Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program










Image Number 13 for United States Patent #7925370.

A substrate processing system which is capable of preventing dust from becoming attached to substrates without increasing the degree of cleanliness of a clean room to a predetermined level, and also capable of increasing the substrate processing throughput without increasing the burden on workers. a plasma processing apparatus 2 that subjects semiconductor wafers W to plasma processing in a cleaned atmosphere. A SMIF 4 has a enclosure 23 that is connected to the plasma processing apparatus 2 and has a cleaned atmosphere therein, a pod stage 26 on which a pod 3 housing semiconductor wafers W is mounted, a pod mounting portion 24 that carries out removal of semiconductor wafers W from the pod 3 and housing of semiconductor wafers W into the pod 3, and a wafer cassette transfer arm 27 that transfers semiconductor wafers W between the pod stage 26 and the plasma processing apparatus 2 via the enclosure 23. A preliminary loader 5 having a stage-shaped unprocessed pod port 28 that stores a pod 3 housing semiconductor wafers W that have not been subjected to the plasma processing, a shelf-like processed pod port 29 that stores a sealed container housing semiconductor wafers W that have been subjected to the plasma processing, and a pod moving mechanism 30 that moves the pods 3 between the stage-shaped unprocessed pod port 28 and the pod stage 26, and between the pod stage 26 and the shelf-like processed pod port 29.








 
 
  Recently Added Patents
Magnetic memory and method of manufacturing the same
Products for animal use including humans having a certificate verifying at least one of efficacy or safety, and methods of providing such certificates
Systems and/or methods for using air/wind power to charge/re-charge vehicle batteries
Method and device for the detection of defects or correction of defects in machines
Maize variety inbred PH1CD7
Signal transfer apparatus
Front face of vehicle wheel
  Randomly Featured Patents
Method of forming electrophotographic photoreceptor and method of drying coating film
Rapidly dissolvable polymer films and articles made therefrom
System for detecting digital data transmitted by modulating a carrier
Fire extinguisher mounting bracket
MEMS optical switch and method of manufacture
Fan blade bracket
Ammunition storage and transfer mechanism
Optical sensor for medical device
Electronote wall mounted messaging device
Root shear feller