Resources Contact Us Home
Multi-port pumping system for substrate processing chambers

Image Number 5 for United States Patent #7964040.

An exhaust foreline for purging fluids from a semiconductor fabrication chamber is described. The foreline may include a first, second and third ports independently coupled to the chamber. A semiconductor fabrication system is also described that includes a substrate chamber that has a first, second and third interface port. The system may also include a multi-port foreline that has a first, second and third port, where the first foreline port is coupled to the first interface port, the second foreline port is coupled to the second interface port, and the third foreline port is coupled to the third interface port. The system may further include an exhaust vacuum coupled to the multi-port foreline.

  Recently Added Patents
Simultaneous wafer bonding and interconnect joining
Integrated circuit packaging system with coupling features and method of manufacture thereof
System, device and method for transrating file based assets
Method and computed tomography device and data storage medium for performing a dynamic CT examination on a patient
Adding value to a rendered document
Radio link monitoring (RLM) and reference signal received power (RSRP) measurement for heterogeneous networks
Circuit board having semiconductor chip embedded therein
  Randomly Featured Patents
Optical sensor and method
Interferometric alignment system for use in vacuum-based lithographic apparatus
Self-unloading cargo vessel
Series terminated ECL buffer circuit and method with an optimized temperature compensated output voltage swing
7-Acyl-3-(ureidoalkyl substituted tetrazolylthiomethyl)-cephalosporins
Network switch using network processor and methods
Tool changer for vertical spindle machine
Composition containing inclusion complex of glutathione and a or .beta.-cyclodextrine
Cage assembly for ball check valves
Air duct and method of making same