Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of forming finned semiconductor devices with trench isolation










Image Number 8 for United States Patent #7994020.

A method of manufacturing a semiconductor device structure, such as a FinFET device structure, is provided. The method begins by providing a substrate comprising a bulk semiconductor material, a first conductive fin structure formed from the bulk semiconductor material, and a second conductive fin structure formed from the bulk semiconductor material. The first conductive fin structure and the second conductive fin structure are separated by a gap. Next, spacers are formed in the gap and adjacent to the first conductive fin structure and the second conductive fin structure. Thereafter, an etching step etches the bulk semiconductor material, using the spacers as an etch mask, to form an isolation trench in the bulk semiconductor material. A dielectric material is formed in the isolation trench, over the spacers, over the first conductive fin structure, and over the second conductive fin structure. Thereafter, at least a portion of the dielectric material and at least a portion of the spacers are etched away to expose an upper section of the first conductive fin structure and an upper section of the second conductive fin structure, while preserving the dielectric material in the isolation trench. Following these steps, the fabrication of the devices is completed in a conventional manner.








 
 
  Recently Added Patents
Isolation rings for blocking the interface between package components and the respective molding compound
Organic metal complex and its use in organic electroluminescent device
Head shield
Insulin derivative
Circuit breakers
Methods of forming integrated circuit packages
Medical capsule housing formed by thermal welding
  Randomly Featured Patents
Game board
Scabious plant `Lemon Sorbet`
Absorbent article
Method and device for controlling video recordation property of camera module according to velocity of object
High voltage low power sensing device for flash memory
Separator membranes for electrochemical cells
Chair
Semiconductor device including a deflected part
Touch strip input for display terminal
Sulfur absorbents and process for removing sulfur from fluid streams