Resources Contact Us Home
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same

Image Number 6 for United States Patent #7866341.

An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.

  Recently Added Patents
Signal processing apparatus and methods
Proximity-based mobile message delivery
Light-reflective anisotropic conductive paste and light-emitting device
Method and system for monitoring and treating hemodynamic parameters
Adaptive analog echo/next cancellation
Method and structure of forming backside through silicon via connections
System, device and method for transrating file based assets
  Randomly Featured Patents
Safety lighter
Console table
Method and apparatus for the treatment of plantar ulcers and foot deformities
Solid formulations of anionic dyes
Method and system for transmitting authentication context information
Tape transport means for cassette tape recorder
Disposable chair cover and method of using
Clutch mechanism
Method and apparatus for supporting a sleep mode action of a mobile station in a wireless mobile communication system