Resources Contact Us Home
Semiconductor device for preventing voids in the contact region and method of forming the same

Image Number 3 for United States Patent #7875982.

A semiconductor device includes: an interlayer insulation film; a lower interconnection layer; an upper interconnection layer; and a via hole extending through the interlayer insulation film to establish electric connection between the lower and upper interconnections; wherein a plurality of interconnection lines is provided in the lower interconnection layer, and a contact region is formed for contact with the via hole by partially joining at least two interconnection lines, and a void exists in a first region of the interlayer insulation film located between adjacent interconnection lines, and no void exists in a second region of the interlayer insulation film located between a contacting portion of the via hole in the contact region and an interconnection line adjacent to the contact region, whereby reliably preventing any contact between a via hole and a void formed in an interlayer insulation film even when the via hole is greatly displaced.

  Recently Added Patents
Method and system for video parameter analysis and transmission
Vehicle headlight
Performing a cyclic redundancy checksum operation responsive to a user-level instruction
Mobile browser context switching
Direct converting apparatus, method for controlling the same, and control signal generation device
Methods of synthesizing heteromultimeric polypeptides in yeast using a haploid mating strategy
Base station device and wireless communication method
  Randomly Featured Patents
Power transmission system
Thermal imaging processes and products of electroactive organic material
Method of extension of storage capacity and storage system using the method
Calorimeter and methods of use thereof
Nanopillar decoupling capacitor
Detection medium for gram negative bacteria
Night stand
Metal insulator semiconductor structure with polarization-compatible buffer layer
High power buffer with increased current stability
Children's drawing board