Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Composition for forming insulating film and method for fabricating semiconductor device










Image Number 9 for United States Patent #7985700.

A method for fabricating a semiconductor device utilizing the step of forming a first insulating film of a porous material over a substrate; the step of forming on the first insulating film a second insulating film containing a silicon compound containing Si--CH.sub.3 bonds by 30-90%, and the step of irradiating UV radiation with the second insulating film formed on the first insulating film to cure the first insulating film. Thus, UV radiation having the wavelength which eliminates CH.sub.3 groups is sufficiently absorbed by the second insulating film, whereby the first insulating film is highly strengthened with priority by the UV cure, and the first insulating film can have the film density increased without having the dielectric constant increased.








 
 
  Recently Added Patents
System and method for efficient resource management of a signal flow programmed digital signal processor code
High-speed comparator with asymmetric frequency response
Electrical connector
Cooler
Portable gaming device and gaming system combining both physical and virtual play elements
Salts and polymorphs of desazadesferrithiocin polyether analogues as metal chelation agents
Non-visual presentation of information on an electronic wireless device
  Randomly Featured Patents
Phase and amplitude modulation of baseband signals
Image display method, image processing system, and recording medium
Quick connect device for electrical fixture
Thermal activator for heat sensitive adhesive sheet and printer apparatus utilizing the thermal activator
Film-processing apparatus, in particular for x-ray sheet film
Vibration dampening structure for disk drive
Stack operation method aimed at cell reversal prevention
Process for preparing a compound of formula CF.sub.3CHFCH.sub.2X, wherin X is Cl or F, from 1243zf
Barbecue grill with radiant fire grate
Automatic voltage compensation for digital welder control system