Resources Contact Us Home
Capacitively coupled plasma reactor with magnetic plasma control

Image Number 16 for United States Patent #7955986.

A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.

  Recently Added Patents
Methods for diagnosing irritable bowel syndrome
Polyester resin for toner, electrostatic charge image developing toner, electrostatic charge image developer, toner cartridge, process cartridge, image forming apparatus, and image forming met
Manufactured product configuration
Distortion estimation for quantized data
Wide bandwidth hybrid antenna for combination EAS and RFID label or tag
Fabrication method of semiconductor device and fabrication method of dynamic threshold transistor
Probiotic enriched and low organic acid food products
  Randomly Featured Patents
On-the-fly error correction
Practical, cost-effective synthesis of COQ10
Ink-jet printhead and method of manufacturing the same
Bridge circuit to suppress echoes in communication devices
Ink, method of reducing kogation on heater of ink-jet recording head, ink-jet recording process, ink-jet recording apparatus, recording unit, and method for lengthening the life of recording h
Card flat segment having a dirt separator for carding machines
Optical homodyne DPSK receiver with optical amplifier
Passive data collection system for market research data
Tubular container molding method and apparatus
Slim line battery pack