Resources Contact Us Home
Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program

Image Number 13 for United States Patent #7925370.

A substrate processing system which is capable of preventing dust from becoming attached to substrates without increasing the degree of cleanliness of a clean room to a predetermined level, and also capable of increasing the substrate processing throughput without increasing the burden on workers. a plasma processing apparatus 2 that subjects semiconductor wafers W to plasma processing in a cleaned atmosphere. A SMIF 4 has a enclosure 23 that is connected to the plasma processing apparatus 2 and has a cleaned atmosphere therein, a pod stage 26 on which a pod 3 housing semiconductor wafers W is mounted, a pod mounting portion 24 that carries out removal of semiconductor wafers W from the pod 3 and housing of semiconductor wafers W into the pod 3, and a wafer cassette transfer arm 27 that transfers semiconductor wafers W between the pod stage 26 and the plasma processing apparatus 2 via the enclosure 23. A preliminary loader 5 having a stage-shaped unprocessed pod port 28 that stores a pod 3 housing semiconductor wafers W that have not been subjected to the plasma processing, a shelf-like processed pod port 29 that stores a sealed container housing semiconductor wafers W that have been subjected to the plasma processing, and a pod moving mechanism 30 that moves the pods 3 between the stage-shaped unprocessed pod port 28 and the pod stage 26, and between the pod stage 26 and the shelf-like processed pod port 29.

  Recently Added Patents
Image processing system and method
Organic compounds
High-voltage AC light-emitting diode structure
Communication terminal device, and recording medium
Method of making a CIG target by spray forming
Assigning runtime artifacts to software components
Capacity and coverage self-optimization method and device in a mobile network
  Randomly Featured Patents
Flavored protein products derived from Candida utilis
Apparatus and method for interactive instruction of a student
Thin film transistor and display device
Personal computer having a security function, a method of implementing the security function, and methods of installing and detaching a security device to/from a computer
Papermakers' press fabric with increased contact area
Adhesive transparent resin and a composite including the same
Label for fabric and air freshener products
Industrial furnace with improved heat transfer
Optical transmission apparatus and optical attenuation amount control method
Sound damping apparatus