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Transparent conductive film, sintered body target for transparent conductive film fabrication, and transparent conductive base material and display device using the same










Image Number 5 for United States Patent #7960033.

A transparent conductive film which is amorphous, has a high transmittance of light in the visible region of short wavelengths, and is hard to beak with respect to bending is provided. The transparent conductive film is an amorphous oxide film composed of Ga, In, and O, in which a Ga content ranges from 35 at. % to 45 at. % with respect to all metallic atoms, a resistivity ranges 1.2.times.10.sup.-3 .OMEGA.cm to 8.0.times.10.sup.-3 .OMEGA.cm a film thickness is 500 nm or less, and a transmittance of light at a wavelength of 380 nm is 45% or more.








 
 
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