Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Multi-port pumping system for substrate processing chambers










Image Number 5 for United States Patent #7964040.

An exhaust foreline for purging fluids from a semiconductor fabrication chamber is described. The foreline may include a first, second and third ports independently coupled to the chamber. A semiconductor fabrication system is also described that includes a substrate chamber that has a first, second and third interface port. The system may also include a multi-port foreline that has a first, second and third port, where the first foreline port is coupled to the first interface port, the second foreline port is coupled to the second interface port, and the third foreline port is coupled to the third interface port. The system may further include an exhaust vacuum coupled to the multi-port foreline.








 
 
  Recently Added Patents
Flip flop shoe
Biaxially oriented hydrolysis-stable polyester film comprising epoxidized fatty acid derivatives and a chain extender, and process for production thereof and use thereof
Filler containing composition and process for production and use thereof
2,5-disubstituted piperidine orexin receptor antagonists
All-angle light emitting element having high heat dissipating efficiency
IR(voltage) drop analysis in integrated circuit timing
System and method for employing signoff-quality timing analysis information concurrently in multiple scenarios to reduce dynamic power in an electronic circuit and an apparatus incorporating t
  Randomly Featured Patents
Method of producing tin plate for lithography with direct printed ultraviolet-cured inks
Electro luminescence module
Biliquid foams stable dispersions thereof and a corresponding process of manufacturing
Novel photographic color couplers
Film resistors having trimmable electrodes
Spray gun
Conductor tieback connector
Audio coding
Extrusion molding equipment for multi-layer parison
Multispeed power transmission