Resources Contact Us Home
Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program

Image Number 13 for United States Patent #7925370.

A substrate processing system which is capable of preventing dust from becoming attached to substrates without increasing the degree of cleanliness of a clean room to a predetermined level, and also capable of increasing the substrate processing throughput without increasing the burden on workers. a plasma processing apparatus 2 that subjects semiconductor wafers W to plasma processing in a cleaned atmosphere. A SMIF 4 has a enclosure 23 that is connected to the plasma processing apparatus 2 and has a cleaned atmosphere therein, a pod stage 26 on which a pod 3 housing semiconductor wafers W is mounted, a pod mounting portion 24 that carries out removal of semiconductor wafers W from the pod 3 and housing of semiconductor wafers W into the pod 3, and a wafer cassette transfer arm 27 that transfers semiconductor wafers W between the pod stage 26 and the plasma processing apparatus 2 via the enclosure 23. A preliminary loader 5 having a stage-shaped unprocessed pod port 28 that stores a pod 3 housing semiconductor wafers W that have not been subjected to the plasma processing, a shelf-like processed pod port 29 that stores a sealed container housing semiconductor wafers W that have been subjected to the plasma processing, and a pod moving mechanism 30 that moves the pods 3 between the stage-shaped unprocessed pod port 28 and the pod stage 26, and between the pod stage 26 and the shelf-like processed pod port 29.

  Recently Added Patents
Polymer composites having highly dispersed carbon nanotubes
Sensing during magnetic resonance imaging
Method, system and computer program product for managing funds in custodial deposit accounts
Protective vest
Evaluating programmer efficiency in maintaining software systems
Related news articles
Weight-balanced polygonal mirror, light scanning unit using the polygonal mirror, and image forming apparatus
  Randomly Featured Patents
Buoyant leg platform with retractable gravity base and method of anchoring and relocating the same
Method and apparatus for direct access endoscopic surgery
Reclosable packages with front panel slider-zipper assembly
Bracket for absorbent sheet products
Suspension system for a vehicle
Corner picture frame
Laser transfer of organic material from a donor to form a layer in an OLED device
System and method for upgradable remotely deployed intelligent communication devices
Pyrazinecarboxamide derivatives as HDL-cholesterol raising agents
ISFET-based measuring device and method for correcting drift