Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods relating to trench-based support structures for semiconductor devices










Image Number 12 for United States Patent #7923345.

A method of manufacturing a semiconductor device wherein a laminate structure comprising a sacrificial layer is sandwiched between two etch stop layers (8,11) and which separates a semiconductor membrane (9) from a bulk substrate (1) is used to provide an underetched structure. Access trenches (4) and support trenches (5) are formed in the layered structure through the thickness of the semiconductor layer (9) and through the upper etch stop layer (8). The support trenches extend deeper through the sacrificial layer (12) and the lower etch stop layer and are filled. The sacrificial layer is exposed and etched away selectively to the etch stop layers to form a cavity (30) and realise a semiconductor membrane which is attached to the bulk substrate via a vertical support structure comprising the filled support trenches.








 
 
  Recently Added Patents
Print control server, print controlling method, and print control program
Battery loading and unloading mechanism
Compositions and methods for concentrating and depleting microorganisms
Wireless network device including a polarization and spatial diversity antenna system
Controller for soldering iron
Inter-cell power control in the presence of fractional frequency reuse
Pre-primed roofing membrane
  Randomly Featured Patents
Process for the preparation of aromatic hydrocarbons and hydrogen from propane
Flap type indicating device
Method of seismic surveying for resolving the effects of formation anisotropy in shear wave reflection seismic data
Decorative light string support
Wound closure adhesive remover
Method of curing hot box sand cores
Apparatus for weighing liquid in a bottle, in particular a pharmaceutical bottle
Positioning devices for a sensor element of a miniature fan
Filing system and reproduction apparatus
Cleaning and scouring glove