Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Post-CMP treating liquid and manufacturing method of semiconductor device using the same










Image Number 2 for United States Patent #7951717.

Post-CMP treating liquids are provided, one of which includes water, an amphoteric surfactant, an anionic surfactant, a complexing agent, resin particles having carboxylic group and sulfonyl group on their surfaces, a primary particle diameter thereof ranging from 10 to 60 nm, and tetramethyl ammonium hydroxide. Another includes water, polyphenol, an anionic surfactant, ethylene diamine tetraacetic acid, resin particles having carboxylic group and sulfonyl group on their surfaces, a primary particle diameter thereof ranging from 10 to 60 nm, and tetramethyl ammonium hydroxide. Both of the treating liquids have a pH ranging from 4 to 9, and exhibit a polishing rate both of an insulating film and a conductive film at a rate of 10 nm/min or less.








 
 
  Recently Added Patents
Device and implantation system for electrical stimulation of biological systems
Systems and methods for building axes, co-axes and paleo-geographic coordinates related to a stratified geological volume
Technique for manufacturing bit patterned media
Treatment of cancer using the sodium salt of a benzoic acid derivative
Measuring current and resistance using combined diodes/resistor structure to monitor integrated circuit manufacturing process variations
External preparation composition for skin comprising ginseng flower or ginseng seed extracts
Scanning transmission electron microscope and axial adjustment method thereof
  Randomly Featured Patents
Navigation system
Fluorescent lamp and backlight unit using the same, and method of driving the backlight unit
Method and apparatus for bandwidth request/grant protocols in a wireless communication system
USB device and stand unit
Tiled imaging apparatus providing substantially continuous imaging
Optical head and optical information recording and playback apparatus
Three input sense amplifier and method of operation
Server and terminal emulator for persistent connection to a legacy host system with response time monitoring
Aggregation of data from external data sources within an implantable medical device
Bed frame design