Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for manufacturing dual gate in semiconductor device










Image Number 2 for United States Patent #7989281.

Provided is a method for manufacturing a dual gate in a semiconductor device. The method includes forming a gate insulating layer and a gate conductive layer on a semiconductor substrate, forming a diffusion barrier layer on the gate conductive layer, forming a barrier metal layer on the diffusion barrier layer, depositing a first gate metal layer on the barrier metal layer, forming a metal nitride barrier layer on a surface of the first gate metal layer by supplying nitrogen (N2) plasma on the first gate metal layer, forming a second gate metal layer on the metal nitride barrier layer, and forming a hard mask layer on the second gate metal layer.








 
 
  Recently Added Patents
Cardiac function management integrating cardiac contractility modulation
Persistent luminescence nanoparticles used in the form of a diagnosis agent for in vivo optical imaging
Image processing apparatus, control method for the same, and storage medium
Over the counter medicinal container with surface ornamentation
Tomlinson Harashima precoding with additional receiver processing in a multi-user multiple-input multiple-output wireless transmission system
Hand mixer
Lacrosse head
  Randomly Featured Patents
Processes for making a barrier between a dielectric and a conductor and products produced therefrom
Modular multiple disk drive apparatus
Turbine blade repair
Push button switch illuminated by light emitting diodes for use with elevators
Apparatus for measuring characteristics of liquid samples which have to be heated
System and method for audio hot spotting
Method and apparatus for controlling a transfer car from a remote station
Positive photoresist composition comprising a mixed ester of trishydroxyphenyl ethane and a mixed ester of trihydroxybenzophenone
Using offset cancellation circuit to mitigate beat-frequency oscillation of phase currents in a multiphase interleaved voltage regulator
Recovery of petroleum from tar sands