Resources Contact Us Home
Capacitively coupled plasma reactor with magnetic plasma control

Image Number 16 for United States Patent #7955986.

A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.

  Recently Added Patents
System and method for discontinuous reception control start time
Optical cable plug-in detection
Electric connection box
Technique for skipping irrelevant portions of documents during streaming XPath evaluation
Lithographic apparatus and device manufacturing method
Methods and systems for managing electronic messages
Cylindrical lithium secondary battery comprising a contoured center pin
  Randomly Featured Patents
Atomic interrupt masking in an interrupt controller to prevent delivery of same interrupt vector for consecutive interrupt acknowledgements
Asphodelus composition for increasing white blood cell count
Floor sign holder with receptacle
Imide nitrogen dibenzofurans polymers
Process for the separation of L-leucine and L-isoleucine
Method of forming an ink-resistant seal between a printhead assembly and the headland region of an ink-jet pen cartridge.
Golf ball with liquid center
Method for purification of protein "e" from haemophilus influenzae
Optical apparatus
Semiconductor device for electrical overstress protection