Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Multi-port pumping system for substrate processing chambers










Image Number 5 for United States Patent #7964040.

An exhaust foreline for purging fluids from a semiconductor fabrication chamber is described. The foreline may include a first, second and third ports independently coupled to the chamber. A semiconductor fabrication system is also described that includes a substrate chamber that has a first, second and third interface port. The system may also include a multi-port foreline that has a first, second and third port, where the first foreline port is coupled to the first interface port, the second foreline port is coupled to the second interface port, and the third foreline port is coupled to the third interface port. The system may further include an exhaust vacuum coupled to the multi-port foreline.








 
 
  Recently Added Patents
Input device with photodetector pairs
Generating package profiles in software package repositories using selective subsets of packages
OFDM control signaling in the presence of timing asynchronization in a peer-to-peer network
Systems and methods for image stream processing
Polyester resin for toner, electrostatic charge image developing toner, electrostatic charge image developer, toner cartridge, process cartridge, image forming apparatus, and image forming met
DC/DC converter, power supply circuit, and semiconductor device
Process for preparing substituted aromatic carboxylic acids
  Randomly Featured Patents
Interpreted language translation system and method
Sheet processing apparatus and image forming apparatus provided with the same
Pickup drive unit and information playback apparatus including the same
Magnifying device
Device for uprooting trees
Identifying modulators of fibroblast growth factor-like polypeptides
Vehicle lamp control system and control method
Method for the forming of ceramic green parts
Nonvolatile memory device and method of fabricating the same
Peer-to-peer grouping interfaces and methods