Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of forming finned semiconductor devices with trench isolation










Image Number 8 for United States Patent #7994020.

A method of manufacturing a semiconductor device structure, such as a FinFET device structure, is provided. The method begins by providing a substrate comprising a bulk semiconductor material, a first conductive fin structure formed from the bulk semiconductor material, and a second conductive fin structure formed from the bulk semiconductor material. The first conductive fin structure and the second conductive fin structure are separated by a gap. Next, spacers are formed in the gap and adjacent to the first conductive fin structure and the second conductive fin structure. Thereafter, an etching step etches the bulk semiconductor material, using the spacers as an etch mask, to form an isolation trench in the bulk semiconductor material. A dielectric material is formed in the isolation trench, over the spacers, over the first conductive fin structure, and over the second conductive fin structure. Thereafter, at least a portion of the dielectric material and at least a portion of the spacers are etched away to expose an upper section of the first conductive fin structure and an upper section of the second conductive fin structure, while preserving the dielectric material in the isolation trench. Following these steps, the fabrication of the devices is completed in a conventional manner.








 
 
  Recently Added Patents
System and method for providing location and access network information support in a network environment
Method for providing information of access point selection
Human renal disease marker substance
Voltage detection apparatus and combination circuit
Display module
Lithographic apparatus and device manufacturing method
Buffer pool extension for database server
  Randomly Featured Patents
Poly(mono-1-olefin) compositions
Actuator mechanism for a headlamp cover
On-vehicle electronic controller
Simulator and method for performing underwater submarine escape training
Passive filter compensation network
Shift register circuit
Air tool with exhaust diverting valve
Method for supporting DNA-fixation and DNA-fixed support
Child's rocking chair
Gasket for sanitary fittings