Resources Contact Us Home
Method for manufacturing semiconductor epitaxial crystal substrate

Image Number 7 for United States Patent #7951685.

The present invention provides a method for manufacturing a gallium nitride semiconductor epitaxial crystal substrate with a dielectric film which has a low gate leak current and negligibly low gate lag, drain lag, and current collapse characteristics. The method for manufacturing a semiconductor epitaxial crystal substrate is a method for manufacturing a semiconductor epitaxial crystal substrate in which a dielectric layer of a nitride dielectric material or an oxide dielectric material in an amorphous form functioning as a passivation film or a gate insulator is provided on a surface of a nitride semiconductor crystal layer grown by metal organic chemical vapor deposition. In the method, after the nitride semiconductor crystal layer is grown in an epitaxial growth chamber, the dielectric layer is grown on the nitride semiconductor crystal layer in the epitaxial growth chamber.

  Recently Added Patents
Systems and methods for flow mirroring with network-scoped connection-oriented sink
Method, apparatus and computer program product for providing metadata entry
System and transceiver clocking to minimize required number of reference sources in multi-function cellular applications including GPS
Method and system for generating and displaying an interactive dynamic graph view of multiply connected objects
Helmet mandible
Article based on a composition containing a crosslinked blend of elastomers
Mobile target system
  Randomly Featured Patents
Production of gem-disubstituted cyclohexadienones
Chick processing apparatus
Injection molded container and process for making same
Wax mould apparatus
Camera having a vibration compensation device and a strobe emitting device
Silicon-oxynitride-oxide (SXO) continuity film pad to recessed bird's beak of LOCOS
Implement method and device of terminal call firewall
Wireless signal antenna
Blinking signal-light system, especially for a series of emergency-phone stations distributed along the length of a highway, or the like
Anti-fracture, water-resistant, masonry-bondable membrane