Resources Contact Us Home
Capacitively coupled plasma reactor with magnetic plasma control

Image Number 16 for United States Patent #7955986.

A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.

  Recently Added Patents
Piperazinedione compounds
Cover panel for frame based door lock
System and method for providing security in browser-based access to smart cards
Enhanced claims damage estimation using aggregate display
MIM capacitor and associated production method
Semiconductor memory apparatus
Intermediate film for laminated glasses, and laminated glass
  Randomly Featured Patents
Regulator circuit for converting alternating input to a constant direct output
Apparatus and method for recovery of relative signal timing
Interactive TTS optimization tool
Vertical LED with current guiding structure
Filter system with removable enhancement media
Magnetoresistive magnetic field sensors and motor control devices using same
Constant velocity joint having fixed center and crossed grooves
Cushioning conversion machine including a length measuring device
Structure for disposing clutch control apparatus in power unit for saddle-ride type vehicle
Zero turn transaxle