Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of forming finned semiconductor devices with trench isolation










Image Number 8 for United States Patent #7994020.

A method of manufacturing a semiconductor device structure, such as a FinFET device structure, is provided. The method begins by providing a substrate comprising a bulk semiconductor material, a first conductive fin structure formed from the bulk semiconductor material, and a second conductive fin structure formed from the bulk semiconductor material. The first conductive fin structure and the second conductive fin structure are separated by a gap. Next, spacers are formed in the gap and adjacent to the first conductive fin structure and the second conductive fin structure. Thereafter, an etching step etches the bulk semiconductor material, using the spacers as an etch mask, to form an isolation trench in the bulk semiconductor material. A dielectric material is formed in the isolation trench, over the spacers, over the first conductive fin structure, and over the second conductive fin structure. Thereafter, at least a portion of the dielectric material and at least a portion of the spacers are etched away to expose an upper section of the first conductive fin structure and an upper section of the second conductive fin structure, while preserving the dielectric material in the isolation trench. Following these steps, the fabrication of the devices is completed in a conventional manner.








 
 
  Recently Added Patents
Boring machine
Neuronal differentiation-inducing peptide and use thereof
Enabling improvement in cellular network coverage
Electrical converter with variable capacitor
Stable light source device
Combined high and low frequency stimulation therapy
Stroboscopic image modulation to reduce the visual blur of an object being viewed by an observer experiencing vibration
  Randomly Featured Patents
Multiple tool implement
Communication link between mobile input/output bins and a data center to provide backup
Fe-NI based soft magnetic alloys having nanocrystalline structure
Planar optical waveguide
Method of treating hearing loss
Transmission for torque transfer with axial compliance
Liquid crystal display device and method for driving the same
Environmentally resistant loudspeaker
Method of applying curved leg elastics using curved pucks
Wireless ad-hoc RFID tracking system