Resources Contact Us Home
Ion implantation apparatus and a method for fluid cooling

Image Number 3 for United States Patent #7982197.

A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. Detachable connections in the cooling fluid conduits in the vacuum chamber may comprise tandem seals with an intermediate chamber between them which can be vented outside the vacuum chamber, or independently vacuum pumped. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.

  Recently Added Patents
Medical capsule housing formed by thermal welding
Electronic flash device
Methods of fabricating semiconductor device
Handover signaling in wireless networks
Plants and seeds of hybrid corn variety CH450823
Synthesizing VHDL multiple wait FSMS into RT level FSMS by preprocessing
Pyrrolidine derivatives, pharmaceutical compositions containing the same, and methods of using the same
  Randomly Featured Patents
Device for supporting burner and dryer with the same
Transparent substrate provided with electroconductive strips
Display carton
Projection optical system and projection type image display device
Oriented conductive oxide electrodes on SiO2/Si and glass
Modified polyester composition and preparation process and use thereof
Controlled absorption diltiazen formulation for once-daily administration
Susceptors for browning or crisping food in microwave ovens
Printer with dancer arm and reel brake and method therefor
Automotive vehicle key