireless enclosure
Intrinsic absorber layer for photovoltaic cells
RFID reader revocation checking using low power attached displays
  Randomly Featured Patents
Jewelry hanger and organizer
Switch plate frame
Tracking error signal detecting apparatus using an electron beam and apparatus for effecting recording/reproduction of information by the utilization of a plurality of electron beams
Method for purifying a protein using protein-A affinity chromatography using an intermediate wash step
Materials and methods for the efficient production of Pasteuria
Portable solar power supply system and its applying device
Safety razor cartridge
Fuel pumping system and method
Guide system for nacelle assembly
Multiple network electronic component