Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Post-CMP treating liquid and manufacturing method of semiconductor device using the same










Image Number 2 for United States Patent #7951717.

Post-CMP treating liquids are provided, one of which includes water, an amphoteric surfactant, an anionic surfactant, a complexing agent, resin particles having carboxylic group and sulfonyl group on their surfaces, a primary particle diameter thereof ranging from 10 to 60 nm, and tetramethyl ammonium hydroxide. Another includes water, polyphenol, an anionic surfactant, ethylene diamine tetraacetic acid, resin particles having carboxylic group and sulfonyl group on their surfaces, a primary particle diameter thereof ranging from 10 to 60 nm, and tetramethyl ammonium hydroxide. Both of the treating liquids have a pH ranging from 4 to 9, and exhibit a polishing rate both of an insulating film and a conductive film at a rate of 10 nm/min or less.








 
 
  Recently Added Patents
Silicon carbide substrate, epitaxial wafer and manufacturing method of silicon carbide substrate
Precoding codebooks for MIMO communication systems
Apparatus and sensor for adjusting vertical sensor-alignment
Method and receiver for jointly decoding received communication signals using maximum likelihood detection
Assay for the diagnosis of flaviviral infection using antibodies with high affinity for NS1 protein of flavivirusi in hexameric form
Image forming apparatus and method
Multi-chip package with a supporting member and method of manufacturing the same
  Randomly Featured Patents
Flying toy vehicle
Combined perfume bottle and closure
Oxidation catalysts and process for preparing anhydride from alkanes
System and method for workorder management
Method and system for providing rewards to a portable computing device at the point of sale
Stylus arm for video disc player
Aerogel/xerogel composite material amalgamated with single-walled carbon nanotubes for multipurpose usage
Digital signal recording and/or reproducing apparatus having a phase-locked loop for generating a clock signal from recording signals during a recording operation and reproducing signal during
Methods, well cement compositions and lightweight additives therefor
Frequency reuse technique for a high data rate satellite communication system