Resources Contact Us Home
Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program

Image Number 13 for United States Patent #7925370.

A substrate processing system which is capable of preventing dust from becoming attached to substrates without increasing the degree of cleanliness of a clean room to a predetermined level, and also capable of increasing the substrate processing throughput without increasing the burden on workers. a plasma processing apparatus 2 that subjects semiconductor wafers W to plasma processing in a cleaned atmosphere. A SMIF 4 has a enclosure 23 that is connected to the plasma processing apparatus 2 and has a cleaned atmosphere therein, a pod stage 26 on which a pod 3 housing semiconductor wafers W is mounted, a pod mounting portion 24 that carries out removal of semiconductor wafers W from the pod 3 and housing of semiconductor wafers W into the pod 3, and a wafer cassette transfer arm 27 that transfers semiconductor wafers W between the pod stage 26 and the plasma processing apparatus 2 via the enclosure 23. A preliminary loader 5 having a stage-shaped unprocessed pod port 28 that stores a pod 3 housing semiconductor wafers W that have not been subjected to the plasma processing, a shelf-like processed pod port 29 that stores a sealed container housing semiconductor wafers W that have been subjected to the plasma processing, and a pod moving mechanism 30 that moves the pods 3 between the stage-shaped unprocessed pod port 28 and the pod stage 26, and between the pod stage 26 and the shelf-like processed pod port 29.

  Recently Added Patents
Database caching utilizing asynchronous log-based replication
Display system with mounting assemblies and associated methods
Computerized information and display methods
Methods of saccharification of polysaccharides in plants
Disposable and tamper-resistant RFID lock
Plants and seeds of corn variety CV092363
Encoding method and encoding device, decoding method and decoding device and transcoding method and transcoder for multi-object audio signals
  Randomly Featured Patents
Method for operating an electronic machine using a pointing device
Method for the compressed transmission of image data for 3-dimensional representation of scenes and objects
Geared rocker valve operation for internal combustion reciprocating piston engines
Bonus game for a gaming machine
Inbred maize line PHGJB
ID labeled fabric and method of applying an ID label to fabric at its point of manufacture
Collapsible cupholder armrest
Figurine of a polar bear
Paint roller bracket
Heat tolerant broccoli