Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and system for thermally processing a plurality of wafer-shaped objects










Image Number 9 for United States Patent #7977258.

Process and system for processing wafer-shaped objects, such as semiconductor wafers is disclosed. In accordance with the present disclosure, a multiple of two wafers are processed in a thermal processing chamber. The thermal processing chamber is in communication with at least one heating device for heating the wafers. The wafers are placed in the thermal processing chamber in a face-to-face configuration or in a back-to-back configuration.








 
 
  Recently Added Patents
Flash drive
Air filter
Power supply architecture system designer
System and method for secure power systems infrastructure communications
Train car for proppant containers
Methods and systems for aggregating and graphically representing information associated with a telecommunications circuit
Storing a location within metadata of visual media
  Randomly Featured Patents
Systems and methods for creating copies of data, such as archive copies
Pen positioning system
Data bus system for micro controller
Hydromassage and whirlpool bath
Bottle filling plant configured to fill blow molded bottles with a liquid beverage filling product and a treatment machine for bottles or similar containers
DRAM cell configuration and method for fabricating the DRAM cell configuration
Twin-piston two-stroke engine
Ventilator
Device for controlling the locking and unlocking operations of a gear wheel-rotary disc assembly and apparatus including such a device
Model-diversity technique for improved proactive fault monitoring