Resources Contact Us Home
Ion implantation apparatus and a method for fluid cooling

Image Number 3 for United States Patent #7982197.

A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. Detachable connections in the cooling fluid conduits in the vacuum chamber may comprise tandem seals with an intermediate chamber between them which can be vented outside the vacuum chamber, or independently vacuum pumped. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.

  Recently Added Patents
Process for the production of alcohol
Method and apparatus for managing communication services for user endpoint devices
Schottky diode and method of manufacture
Method of treating lung cancer
Methods, devices and software applications for facilitating a development of a computer program
Implantable neuro-stimulation electrode with fluid reservoir
Method and apparatus for networked modems
  Randomly Featured Patents
Boat steering mechanism
ISDN credit checking
Dynamic phase alignment for resynchronization of captured data
Big game field dressing tool and method
Disposable one-piece security sealing device
Method for driving a fluorescent lamp, and lamp ballast
Printer interpreter for a gaming machine
Multi-hinged skate and methods for construction of the same
Nitrogen doped aluminum oxide resistive random access memory
Universal input voltage light emitting device