Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming low dielectric constant fluorine-doped layers










Image Number 13 for United States Patent #7910475.

A method for forming a semiconductor device is provided. In one embodiment, the method includes providing a semiconductor substrate with a surface region. The surface region includes one or more layers overlying the semiconductor substrate. In addition, the method includes depositing a dielectric layer overlying the surface region. The dielectric layer is formed by a CVD process. Furthermore, the method includes forming a diffusion barrier layer overlying the dielectric layer. In addition, the method includes forming a conductive layer overlying the diffusion barrier layer. Additionally, the method includes reducing the thickness of the conductive layer using a chemical-mechanical polishing process. The CVD process utilizes fluorine as a reactant to form the dielectric layer. In addition, the dielectric layer is associated with a dielectric constant equal or less than 3.3.








 
 
  Recently Added Patents
Charging member, electrophotographic apparatus, and process cartridge
Non-disruptive configuration of a virtualization controller in a data storage system
Semiconductor device and method of forming discontinuous ESD protection layers between semiconductor die
Active element machine computation
Process for the production of electric energy by the excitation and capture of electrons from ground or water sources
Breathing mask
Specimen preparation device, and control method in specimen preparation device
  Randomly Featured Patents
Aconite tuber-sulphur composite preparation and a process for the preparation thereof
Hinge friction device for barrel-type hinges
Offset cancelling circuit
Organometallic complex, and light-emitting element, light-emitting device, electronic device and electronic device using the organometallic complex
Method and apparatus for correction of a detected faulty actual valve of a signal affected by harmonic vibrations
Controlling alcohol fermentations
Method and apparatus for state analysis
Tissue container
Circuit arrangement with power factor correction as well as a corresponding appliance
Sway brace fitting