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Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same










Image Number 6 for United States Patent #7866341.

An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.








 
 
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