Resources Contact Us Home
Capacitively coupled plasma reactor with magnetic plasma control

Image Number 16 for United States Patent #7955986.

A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.

  Recently Added Patents
Magnetic memory and method of manufacturing the same
Method of controlling mechanical mechanisms of optical storage apparatus for peak power/current reduction, and related optical storage apparatus and machine-readable medium
Process and apparatus for producing composite material that includes carbon nanotubes
Toy track intersection component
Rapid glycopeptide optimization via neoglycosylation
Display screen with graphical user interface
Method and system for providing complete internet anywhere with partial server processing
  Randomly Featured Patents
Wide angle laser range and bearing finder
Clutch valve system for static hydraulic continuously variable transmission
Keratoprosthetic polyurethane
Artificial ski surface unit
Curvilinear measuring device, and methods of constructing and utilizing same
Reinforced filter material
Piezoelectric device and liquid-ejecting head
Electronic camera apparatus and operation guide
Three-dimensional multichip module
Poly-phase frequency synthesis oscillator