Resources Contact Us Home
Capacitively coupled plasma reactor with magnetic plasma control

Image Number 16 for United States Patent #7955986.

A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.

  Recently Added Patents
Single integrated circuit configured to operate both a capacitive proximity sensor device and a resistive pointing stick
Systems and methods for identifying malicious domains using internet-wide DNS lookup patterns
Mass spectrometry method
Luminescent nanosheets, and fluorescent illuminators, solar cells and color displays utilizing the same as well as nanosheet paints
Software self-checking systems and methods
Analyte assaying by means of immunochromatography with lateral migration
Imaging lens with three lens elements, and electronic apparatus having the same
  Randomly Featured Patents
Fuser apparatus for adjusting gloss of a fused toner image and method for fusing a toner image to a receiver
Exhaust gas purifying apparatus
Method of making high purity optical fluoride crystals
Consumption information management apparatus, image formation apparatus, and consumption information management system
Multiple density mask and fabrication thereof
Nonhuman mammals exhibiting PTSD-like behavior
Support panel for supporting external wall forming members
Coffee maker
Method for the transport of a long windmill wing and a vehicle for the transport thereof
Systems for measuring periodic structures