Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor oxidation apparatus and method of producing semiconductor element










Image Number 10 for United States Patent #7981700.

A semiconductor oxidation apparatus is provided with a sealable oxidation chamber defined by walls, a base provided within the oxidation chamber and configured to support a semiconductor sample, a supply part configured to supply water vapor into the oxidation chamber to oxidize a specific portion of the semiconductor sample, a monitoring window provided in one of the walls of the oxidation chamber and disposed at a position capable of confronting the semiconductor sample supported on the base, a monitoring part provided outside the oxidation chamber and capable of confronting the semiconductor sample supported on the base via the monitoring window, and an adjusting part configured to adjust a distance between the base and the monitoring part.








 
 
  Recently Added Patents
Optical module for a microlithography objective including holding and supporting devices
Method and apparatus for re-routing calls in a packet network during failures
Method and apparatus for reducing and controlling highway congestion to save on fuel costs
Process for the production of alcohol
Systems and methods of using dynamic data for wear leveling in solid-state devices
Vending machine
Management of memory array with magnetic random access memory (MRAM)
  Randomly Featured Patents
Machining limit area specifying method and manuel feed machining method using numerical control unit
Self-locking safety disposable syringe with needle protection after use
Asymmetric multiple constant radii of curvature convex mirrors
Financial instruments and systems
Hybrid maize plant and seed (3491)
Printing method for high performance electronic devices
Foresight data transfer type hierarchical storage system
Pressure generation device
Deflection rod system with a deflection contouring shield for a spine implant and method
Masonry line block