Resources Contact Us Home
Semiconductor oxidation apparatus and method of producing semiconductor element

Image Number 10 for United States Patent #7981700.

A semiconductor oxidation apparatus is provided with a sealable oxidation chamber defined by walls, a base provided within the oxidation chamber and configured to support a semiconductor sample, a supply part configured to supply water vapor into the oxidation chamber to oxidize a specific portion of the semiconductor sample, a monitoring window provided in one of the walls of the oxidation chamber and disposed at a position capable of confronting the semiconductor sample supported on the base, a monitoring part provided outside the oxidation chamber and capable of confronting the semiconductor sample supported on the base via the monitoring window, and an adjusting part configured to adjust a distance between the base and the monitoring part.

  Recently Added Patents
Managing breakpoints in a multi-threaded environment
Multilevel directory assistance apparatus and method
Case for electronic device
Method and apparatus for closed-loop control of anti-tachyarrhythmia pacing using hemodynamic sensor
Scalable encoding apparatus, scalable decoding apparatus, scalable encoding method, scalable decoding method, communication terminal apparatus, and base station apparatus
Method and apparatus for controlling a multi-node process
Externally gapped line arrester
  Randomly Featured Patents
Air conditioning system thermostat having adjustable cycling rate
Hair-removing appliance
Method of fabricating an integrated circuit package
Dynamic random access memory device provided with test circuit for internal refresh circuit
Aqueous coating agent, process for its manufacture and its use for coating containers based on acrylic monomers, epoxy- polyesters and methylol functional curing agents
Method of forming storage nodes comprising a base in a contact hole and related structures
Signal handling device
Sense amplifier for differential voltage detection with low input capacitance
Test structure for charged particle beam inspection and method for fabricating the same
Zoom lens and pickup apparatus