Resources Contact Us Home
Film adhesion device and film adhesion method

Image Number 8 for United States Patent #7931766.

A film adhesion device includes a table carrying a semiconductor wafer, a pressing member (pressing roller) which presses a film (photoresist film) onto a surface side of the semiconductor wafer placed on the table, a bumper member provided on an outer peripheral side of the table and including a contact surface which is contacted by the pressing member when the pressing member presses the film, and an elevating support mechanism which supports the bumper member elevatably and positions the bumper member at a predetermined height level.

  Recently Added Patents
Video editing apparatus
Case for a tablet computer
6-O-substituted benzoxazole and benzothiazole compounds and methods of inhibiting CSF-1R signaling
Automatic misalignment balancing scheme for multi-patterning technology
Semiconductor device comprising a Fin and method for manufacturing the same
Front face of a vehicle wheel
Wind farm, wind power plant in a wind farm and operating control for this purpose
  Randomly Featured Patents
Vehicle cargo bed extender
Disc carrier
Method for forming a mixed voltage circuit having complementary devices
Yeast-based vaccines as immunotherapy
Electronic abacus and operation method of the electronic abacus
System and method for managing and controlling data
Baby carriage
Analog autonomous test bus framework for testing integrated circuits on a printed circuit board
Process for manufacturing acrolein and/or acrylic acid from glycerol
Process of producing a pliable roller