Resources Contact Us Home
Film adhesion device and film adhesion method

Image Number 7 for United States Patent #7931766.

A film adhesion device includes a table carrying a semiconductor wafer, a pressing member (pressing roller) which presses a film (photoresist film) onto a surface side of the semiconductor wafer placed on the table, a bumper member provided on an outer peripheral side of the table and including a contact surface which is contacted by the pressing member when the pressing member presses the film, and an elevating support mechanism which supports the bumper member elevatably and positions the bumper member at a predetermined height level.

  Recently Added Patents
Toy vehicle housing
Meter socket cabinet
Power supply system for a data storage system and a method of controlling a power supply
Automatic portable electronic device configuration
Information recording medium and information processing method for accessing content with license or copyright protection
Switchable memory diodes based on ferroelectric/conjugated polymer heterostructures and/or their composites
Wearable display device
  Randomly Featured Patents
Low-pass filter for a diplexer
Child car seat
Alkyl thiourea miticides
Top rail
Heartburn and reflux disease treatment apparatus with wireless energy supply
Chair mechanism
Unit for programmed control of blanking machines
System and method of controlling exhaust gas recirculation
Series interconnected optoelectronic device module assembly