Resources Contact Us Home
Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses

Image Number 15 for United States Patent #7913706.

Tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like. The invention provides an approach for rapid, efficient rinsing of wetted surface(s), and is particularly advantageous when used to rinse the lower surface of moveable barrier structures such as a barrier plate that overlies a workpiece being treated in such a manner to define a tapering flow channel over the workpiece. Rather than spray rinsing liquid onto the surface in a manner that generates undue splashing, droplet, or mist generation, the liquid is flowingly dispensed, preferably under laminar flow conditions, onto a surface that is in fluid communication with the surface to be rinsed. A smooth, uniform wetting and sheeting action results to accomplish rinsing with a significantly reduced risk of generating particle contamination.

  Recently Added Patents
Power management implementation in an optical link
Electrical terminal
Cell reselection and handover with multimedia broadcast/multicast service
Method and system for scaling usage of a social based application on an online social network
Battery loading and unloading mechanism
Profile-based user access to a network management system
Front face of vehicle wheel
  Randomly Featured Patents
Defibrillation shock strength determination technology
Pre-distortion based impedence discontinuity remediation for via stubs and connectors in printed circuit board design
Electron beam scanning method and scanning electron microscope
Wall mountable caddy
Device for the piecing of a yarn in a open-end spinning machine operating with a spinning rotor
Method and device for development for an image forming apparatus
Insecticide dispenser with temperature sensor
Large diesel engine exhaust muffler
Data compression for video
Compiler device, method, program and recording medium