Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Capacitively coupled plasma reactor with magnetic plasma control










Image Number 16 for United States Patent #7955986.

A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.








 
 
  Recently Added Patents
Defected ground plane inductor
Apparatus and method for recording reboot reason of equipment
Container pack
Vehicle seating system and method for reducing fatigue with changing actuator movement
Voltage regulator structure that is operationally stable for both low and high capacitive loads
Signal phase-based location of network nodes
Message transfer apparatus, output method, and computer program product
  Randomly Featured Patents
Device for computing a digital transform of a signal
Video signal processing apparatus
Systems and methods to provide augmented reality for a board game
Acetabular prosthetic device
Vertical bus bars for motor control center
Video signal reproducing apparatus
Protective cover for guidance device for a flexible-curtain goods-handling door
Programmable sequence controller
Push-button lance device and method
Halogenated pyrimidine nucleosides and their derivatives