Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for manufacturing semiconductor epitaxial crystal substrate










Image Number 7 for United States Patent #7951685.

The present invention provides a method for manufacturing a gallium nitride semiconductor epitaxial crystal substrate with a dielectric film which has a low gate leak current and negligibly low gate lag, drain lag, and current collapse characteristics. The method for manufacturing a semiconductor epitaxial crystal substrate is a method for manufacturing a semiconductor epitaxial crystal substrate in which a dielectric layer of a nitride dielectric material or an oxide dielectric material in an amorphous form functioning as a passivation film or a gate insulator is provided on a surface of a nitride semiconductor crystal layer grown by metal organic chemical vapor deposition. In the method, after the nitride semiconductor crystal layer is grown in an epitaxial growth chamber, the dielectric layer is grown on the nitride semiconductor crystal layer in the epitaxial growth chamber.








 
 
  Recently Added Patents
Content display monitor
Resource compatability for data centers
Solid-state imaging apparatus and imaging system
Method for preparing a .beta.-SiAlON phosphor
Control system of substrate processing apparatus, collecting unit, substrate processing apparatus and control method of the substrate processing apparatus
Apparatus for preventing overcharge of a battery
Sunglasses
  Randomly Featured Patents
Image input apparatus, program executed by computer, and method for preparing document with image
Portable digital camera with red eye filter
Rock splitting attachment for a breaking hammer
Method for producing hydrogenated silicon oxycarbide films having low dielectric constant
Systems and methods for adaptive signal sampling and sample quantization for resource-constrained stream processing
Paving stone
Method for producing cerium-based abrasive and cerium-based abrasive produced thereby
Acoustic driver assembly for a spherical cavitation chamber
Bicycle shift operating device
Electrical conduit entry template