Resources Contact Us Home
Film adhesion device and film adhesion method

Image Number 6 for United States Patent #7931766.

A film adhesion device includes a table carrying a semiconductor wafer, a pressing member (pressing roller) which presses a film (photoresist film) onto a surface side of the semiconductor wafer placed on the table, a bumper member provided on an outer peripheral side of the table and including a contact surface which is contacted by the pressing member when the pressing member presses the film, and an elevating support mechanism which supports the bumper member elevatably and positions the bumper member at a predetermined height level.

  Recently Added Patents
Battery loading and unloading mechanism
Forming agent for gate insulating film of thin film transistor
Stereoscopic display
Flexible organic light emitting device and manufacturing method thereof
Image forming apparatus and method for making density correction in a low resolution image based on edge determination
Methods and system for providing drug pricing information from multiple pharmacy benefit managers (PBMs)
Nonvolatile memory device
  Randomly Featured Patents
Battery saving system for interrupting power supplies at intervals variable with traffic pattern
CIS-acting cellular nucleic acid molecules
Electronic television program guide schedule system and method
Tape head positioning device for adjusting azimuth head tilt
Segmented resonator structure having a uniform response for electrophotographic imaging
Vehicle-mounted electronic component security assembly
Motor/spool interface for direct drive servovalve
Method and architecture to provide a secured remote access to private resources
Black currant plant named `Ben Chaska`
Substrate holding unit, exposure apparatus, and device manufacturing method