Resources Contact Us Home
Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program

Image Number 13 for United States Patent #7925370.

A substrate processing system which is capable of preventing dust from becoming attached to substrates without increasing the degree of cleanliness of a clean room to a predetermined level, and also capable of increasing the substrate processing throughput without increasing the burden on workers. a plasma processing apparatus 2 that subjects semiconductor wafers W to plasma processing in a cleaned atmosphere. A SMIF 4 has a enclosure 23 that is connected to the plasma processing apparatus 2 and has a cleaned atmosphere therein, a pod stage 26 on which a pod 3 housing semiconductor wafers W is mounted, a pod mounting portion 24 that carries out removal of semiconductor wafers W from the pod 3 and housing of semiconductor wafers W into the pod 3, and a wafer cassette transfer arm 27 that transfers semiconductor wafers W between the pod stage 26 and the plasma processing apparatus 2 via the enclosure 23. A preliminary loader 5 having a stage-shaped unprocessed pod port 28 that stores a pod 3 housing semiconductor wafers W that have not been subjected to the plasma processing, a shelf-like processed pod port 29 that stores a sealed container housing semiconductor wafers W that have been subjected to the plasma processing, and a pod moving mechanism 30 that moves the pods 3 between the stage-shaped unprocessed pod port 28 and the pod stage 26, and between the pod stage 26 and the shelf-like processed pod port 29.

  Recently Added Patents
Methods and apparatus for clock signal synchronization in a configuration of series connected semiconductor devices
Cathode active material and lithium secondary battery comprising the same
Cardiac function management integrating cardiac contractility modulation
Method for manufacturing thin film transistor and method for manufacturing display device
RFID reader revocation checking using low power attached displays
Programmable computer mouse
Placental tissue grafts
  Randomly Featured Patents
Method for forming semiconductor integrated circuit device having a capacitor
System and method for monitoring an optical communication system
Method and device to determine a relative position using a resolver
Nonsedating .alpha.-2 agonists
Method for monitoring the reporting of misfirings in an internal combustion engine through various submethods
Liquid crystalline compound liquid crystal composition and liquid crystal display element
Fuel injector for a gas turbine engine
Power supply circuit with backup function
Automobile mirror assembly
Process for the electrochemical production of a carbon-containing material whose surface is modified with organic groups, and use of the modified material