Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for manufacturing semiconductor epitaxial crystal substrate










Image Number 7 for United States Patent #7951685.

The present invention provides a method for manufacturing a gallium nitride semiconductor epitaxial crystal substrate with a dielectric film which has a low gate leak current and negligibly low gate lag, drain lag, and current collapse characteristics. The method for manufacturing a semiconductor epitaxial crystal substrate is a method for manufacturing a semiconductor epitaxial crystal substrate in which a dielectric layer of a nitride dielectric material or an oxide dielectric material in an amorphous form functioning as a passivation film or a gate insulator is provided on a surface of a nitride semiconductor crystal layer grown by metal organic chemical vapor deposition. In the method, after the nitride semiconductor crystal layer is grown in an epitaxial growth chamber, the dielectric layer is grown on the nitride semiconductor crystal layer in the epitaxial growth chamber.








 
 
  Recently Added Patents
Image forming apparatus
Instrumenting configuration and system settings
Systems and methods for redox flow battery scalable modular reactant storage
Wavelength and power scalable waveguiding-based infrared laser system
High power insulated gate bipolar transistors
Storage basket with lid
Method, device and computer readable medium for determining whether transmission signals are present in received signals
  Randomly Featured Patents
Polymer bound aryl substituted crown ethers
Crowbar tool
Terminal connectors and method of making the same
Method for producing foamed plastic blocks based on polyolefin
Method for controlling oxygen content of silicon crystals using a combination of cusp magnetic field and crystal and crucible rotation rates
Power control for partial channel-state information (CSI) multiple-input, multiple-output (MIMO) systems
Synthesized .gamma.-carbolines
Fastening belt with rotatable drag hooks
Low profile inductive component
Ink jet printing head