Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Multi-port pumping system for substrate processing chambers










Image Number 5 for United States Patent #7964040.

An exhaust foreline for purging fluids from a semiconductor fabrication chamber is described. The foreline may include a first, second and third ports independently coupled to the chamber. A semiconductor fabrication system is also described that includes a substrate chamber that has a first, second and third interface port. The system may also include a multi-port foreline that has a first, second and third port, where the first foreline port is coupled to the first interface port, the second foreline port is coupled to the second interface port, and the third foreline port is coupled to the third interface port. The system may further include an exhaust vacuum coupled to the multi-port foreline.








 
 
  Recently Added Patents
Regulation of wavelength shift and perceived color of solid state lighting with intensity variation
Method for forming an electric signal representing a sound and a device therefor
Absorbent article package
Method and system for identifying compromised nodes
System and method for reducing memory requirements for electrical domain compensation of intra-channel nonlinearity in an optical communications system
Barrel driving system and backlash correction method thereof
Server for sending new application portions to mobile wireless communications devices and related methods
  Randomly Featured Patents
Method for classifying data measured during drilling operations
Automated pallet inspection and repair
Cross-reactive displacing antibodies from collagen-binding proteins and method of identification and use
Variable valve actuation mechanism for an internal combustion engine
Process for expanding tobacco under moderate conditions
Permanent deformation measurement apparatus for elastic member
Pattern-forming conveyor apparatus for container palletizing
Measurement method and arrangement
Fuel tank
Semiconductor laser device and method for producing the same