Resources Contact Us Home
Spinel wafers and methods of preparation

Image Number 9 for United States Patent #7919815.

Wafer suitable for semiconductor deposition application can be fabricated to have low bow, warp, total thickness variation, taper, and total indicated reading properties. The wafers can be fabricated by cutting a boule to produce rough-cut wafers, lapping the rough-cut wafers, etching the lapped wafers to remove a defect, deformation zone and relieve residual stress, and chemically mechanically polishing the etched wafers to desired finish properties. Etching can be performed by immersion in a heated etching solution comprising sulfuric acid or a mixture of sulfuric and phosphoric acids. A low pH slurry utilized in chemical mechanical polishing of the spinel wafer can comprise .alpha.-Al.sub.2O.sub.3 and an organic phosphate.

  Recently Added Patents
Solar energy converter with improved photovoltaic efficiency, frequency conversion and thermal management permitting super highly concentrated collection
Magnetic memory and method of manufacturing the same
Method for radiation sterilization of medical devices
Nanocatalysts structure, process for the preparation and use thereof
Matching geometry generation and display of mammograms and tomosynthesis images
Highly detectable pilot structure
Array substrate including thin film transistor and method of fabricating the same
  Randomly Featured Patents
Submersible raft for the cultivation of plant life
Intelligence in distributed lighting control devices
Power cross detection using loop current and voltage
Reduced-weight gear crank
Compact multi-stage pressure reducing valve
Dry powder medicament inhalator having an inhalation-activated flow diverting means for triggering delivery of delivery of medicament
Method for measuring lead concentrations in blood
Duplexer/multiplexer having filters that include at least one band reject filter
Semiconductor device wiring lead frame having resin flow control plates
System and method for partitioned distributed scanning of a large dataset for viruses and other malware