Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming low dielectric constant fluorine-doped layers










Image Number 13 for United States Patent #7910475.

A method for forming a semiconductor device is provided. In one embodiment, the method includes providing a semiconductor substrate with a surface region. The surface region includes one or more layers overlying the semiconductor substrate. In addition, the method includes depositing a dielectric layer overlying the surface region. The dielectric layer is formed by a CVD process. Furthermore, the method includes forming a diffusion barrier layer overlying the dielectric layer. In addition, the method includes forming a conductive layer overlying the diffusion barrier layer. Additionally, the method includes reducing the thickness of the conductive layer using a chemical-mechanical polishing process. The CVD process utilizes fluorine as a reactant to form the dielectric layer. In addition, the dielectric layer is associated with a dielectric constant equal or less than 3.3.








 
 
  Recently Added Patents
Seismic fluid prediction via expanded AVO anomalies
Pseudosynchronizer for an unsynchronized bistatic radar system
Image forming apparatus, image forming control method, and recording medium storing image forming control program
Virtualized cluster communication system
Interrupt virtualization
Side mounting optical navigation module
Method and system for controlling TCP traffic with random early detection and window size adjustments
  Randomly Featured Patents
Transition detection circuit for PSK signals using the SAW Chirp-Z algorithm (U)
Calcium-fortified, grape-based products and methods for making them
Device for feeding commodities in succession
Control valve for cooling circuit
Building corner component
Desorbable sorption filter suitable for a motor vehicle heating or air-conditioning system
Hair wrap
Process and device for mass conservation of archives
Dispensing lid for a container of loose solid products
Substrate with a flattening film, display substrate, and method of manufacturing the substrates