Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor device for preventing voids in the contact region and method of forming the same










Image Number 3 for United States Patent #7875982.

A semiconductor device includes: an interlayer insulation film; a lower interconnection layer; an upper interconnection layer; and a via hole extending through the interlayer insulation film to establish electric connection between the lower and upper interconnections; wherein a plurality of interconnection lines is provided in the lower interconnection layer, and a contact region is formed for contact with the via hole by partially joining at least two interconnection lines, and a void exists in a first region of the interlayer insulation film located between adjacent interconnection lines, and no void exists in a second region of the interlayer insulation film located between a contacting portion of the via hole in the contact region and an interconnection line adjacent to the contact region, whereby reliably preventing any contact between a via hole and a void formed in an interlayer insulation film even when the via hole is greatly displaced.








 
 
  Recently Added Patents
Etching apparatus and methods
Providing policy-based operating system services in an operating system on a computing system
Vibration power generator and vibration power generation device, and communication device and electronic equipment with vibration power generation device
Light-emitting diode devices
Switching power supply apparatus with overcurrent limiting and prolonged holding time
Image forming apparatus, control method, and storage medium
Powder for layerwise manufacturing of objects
  Randomly Featured Patents
Circuit for dividing clock frequency by N.5 where N is an integer
Method and apparatus for coating resin
Methods and apparatus for diverting articles from a conveyor
Preparation of strontium carbonate
Super porous low molecular weight vinyl halide resins
System and method for managing concentration of corporate debt
In-circuit measurement of saturation flux density Bsat, coercivity Hc, and permiability of magnetic components using a digital storage oscilloscope
Electromagnetic sensor
Line interruption supervisory device for a fire alarm system
Nail extracting device