Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of forming finned semiconductor devices with trench isolation










Image Number 8 for United States Patent #7994020.

A method of manufacturing a semiconductor device structure, such as a FinFET device structure, is provided. The method begins by providing a substrate comprising a bulk semiconductor material, a first conductive fin structure formed from the bulk semiconductor material, and a second conductive fin structure formed from the bulk semiconductor material. The first conductive fin structure and the second conductive fin structure are separated by a gap. Next, spacers are formed in the gap and adjacent to the first conductive fin structure and the second conductive fin structure. Thereafter, an etching step etches the bulk semiconductor material, using the spacers as an etch mask, to form an isolation trench in the bulk semiconductor material. A dielectric material is formed in the isolation trench, over the spacers, over the first conductive fin structure, and over the second conductive fin structure. Thereafter, at least a portion of the dielectric material and at least a portion of the spacers are etched away to expose an upper section of the first conductive fin structure and an upper section of the second conductive fin structure, while preserving the dielectric material in the isolation trench. Following these steps, the fabrication of the devices is completed in a conventional manner.








 
 
  Recently Added Patents
Resist composition and method for producing resist pattern
Calibration device and related method for phase difference between data and clock
Memory with separate read and write paths
Packaging for socks
Output circuit
Handheld electronic device with text disambiguation employing advanced editing feature
Method for producing carrier on which microorganisms capable of conducting multiple parallel mineralization are immobilized, column reactor and solid medium for cultivating plants
  Randomly Featured Patents
Benzisoxazole carboxylic acids
Circuit and method for controlling write recovery time in semiconductor memory device
Continuous intersecting braided composite structure and method of making same
Apparatus for saving power consumption of a portable electronic device
Footwear upper portion
Rain gauge
Angled hand support for a computer mouse
Speech recognition by neural network adapted to reference pattern learning
Turf maintenance device for aeration and vertical cutting of soil
Control unit of hydraulic brake apparatus for vehicle