Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor oxidation apparatus and method of producing semiconductor element










Image Number 10 for United States Patent #7981700.

A semiconductor oxidation apparatus is provided with a sealable oxidation chamber defined by walls, a base provided within the oxidation chamber and configured to support a semiconductor sample, a supply part configured to supply water vapor into the oxidation chamber to oxidize a specific portion of the semiconductor sample, a monitoring window provided in one of the walls of the oxidation chamber and disposed at a position capable of confronting the semiconductor sample supported on the base, a monitoring part provided outside the oxidation chamber and capable of confronting the semiconductor sample supported on the base via the monitoring window, and an adjusting part configured to adjust a distance between the base and the monitoring part.








 
 
  Recently Added Patents
Synthesizing VHDL multiple wait FSMS into RT level FSMS by preprocessing
Systems and methods to provide report part via a web service
Apparatus and method for discharging capacitor of input filter of power supply, and power supply including the apparatus
Pyridylphenyl compounds for inflammation and immune-related uses
Methods, devices and software applications for facilitating a development of a computer program
Apparatus and method for encoding/decoding signal
Method and apparatus for map transmission in wireless communication system
  Randomly Featured Patents
Pet carrying bag
High temperature electronic gain device
Systems and methods for providing fault detection and management
Apparatus for inserting PC cards having recessed guide paths with multiple levels in the guide paths
Internal combustion driven pumping system and variable torque transmission
Magnetic socket holder
Antenna
Secondary battery
Method for producing a continuous thermoplastic coating and articles constructed therefrom
Pivot-and-positioning assembly for an electronic device