Resources Contact Us Home
Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program

Image Number 13 for United States Patent #7925370.

A substrate processing system which is capable of preventing dust from becoming attached to substrates without increasing the degree of cleanliness of a clean room to a predetermined level, and also capable of increasing the substrate processing throughput without increasing the burden on workers. a plasma processing apparatus 2 that subjects semiconductor wafers W to plasma processing in a cleaned atmosphere. A SMIF 4 has a enclosure 23 that is connected to the plasma processing apparatus 2 and has a cleaned atmosphere therein, a pod stage 26 on which a pod 3 housing semiconductor wafers W is mounted, a pod mounting portion 24 that carries out removal of semiconductor wafers W from the pod 3 and housing of semiconductor wafers W into the pod 3, and a wafer cassette transfer arm 27 that transfers semiconductor wafers W between the pod stage 26 and the plasma processing apparatus 2 via the enclosure 23. A preliminary loader 5 having a stage-shaped unprocessed pod port 28 that stores a pod 3 housing semiconductor wafers W that have not been subjected to the plasma processing, a shelf-like processed pod port 29 that stores a sealed container housing semiconductor wafers W that have been subjected to the plasma processing, and a pod moving mechanism 30 that moves the pods 3 between the stage-shaped unprocessed pod port 28 and the pod stage 26, and between the pod stage 26 and the shelf-like processed pod port 29.

  Recently Added Patents
Build process management system
Method of manufacturing semiconductor devices using ion implantation
Pixel interleaving configurations for use in high definition electronic sign displays
Signal processing device, signal processing method and program
Semiconductor power amplifier
Circuits for prevention of reverse leakage in charge pumps
Shoe upper
  Randomly Featured Patents
Method and system for layer-2 pseudo-wire rapid-deployment service over unknown internet protocol networks
Synthetic resin carrying basic nitrogen groups, its preparation, coating materials produced using this resin, and cathodic electrocoating
Rigid frame garment bag
Synthesis of load-independent switch-mode power converters
Color filter grade photosensitive resin coloring composition and color filter using the same
Work station set-up gauge with remote readout
Fluorocarbon-based coating compositions and articles derived therefrom
Crop height sensing assembly for mechanical detasseling devices
Creping chemical composition and method of use
Thin film forming apparatus