Resources Contact Us Home
Ion implantation apparatus and a method for fluid cooling

Image Number 3 for United States Patent #7982197.

A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. Detachable connections in the cooling fluid conduits in the vacuum chamber may comprise tandem seals with an intermediate chamber between them which can be vented outside the vacuum chamber, or independently vacuum pumped. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.

  Recently Added Patents
Linked area parameter adjustment for spinal cord stimulation and associated systems and methods
Network based JIT on a priori knowledge of a set of disparate clients
Housing for gas flow indicator
Bandpass filter and radio communication module and radio communication device using the same
Separate matching models based on type of phone associated with a caller
Radiation protective garment with forced ventilation and method
Toothbrush holder
  Randomly Featured Patents
Basket with mesh
Liquid crystal display device
Electronic apparatus wherein components are detachably arranged in a housing having a recess with a sliding and clamping cover
Automated realtime interpretation of brain waves
Device for cold waving hair for increased sheen and healthier hair
Speech restoration system and method for concealing packet losses
Providing video of a venue activity to a hand held device through a cellular communications network
Multiple degree of freedom vibration exciting apparatus and system
Method of combustor cycle airflow adjustment
Tool carrier