Resources Contact Us Home
High capacitance density vertical natural capacitors

Image Number 10 for United States Patent #7866015.

Disclosed are embodiments of a method of forming a capacitor with inter-digitated vertical plates such that the effective gap distance between plates is reduced. This gap width reduction significantly increases the capacitance density of the capacitor. Gap width reduction is accomplished during back end of the line processing by masking connecting points with nodes, by etching the dielectric material from between the vertical plates and by etching a sacrificial material from below the vertical plates. Etching of the dielectric material forms air gaps and various techniques can be used to cause the plates to collapse in on these air gaps, once the sacrificial material is removed. Any remaining air gaps can be filled by depositing a second dielectric material (e.g., a high k dielectric), which will further increase the capacitance density and will encapsulate the capacitor in order to make the reduced distance between the vertical plates permanent.

  Recently Added Patents
Method and system for detecting data modification within computing device
Computer device with digitizer calibration system and method
Discharge circuit and method
Catalyst and process of hydrocarbon feedstock reformation to hydrogen and carbon monoxide
2-aryl-4-quinazolinones and their pharmaceutical compositions
Storage system, control method therefor, and program
Surface-emitting laser light source using two-dimensional photonic crystal
  Randomly Featured Patents
Image pickup apparatus
Cold drink system
Mask, mask shell and seal with improved mounting, mask seal, method of mask manufacture and mask with reduced exhalation noise
Aqueous, gel laundry detergent composition
Computerized method, system and program product for generating a data mining model
Safety warning flag assembly for use with highway trucks
Lamp base
Anti-allergy treatment using 2-(substituted amino)-4,5-dihydro-4-oxo-3-furancarboxylic acids and derivatives thereof
Medium with a NiNb sealing layer
Sampling mixer, filter device, and radio device