Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of forming finned semiconductor devices with trench isolation










Image Number 8 for United States Patent #7994020.

A method of manufacturing a semiconductor device structure, such as a FinFET device structure, is provided. The method begins by providing a substrate comprising a bulk semiconductor material, a first conductive fin structure formed from the bulk semiconductor material, and a second conductive fin structure formed from the bulk semiconductor material. The first conductive fin structure and the second conductive fin structure are separated by a gap. Next, spacers are formed in the gap and adjacent to the first conductive fin structure and the second conductive fin structure. Thereafter, an etching step etches the bulk semiconductor material, using the spacers as an etch mask, to form an isolation trench in the bulk semiconductor material. A dielectric material is formed in the isolation trench, over the spacers, over the first conductive fin structure, and over the second conductive fin structure. Thereafter, at least a portion of the dielectric material and at least a portion of the spacers are etched away to expose an upper section of the first conductive fin structure and an upper section of the second conductive fin structure, while preserving the dielectric material in the isolation trench. Following these steps, the fabrication of the devices is completed in a conventional manner.








 
 
  Recently Added Patents
Power device and method of packaging same
Solar-powered roadway light
Substrate and patterning device for use in metrology, metrology method and device manufacturing method
Malicious attack detection and analysis
Load control device
Adjustable high precision surveying device
Method and apparatus for exercise monitoring combining exercise monitoring and visual data with wireless internet connectivity
  Randomly Featured Patents
Status display for parallel activities
Button
Loop taker and sewing machine
Dual-voltage vehicle electric system
Real-time video/audio quality adjustment method
Headrest on a vehicle seat
Lobster trap ballast
Method and apparatus for measuring waviness of paper
Button for a window blind control
Ink jet recording method and ink jet recording apparatus