Resources Contact Us Home
High capacitance density vertical natural capacitors

Image Number 10 for United States Patent #7866015.

Disclosed are embodiments of a method of forming a capacitor with inter-digitated vertical plates such that the effective gap distance between plates is reduced. This gap width reduction significantly increases the capacitance density of the capacitor. Gap width reduction is accomplished during back end of the line processing by masking connecting points with nodes, by etching the dielectric material from between the vertical plates and by etching a sacrificial material from below the vertical plates. Etching of the dielectric material forms air gaps and various techniques can be used to cause the plates to collapse in on these air gaps, once the sacrificial material is removed. Any remaining air gaps can be filled by depositing a second dielectric material (e.g., a high k dielectric), which will further increase the capacitance density and will encapsulate the capacitor in order to make the reduced distance between the vertical plates permanent.

  Recently Added Patents
HYR1 as a target for active and passive immunization against Candida
Non-volatile memory cell containing a nano-rail electrode
Catalysts for hydrodeoxygenation of polyols
Information repository search system
Organic compounds
Digital broadcasting transmission and reception system, and a signal processing method using turbo processing and turbo decoding
Pharmaceutical powder compositions
  Randomly Featured Patents
Motor vehicle with rear shock absorber having a differentiated effect for controlling vehicle attitude during braking, and control method used therein
Methods for inhibition of membrane fusion-associated events, including respiratory syncytial virus transmission
Nonapeptide and decapeptide analogs of LHRH, useful as LHRH antagonists
Process for preparing a polymer dispersion
IC chip solder bump structure and method of manufacturing same
Intra-aortic renal delivery catheter
Chamfer forming head for paper roll
Liquid medicine ejection device
Heat exchange method and apparatus utilizing chaotic advection in a flowing fluid to promote heat exchange
Hemostatic agent