Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program










Image Number 13 for United States Patent #7925370.

A substrate processing system which is capable of preventing dust from becoming attached to substrates without increasing the degree of cleanliness of a clean room to a predetermined level, and also capable of increasing the substrate processing throughput without increasing the burden on workers. a plasma processing apparatus 2 that subjects semiconductor wafers W to plasma processing in a cleaned atmosphere. A SMIF 4 has a enclosure 23 that is connected to the plasma processing apparatus 2 and has a cleaned atmosphere therein, a pod stage 26 on which a pod 3 housing semiconductor wafers W is mounted, a pod mounting portion 24 that carries out removal of semiconductor wafers W from the pod 3 and housing of semiconductor wafers W into the pod 3, and a wafer cassette transfer arm 27 that transfers semiconductor wafers W between the pod stage 26 and the plasma processing apparatus 2 via the enclosure 23. A preliminary loader 5 having a stage-shaped unprocessed pod port 28 that stores a pod 3 housing semiconductor wafers W that have not been subjected to the plasma processing, a shelf-like processed pod port 29 that stores a sealed container housing semiconductor wafers W that have been subjected to the plasma processing, and a pod moving mechanism 30 that moves the pods 3 between the stage-shaped unprocessed pod port 28 and the pod stage 26, and between the pod stage 26 and the shelf-like processed pod port 29.








 
 
  Recently Added Patents
Flash trigger receiver
Sealing system for medical/dental handpieces
Liquid crystal composition, liquid crystal display using the liquid crystal composition, and method of manufacturing the liquid crystal display
Drive assistance device, wheelchair and method for determination of the physical efficiency and muscular effort data of a wheelchair driver
Defined surfaces of self-assembled monolayers and stem cells
Methods of treating an overweight or obese subject
Adjusting substrate temperature to improve CD uniformity
  Randomly Featured Patents
Method of and apparatus for decoding and displaying video that improves quality of the video
Wiring harness
Swimming pool accessory
Pillow-shaped suture package with pressure panel
Photoelectric transducer and manufacturing method therefor
Labeled carbamazepine hapten analogues for competitive enzyme immunoassays
Double-bladed scalpel
Method and apparatus for improved coating of a semiconductor wafer
Means and method for establishing loop-level parallelism
System and method for the creation and automatic deployment of personalized, dynamic and interactive voice services, including deployment through personalized broadcasts