Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Ion implantation apparatus and a method for fluid cooling










Image Number 3 for United States Patent #7982197.

A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. Detachable connections in the cooling fluid conduits in the vacuum chamber may comprise tandem seals with an intermediate chamber between them which can be vented outside the vacuum chamber, or independently vacuum pumped. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.








 
 
  Recently Added Patents
Modular storage system
Ni-, Co-, and Mn- multi-element doped positive electrode material for lithium battery and its preparation method
Case for camera
Illumination apparatus
Laser receiver for detecting a relative position
Reliability fire pressure switch
Data processing apparatus, activation control method, and computer-readable storage medium
  Randomly Featured Patents
Pneumatic pressure control valve assembly
Angular cam clamp
Oral care composition
Optical recording method, optical recording apparatus, apparatus for manufacturing a master through exposure process, optical information recording medium and reproduction method
Apparatus for facilitating tracheostomy tube replacement
Insect bait station
Admission control with directional antenna
Polyester shrinkable film containing benzotriazole
Data processing system providing data security through coded identification of accessing terminals
Streptococcus equi vaccine