Resources Contact Us Home
High capacitance density vertical natural capacitors

Image Number 10 for United States Patent #7866015.

Disclosed are embodiments of a method of forming a capacitor with inter-digitated vertical plates such that the effective gap distance between plates is reduced. This gap width reduction significantly increases the capacitance density of the capacitor. Gap width reduction is accomplished during back end of the line processing by masking connecting points with nodes, by etching the dielectric material from between the vertical plates and by etching a sacrificial material from below the vertical plates. Etching of the dielectric material forms air gaps and various techniques can be used to cause the plates to collapse in on these air gaps, once the sacrificial material is removed. Any remaining air gaps can be filled by depositing a second dielectric material (e.g., a high k dielectric), which will further increase the capacitance density and will encapsulate the capacitor in order to make the reduced distance between the vertical plates permanent.

  Recently Added Patents
Display device with touch panel
Particle accelerator and charged particle beam irradiation apparatus including particle accelerator
Electronic device cover and method of making same
Light emitting diode
Temperature control for cooking appliance including combination heating system
Managing requests in a wireless system
Electromagnetic valve
  Randomly Featured Patents
Snap ring connector
Geranium plant named `KLEP01065`
Heartbeat apparatus via remote mirroring link on multi-site and method of using same
Source address based routing process
Learning sequence for estimating a transmission channel and corresponding estimator device
Integrated photonics module and devices using integrated photonics modules
Continuous heating apparatus for metal caps
Method for reducing data error when flash memory storage device using copy back command
Multiple port integrated DMA and interrupt controller and arbitrator
Standard compound for immunoassay for dioxin and method of immunoassay for dioxin