Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Transferring device and transferring method










Image Number 5 for United States Patent #7875144.

A transferring device 10 for transferring plate-like members such as a semiconductor wafer and the like among the first table T1, the second table T2 and the third table T3. The transferring device 10 includes a supporting unit 11 provided with a supporting face for a semiconductor wafer W, and a multi joint robot 12 for transferring the supporting unit 11. The supporting face includes a stacked body of adhesive sheets S in which an adhesive layer A is laminated on a sheet base material SB, and transferring among the table T1 through T3 can be performed through sticking and peeling operation between the adhesive sheet S positioned in an outermost layer and the semiconductor wafer W.








 
 
  Recently Added Patents
Fuel cell and a method of manufacturing a fuel cell
Epilation apparatus
Assisting apparatus, method, and program for checking crosstalk noise between hierarchized modules in a semiconductor circuit
Heterocyclic compounds as CCR2B antagonists
Polar nematic compounds
Information processing apparatus, method for controlling information processing apparatus, and storage medium
High-order harmonic device of cavity filter
  Randomly Featured Patents
Exerciser for disabled persons
Session control in a communication system
Multiple stackable swingable non-slip cantilever pants hanger system
Digital signature of changing signals using feature extraction
Programmable gate array and methods for its fabrication
Vibrating mirror element
Passive range finding apparatus utilizing television sensors
Portable food heating device
Plumbing fitting
Protein production in Aureobasidium pullulans