Resources Contact Us Home
Capacitively coupled plasma reactor with magnetic plasma control

Image Number 16 for United States Patent #7955986.

A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.

  Recently Added Patents
Assessing a lead based on high-frequency response
Mobile station apparatus, management method in a mobile station apparatus, processing section, base station apparatus and communication system
ATM that allows a user to select a desired transaction by touch dragging a displayed icon that represents the desired transaction
Telephone call processing
Form-less electronic device assemblies and methods of operation
Imaging device, display device, control method, and method for controlling area change
Apparatuses and methods for storing and/or filtering a substance
  Randomly Featured Patents
System for synchronizing a video signal having a first frame rate to a second frame rate
Mixer with feedback
Semiconductor device and method of manufacturing the same
Storage and dispenser system
Artillery rocket
Guiding introducers for use in the treatment of accessory pathways around the mitral valve using a retrograde approach
Free-radical curable compositions
Method and apparatus for controlling deformable actuators
Tape cassette transport