Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program










Image Number 13 for United States Patent #7925370.

A substrate processing system which is capable of preventing dust from becoming attached to substrates without increasing the degree of cleanliness of a clean room to a predetermined level, and also capable of increasing the substrate processing throughput without increasing the burden on workers. a plasma processing apparatus 2 that subjects semiconductor wafers W to plasma processing in a cleaned atmosphere. A SMIF 4 has a enclosure 23 that is connected to the plasma processing apparatus 2 and has a cleaned atmosphere therein, a pod stage 26 on which a pod 3 housing semiconductor wafers W is mounted, a pod mounting portion 24 that carries out removal of semiconductor wafers W from the pod 3 and housing of semiconductor wafers W into the pod 3, and a wafer cassette transfer arm 27 that transfers semiconductor wafers W between the pod stage 26 and the plasma processing apparatus 2 via the enclosure 23. A preliminary loader 5 having a stage-shaped unprocessed pod port 28 that stores a pod 3 housing semiconductor wafers W that have not been subjected to the plasma processing, a shelf-like processed pod port 29 that stores a sealed container housing semiconductor wafers W that have been subjected to the plasma processing, and a pod moving mechanism 30 that moves the pods 3 between the stage-shaped unprocessed pod port 28 and the pod stage 26, and between the pod stage 26 and the shelf-like processed pod port 29.








 
 
  Recently Added Patents
Methods and apparatus for map detection with reduced complexity
Spalling utilizing stressor layer portions
Method for controlling operation of a wind turbine
Weight-balanced polygonal mirror, light scanning unit using the polygonal mirror, and image forming apparatus
Adhering composition and method of applying the same
Protective circuit board and battery pack using the same
Portable electronic device housing including hinge
  Randomly Featured Patents
Scanning mirror device
Method of preparing bismuth oxide superconductor
Shotgun barrel
Code power estimation for MIMO signals
Method of centrifugally forming a subterranean soil-cement casing
Soap dish clothes drying apparatuses
Method and apparatus for rearing aquatic animals
Method for optimizing the production output of an apparatus processing flat items
Process and device for suppression of flame and pressure pulsations in a furnace
Toe unit for safety ski bindings