Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same










Image Number 6 for United States Patent #7866341.

An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.








 
 
  Recently Added Patents
Multichannel device utilizing a centralized out-of-band authentication system (COBAS)
Hypallergenic mosaic antigens and methods of making same
Weight-balanced polygonal mirror, light scanning unit using the polygonal mirror, and image forming apparatus
Maize variety inbred PH1CD7
Image processing apparatus, image forming system, and computer-readable storage medium
Luggage wheel housing with wheel
Permanent magnet axial field zeeman slower
  Randomly Featured Patents
Motion-picture screen
Illumination devices for inspection systems
Compression capacity control apparatus for swash plate compressor
Efficient decoders for LDPC codes
Filtration device for tank water for aquarium fish
Bags for containing bulk material
Stroboscopic practice golf club
Method and apparatus for automating telecommunications class charging and for reducing operator errors
System to automatically compensate the transversal oscillation of the scanning plane in a laser scanner used for profile measurement using reference element
Capacitor element method for manufacturing a capacitor element and use of a power capacitor