Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses










Image Number 15 for United States Patent #7913706.

Tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like. The invention provides an approach for rapid, efficient rinsing of wetted surface(s), and is particularly advantageous when used to rinse the lower surface of moveable barrier structures such as a barrier plate that overlies a workpiece being treated in such a manner to define a tapering flow channel over the workpiece. Rather than spray rinsing liquid onto the surface in a manner that generates undue splashing, droplet, or mist generation, the liquid is flowingly dispensed, preferably under laminar flow conditions, onto a surface that is in fluid communication with the surface to be rinsed. A smooth, uniform wetting and sheeting action results to accomplish rinsing with a significantly reduced risk of generating particle contamination.








 
 
  Recently Added Patents
Portable computer
Battery comprising circuitry for charge and discharge control, and method of operating a battery
Nonvolatile semiconductor memory device and method of manufacturing the same
Fabricated leaf tea products
Tablet computer
Polyolefin and composition for pipe systems and sheets
Methods, systems, and computer-readable media for providing an event alert
  Randomly Featured Patents
Process for the manufacture of 2-phenyl-4,5-oxazoledione 4-phenylhydrazone derivatives
Preparation of urethane and carbonate products
Apparatus, system, and method for degrading and removing a paved surface
Apparatus for automatic wrapping of bales
Protective garment for the mentally disabled
Folded wall anchor and surface-mounted anchoring
Power operated surfboard
Electrical connector with reliable structure and method for making the same
Endoscope with an obtusely angled connecting section
Composite particles