Resources Contact Us Home Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE     Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same Image Number 6 for United States Patent #7866341. An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.       Recently Added Patents Receiving apparatus, receiving method, program, and receiving system Communication headset Unlocking device, connector device, and connector Hydraulic excavator Intersection detection in panoramic video Chives hybrid Jeilo Process of growing plants under hypergravity conditions   Randomly Featured Patents One piece terminal system Radio base station apparatus, radio terminal apparatus, mobile communication system, and reception operation control program Photographic apparatus Microwave oscillator with dielectric resonator Arrow nock Insert for shielded trocar Automotive vehicle key Information recording medium and method for production thereof Spray tanning booth Changing image light device © 2006-2008 PatentGenius. All Rights Reserved.