Resources Contact Us Home
Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses

Image Number 15 for United States Patent #7913706.

Tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like. The invention provides an approach for rapid, efficient rinsing of wetted surface(s), and is particularly advantageous when used to rinse the lower surface of moveable barrier structures such as a barrier plate that overlies a workpiece being treated in such a manner to define a tapering flow channel over the workpiece. Rather than spray rinsing liquid onto the surface in a manner that generates undue splashing, droplet, or mist generation, the liquid is flowingly dispensed, preferably under laminar flow conditions, onto a surface that is in fluid communication with the surface to be rinsed. A smooth, uniform wetting and sheeting action results to accomplish rinsing with a significantly reduced risk of generating particle contamination.

  Recently Added Patents
Electronic device
Analyte assaying by means of immunochromatography with lateral migration
Code conversion apparatus, code conversion method, and computer product
DNA promoters and anthrax vaccines
Biosensor kit
Flavonoid dimers and methods of making and using such
Temporal document trainer and method
  Randomly Featured Patents
Method and system for providing wireless-specific services for a wireless access network
Radiation imager with discontinuous dielectric
Method for preventing tissue adhesion
Pin feeding apparatus
Method for dynamically modulating driving current of backlight module
Antitumor antisense sequences directed against ribonucleotide reductase
Method for the direct determination of the toxicity of particulate solids
Run through bracket
Liquid storing and dispensing unit
Device for gas separation and method for producing such a system