Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Ion implantation apparatus and a method for fluid cooling










Image Number 3 for United States Patent #7982197.

A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. Detachable connections in the cooling fluid conduits in the vacuum chamber may comprise tandem seals with an intermediate chamber between them which can be vented outside the vacuum chamber, or independently vacuum pumped. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.








 
 
  Recently Added Patents
Broadband optical network apparatus and method
Method and system for advertisement using internet browser to insert advertisements
Magnetoresistive shield with coupled lateral magnet bias
Systems, methods, and computer readable media for providing information related to virtual environments to wireless devices
Inflatable workshop
Uplink synchronization management in wireless networks
Analog to digital converter with increased sub-range resolution
  Randomly Featured Patents
Pulse doppler radar system with improved cluster target resolution capability
Radiation sensitive detector
Multi-constituent attribution of a vendor's product catalog
Electrophotographic photosensitive member, process cartridge including same and electrophotographic apparatus
Electroless plating composition
Rotating drum cryogen shot blast deflashing system
Electric valve drive device in an internal combustion engine
Ice making method for a vertical ice making machine
Demand oxygen system
Linerless bore seal closure