Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Multi-port pumping system for substrate processing chambers










Image Number 5 for United States Patent #7964040.

An exhaust foreline for purging fluids from a semiconductor fabrication chamber is described. The foreline may include a first, second and third ports independently coupled to the chamber. A semiconductor fabrication system is also described that includes a substrate chamber that has a first, second and third interface port. The system may also include a multi-port foreline that has a first, second and third port, where the first foreline port is coupled to the first interface port, the second foreline port is coupled to the second interface port, and the third foreline port is coupled to the third interface port. The system may further include an exhaust vacuum coupled to the multi-port foreline.








 
 
  Recently Added Patents
Semiconductor device
Apparatus and method for transferring a data signal propagated along a bidirectional communication path within a data processing apparatus
Precoding codebooks for MIMO communication systems
Liquid crystal display and method of driving the same
Optical module for a microlithography objective including holding and supporting devices
Water bottle warning triangle
Architectural panel with bamboo rings light density embossed surface
  Randomly Featured Patents
Process for producing fluorine-containing carboxylic acids
Method and apparatus for detection of reciprocal interests or feelings and subsequent notification
RF identification tag configurations and assemblies
Icon for PC emulation or the like
Hand-held work light
Method and apparatus for video coding on pixel-wise prediction
Portable desk and computer support
Push-to-connect tubing fitting
Semiconductor device and method for manufacturing the same
Process for the collective fabrication of microstructures consisting of superposed elements