Resources Contact Us Home
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same

Image Number 6 for United States Patent #7866341.

An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.

  Recently Added Patents
Radio communication devices, information providers, methods for controlling a radio communication device and methods for controlling an information provider
Method of producing probabilities of being a template shape
System and method for deriving cell global identity information
Authoring method, authoring device and program
Medical injector
Elastic polypropylene-based film compositions
  Randomly Featured Patents
Phase comparator with improved comparison precision and synchronous semiconductor memory device employing the same
Sowing device for lawns
Waste container with displaceable panel closure
Method for forming an interconnection structure for ic metallization
Grooved core pattern for optimum resin distribution
Amalgam support arrangement for an electrodeless discharge lamp
Distance measurement method, medium, and apparatus for measuring distance between the distance measurement apparatus and target object
Method and apparatus for improving speech command recognition accuracy using event-based constraints
Process and apparatus for cutting or welding a workpiece
Curable composition