Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
High capacitance density vertical natural capacitors










Image Number 10 for United States Patent #7866015.

Disclosed are embodiments of a method of forming a capacitor with inter-digitated vertical plates such that the effective gap distance between plates is reduced. This gap width reduction significantly increases the capacitance density of the capacitor. Gap width reduction is accomplished during back end of the line processing by masking connecting points with nodes, by etching the dielectric material from between the vertical plates and by etching a sacrificial material from below the vertical plates. Etching of the dielectric material forms air gaps and various techniques can be used to cause the plates to collapse in on these air gaps, once the sacrificial material is removed. Any remaining air gaps can be filled by depositing a second dielectric material (e.g., a high k dielectric), which will further increase the capacitance density and will encapsulate the capacitor in order to make the reduced distance between the vertical plates permanent.








 
 
  Recently Added Patents
Radio communication system, base station device and mobile station device utilizing an intermittent reception
Methods of forming activated carbons
Display module
Method for the analysis of solid objects
Semiconductor device and method of manufacturing the same
System and method for updating firmware
Circuit arrangement for a piezo transformer, and method therefor
  Randomly Featured Patents
Method for generating a simulated network based on an actual managed network
Insert for a breast pump
Magnetic recording medium and method for making the same
Automated cleansing chamber
Method and apparatus for enabling connectivity between arbitrary networks using a mobile device
Management system for production line and management method for production line
Image processing using vector data to reduce noise
Combined coil and blank powder coating
Motion simulator
Method of forming a mask pattern