Resources Contact Us Home
Ion implantation apparatus and a method for fluid cooling

Image Number 3 for United States Patent #7982197.

A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. Detachable connections in the cooling fluid conduits in the vacuum chamber may comprise tandem seals with an intermediate chamber between them which can be vented outside the vacuum chamber, or independently vacuum pumped. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.

  Recently Added Patents
Domestic soda-water preparing device
Power surface mount light emitting die package
Fluorescent proteins
Apparatus and method for transferring a data signal propagated along a bidirectional communication path within a data processing apparatus
Scalable pixel coverage function-map
Terminal box assembly
Perfume bottle
  Randomly Featured Patents
Collet stop
Visible light transmitting structure with photovoltaic effect
Processing flow of a complementary metal-oxide semiconductor color filter
Image fixing apparatus, image forming apparatus, and image fixing method capable of effectively controlling an image fixing temperature
Air conditioner for a vehicle
Lean reflux-high hydrocarbon recovery process
Corrodible container for automatic addition of corrosion inhibitor to a coolant system
Method of interfacing a remote wand to electronics control chassis
Biocidal proteins
System and method for locating and notifying a mobile user of people having attributes or interests matching a stated preference