Resources Contact Us Home
Capacitively coupled plasma reactor with magnetic plasma control

Image Number 16 for United States Patent #7955986.

A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.

  Recently Added Patents
Method of making an array of nucleic acid colonies
Non-phosphorus-based gellant for hydrocarbon fluids
Defected ground plane inductor
System and method for netbackup data decryption in a high latency low bandwidth environment
Randomly accessible visual information recording medium and recording method, and reproducing device and reproducing method
Wound dressings
Photoelectric conversion device
  Randomly Featured Patents
Bottle and cap
Desiccant canister for desiccants and other particulate material
Light emitting device
Half ball game
Coke oven battery
Bonding aluminum cladding to random glass mat reinforced polypropylene sheet
VoiceXML and rule engine based switchboard for interactive voice response (IVR) services
Combined adaptive spatio-temporal processing and multi-user detection for CDMA wireless systems
Electronic starter combined with the L-C ballast of a fluorescent lamp
Semiwet feed product