Resources Contact Us Home
Multi-port pumping system for substrate processing chambers

Image Number 5 for United States Patent #7964040.

An exhaust foreline for purging fluids from a semiconductor fabrication chamber is described. The foreline may include a first, second and third ports independently coupled to the chamber. A semiconductor fabrication system is also described that includes a substrate chamber that has a first, second and third interface port. The system may also include a multi-port foreline that has a first, second and third port, where the first foreline port is coupled to the first interface port, the second foreline port is coupled to the second interface port, and the third foreline port is coupled to the third interface port. The system may further include an exhaust vacuum coupled to the multi-port foreline.

  Recently Added Patents
Method and apparatus for performing real time anomaly detection
Restore software with aggregated view of content databases
Fabricated leaf tea products
Multi-port, gigabit SERDES transceiver capable of automatic fail switchover
Mold for nanoimprinting, its production process, and processes for producing molded resin having fine concavo-convex structure on its surface and wire-grid polarizer
Programming method of non-volatile memory device
Peer to peer (P2P) missing fields and field valuation feedback
  Randomly Featured Patents
Security sensor system
Apparatus and method for moving contents having a restricted number of copies between storage media
Organic carbonates with vanilla odor
Cryogenic tank
Method for manufacturing beams of fiber-reinforced composite material
LED and cold cathode fluorescent lamp
Synthesis of 2-(4-aminophenyl) benzothiazole derivatives and use thereof
Spline gage system and method
Method for using data regarding manufacturing procedures integrated circuits (ICS) have undergone, such as repairs, to select procedures the ICs will undergo, such as additional repairs