Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Composition for forming insulating film and method for fabricating semiconductor device










Image Number 9 for United States Patent #7985700.

A method for fabricating a semiconductor device utilizing the step of forming a first insulating film of a porous material over a substrate; the step of forming on the first insulating film a second insulating film containing a silicon compound containing Si--CH.sub.3 bonds by 30-90%, and the step of irradiating UV radiation with the second insulating film formed on the first insulating film to cure the first insulating film. Thus, UV radiation having the wavelength which eliminates CH.sub.3 groups is sufficiently absorbed by the second insulating film, whereby the first insulating film is highly strengthened with priority by the UV cure, and the first insulating film can have the film density increased without having the dielectric constant increased.








 
 
  Recently Added Patents
Systems and methods for performing live chat functionality via a mobile device
String changing tool with a quick connector assembly and worm gear string cutter
Focus information generating device and focus information generating method
Automated incorporation of expert feedback into a monitoring system
Plants and seeds of hybrid corn variety CH514730
Hepatitis C virus inhibitors
Determination of statistical upper bound for estimate of noise power spectral density
  Randomly Featured Patents
Composition and method for soil stabilization
Device for inflating a vehicle occupant restraint system
Automatic dual compensation grinding wheel conditioner
Information handling system, method, and article of manufacture including a vault object for encapsulation of object security credentials
Bicycle drive chain
Low power radar level instrument with enhanced diagnostics
Miniature orthodontic appliance
Surveillance camera assembly with external adjusting rings
Catalyst useful for oxidation of alkanes
Pump and receptacle fitted therewith