Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same










Image Number 6 for United States Patent #7866341.

An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.








 
 
  Recently Added Patents
Progressively discovering and integrating services
Pipette device
Storage device, data processing device, registration method, and recording medium
Polyamide compositions
Press nut
System and method for employing signoff-quality timing analysis information concurrently in multiple scenarios to reduce dynamic power in an electronic circuit and an apparatus incorporating t
Securing information by hiding identity on a computing device
  Randomly Featured Patents
Method of introducing a baseline measurement into electronic positioning apparatus
High chair
Method of establishing a logical state of an instance using non-deterministic operation results stored in a result log
Feedthrough conductor for electronic components
Laser processing method for a thin-film structure
Wafer-stage adjustment for compensating for mismatches in temperature dependent IC components
Bicycle wheel fork assembly
Adjustable golf putter
Hand drive tool
Communication device and method for controlling communication device