Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
High aspect ratio electroplated metal feature and method










Image Number 3 for United States Patent #7951714.

Disclosed are embodiments of an improved high aspect ratio electroplated metal structure (e.g., a copper or copper alloy interconnect, such as a back end of the line (BEOL) or middle of the line (MOL) contact) in which the electroplated metal fill material is free from seams and/or voids. Also, disclosed are embodiments of a method of forming such an electroplated metal structure by lining a high aspect ratio opening (e.g., a high aspect ratio via or trench) with a metal-plating seed layer and, then, forming a protective layer over the portion of the metal-plating seed layer adjacent to the opening sidewalls so that subsequent electroplating occurs only from the bottom surface of the opening up.








 
 
  Recently Added Patents
Collaborative data redundancy for configuration tracking systems
Malicious attack detection and analysis
Alterable account number
Dynamic web page construction based on determination of client device location
Device for accurately measuring concentration of component in blood and control method of the device
Cosmetic/dermatological compositions comprising naphthoic acid compounds and polyurethane polymers
System and method for passing PLC signals from a first electrical line to a second electrical line
  Randomly Featured Patents
Method and apparatus for the transmission and reception of two conventional television signals using a two-line MAC format
Semiconductor device with pure copper wirings and method of manufacturing a semiconductor device with pure copper wirings
System for detecting deterioration of HC sensors for internal combustion engines
Packaging structure
Single-needle artificial kidney
Utilization of poly(ethylene terephthalate) plastic and composition-modified barium titanate powders in a matrix that allows polarization and the use of integrated-circuit technologies for the
Making an availability determination regarding a requested ware
Compositions containing lactic acid bacterium Streptococcus salivarius
Tuning fork formed of rolled invariable elasticity material
Apparatus, method, and product for downscaling an image