Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods of fabricating a barrier layer with varying composition for copper metallization










Image Number 3 for United States Patent #7863179.

Various embodiments provide improved processes and systems that produce a barrier layer with decreasing nitrogen concentration with the increase of film thickness. A barrier layer with decreasing nitrogen concentration with film thickness allows the end of barrier layer with high nitrogen concentration to have good adhesion with a dielectric layer and the end of barrier layer with low nitrogen concentration (or metal-rich) to have good adhesion with copper. An exemplary method of depositing a barrier layer on an interconnect structure is provided. The method includes (a) providing an atomic layer deposition environment, (b) depositing a barrier layer on the interconnect structure with a first nitrogen concentration during a first phase of deposition in the atomic layer deposition environment. The method further includes (c) continuing the deposition of the barrier layer on the interconnect structure with a second nitrogen concentration during a second phase deposition in the atomic layer deposition environment.








 
 
  Recently Added Patents
Methods and apparatus for ultrasonic cleaning
IR(voltage) drop analysis in integrated circuit timing
Pointer display device, pointer display/detection method, pointer display/detection program and information apparatus
Drug delivery system
Blur correction device and imaging apparatus
Cake knife handle
Pyrrolidine-1,2-dicarboxamide derivatives
  Randomly Featured Patents
Nasal-gastric tube holder
Can
Apparatus for attaching soft tissue to bone
Boron-based catalysts
Processing of denim garments
Method of connecting terminal posts of a connector to a circuit board
Catheter
Fastener element molding
Hydraulic energy accumulator
Nasal and oral cannula having two capabilities and method of producing same