Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same










Image Number 6 for United States Patent #7866341.

An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.








 
 
  Recently Added Patents
Diagnostic data interchange
Mobile terminal and method for displaying information
Drive apparatus
Spatula
Concentrating photovoltaic system module with actuator control
Methods of operating non-volatile memory devices during write operation interruption, non-volatile memory devices, memories and electronic systems operating the same
Face recognition through face building from two or more partial face images from the same face
  Randomly Featured Patents
Micromechanical yaw-rate sensor
Soft start circuit for switching power supply
Receptacle, in particular for single-use cosmetic products
Switching valve and an electro-pneumatic pressure converter utilizing the same
Chrysanthemum plant named Pasadena
Multi-conductor lead assembly for temporary use
Infrared light detector
Testing of integrated circuits including internal test circuitry and using token passing to select testing ports
Closable arrangement including resealable lid
Method of making coated abrasive belt with an endless, seamless backing