Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Multi-port pumping system for substrate processing chambers










Image Number 5 for United States Patent #7964040.

An exhaust foreline for purging fluids from a semiconductor fabrication chamber is described. The foreline may include a first, second and third ports independently coupled to the chamber. A semiconductor fabrication system is also described that includes a substrate chamber that has a first, second and third interface port. The system may also include a multi-port foreline that has a first, second and third port, where the first foreline port is coupled to the first interface port, the second foreline port is coupled to the second interface port, and the third foreline port is coupled to the third interface port. The system may further include an exhaust vacuum coupled to the multi-port foreline.








 
 
  Recently Added Patents
Output queued switch with a parallel shared memory, and method of operating same
Method and system for automatic 3-D image creation
System and method for optimizing use of plug-in air conditioners and portable heaters
System for the secure management of digitally controlled locks, operating by means of crypto acoustic credentials
Data processing circuit with arbitration between a plurality of queues
Device for maneuvering a vehicle using maneuvering moves using at least one trajectory
Inflatable workshop
  Randomly Featured Patents
Multimode optical transmission apparatus and multimode optical transmission system
Digital video signal recording/reproducing method and apparatus
Method for manufacturing constituents of a hollow blade by rolling
Walker for invalid persons
Aqueous stripping and cleaning composition
Alignment apparatus for aligning multi-layer structures
Calcium binding proteolipid compositions and methods
Protective relay for power systems having fault distance measurement filter logic
Self-locking seat belt retractor
Apparatus for continuously leveling thin metal strip