Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Capacitively coupled plasma reactor with magnetic plasma control










Image Number 16 for United States Patent #7955986.

A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.








 
 
  Recently Added Patents
Managing and collaborating with digital content
Fractal method for detecting and filling data gaps within LiDAR data
Organic light emitting display device and method of manufacturing the same
Key management using quasi out of band authentication architecture
Materials and methods for stress reduction in semiconductor wafer passivation layers
Information processing apparatus and display control method
Health monitoring of applications in a guest partition
  Randomly Featured Patents
Load commutated current source inverter
Chemically programmable immunity
Self-aligned silicon MOS device
Knitted collar with stays and method of manufacturing such a collar
Multiple pass laser amplifier system
Method for diagnosis and shock wave lithotripsy of stones in the submaxillary and parotid glands
Reciprocating slot cutting tool
Photosensitive-material conveying apparatus
Chemical process for producing isoprene by pyrolysis of allylic esters
Roof truss