Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming low dielectric constant fluorine-doped layers










Image Number 13 for United States Patent #7910475.

A method for forming a semiconductor device is provided. In one embodiment, the method includes providing a semiconductor substrate with a surface region. The surface region includes one or more layers overlying the semiconductor substrate. In addition, the method includes depositing a dielectric layer overlying the surface region. The dielectric layer is formed by a CVD process. Furthermore, the method includes forming a diffusion barrier layer overlying the dielectric layer. In addition, the method includes forming a conductive layer overlying the diffusion barrier layer. Additionally, the method includes reducing the thickness of the conductive layer using a chemical-mechanical polishing process. The CVD process utilizes fluorine as a reactant to form the dielectric layer. In addition, the dielectric layer is associated with a dielectric constant equal or less than 3.3.








 
 
  Recently Added Patents
Multifunction switch for vehicle having lighting module
Method to alter silicide properties using GCIB treatment
Opioid-nornicotine codrugs combinations for pain management
Panel for decoration
Color stable manganese-doped phosphors
Heterogeneous language data typing without executable regeneration
Toy
  Randomly Featured Patents
Outside corner bracket
Device for controlling thickness of sheet in calendering
Granular data synchronization for editing multiple data objects
Iminoisoindolinone pigments containing phenylazoacetoacetyl-aminophenylene groups
Microelectronic die including low RC under-layer interconnects
System and method for reducing interference in an optical data stream using multiple, selectable equalizers
Roller and clothes drying apparatus provided with the same
Acoustic transducers for acoustic position sensing apparatus
Plants and seeds of corn variety cv076785
Water-dispersible binders for cationic electrodepositable paints, and method for their production