Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
High capacitance density vertical natural capacitors










Image Number 10 for United States Patent #7866015.

Disclosed are embodiments of a method of forming a capacitor with inter-digitated vertical plates such that the effective gap distance between plates is reduced. This gap width reduction significantly increases the capacitance density of the capacitor. Gap width reduction is accomplished during back end of the line processing by masking connecting points with nodes, by etching the dielectric material from between the vertical plates and by etching a sacrificial material from below the vertical plates. Etching of the dielectric material forms air gaps and various techniques can be used to cause the plates to collapse in on these air gaps, once the sacrificial material is removed. Any remaining air gaps can be filled by depositing a second dielectric material (e.g., a high k dielectric), which will further increase the capacitance density and will encapsulate the capacitor in order to make the reduced distance between the vertical plates permanent.








 
 
  Recently Added Patents
Hepatitis C virus inhibitors
Method and system for calibrating laser profiling systems
Architecture, system and method for testing resistive type memory
Energy storage device package
Method for counting and segmenting viral particles in an image
System and method for providing advice to consumer regarding a payment transaction
Systems and methods for online search recirculation and query categorization
  Randomly Featured Patents
Continuous process diffuser
Ultra-violet water treatment device
Apparatus and method for determining an engine speed
Structures which can be dismantled and folded, consisting of interconnecting tubular elements
Game simulation based on current events
Equivalence verification between transaction level models and RTL at the example to processors
Determining fluid composition from fluid properties
Method and circuit for simultaneously programming and verifying the programming of selected EEPROM cells
Footwear upper
Indoor wiring system for VHF/UHF signal lines