Resources Contact Us Home
Film adhesion device and film adhesion method

Image Number 6 for United States Patent #7931766.

A film adhesion device includes a table carrying a semiconductor wafer, a pressing member (pressing roller) which presses a film (photoresist film) onto a surface side of the semiconductor wafer placed on the table, a bumper member provided on an outer peripheral side of the table and including a contact surface which is contacted by the pressing member when the pressing member presses the film, and an elevating support mechanism which supports the bumper member elevatably and positions the bumper member at a predetermined height level.

  Recently Added Patents
Soybean cultivar CL1013665
Washing machine
Etching composition
Mixed reactant flow-by fuel cell
Adjustable box extender
Methods and apparatuses for configuring and operating graphics processing units
Sheet member and method of manufacturing sheet member
  Randomly Featured Patents
Heat and airflow management for a printer dryer
Device for driving recorders and printing carriages in data recorders
Method for preparing 4-hydroxycinnolines in a pH controlled system
Information encoding method and apparatus, and information decoding method and apparatus
Method and system for calculating energy metrics of a building and one or more zones within the building
Beverage cooler apparatus
Push button actuation system for ATV transmission
Drive cable having internal lead wires
Process for producing aromatic carboxylic acid and apparatus therefor
Nucleating device