Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods of fabricating a barrier layer with varying composition for copper metallization










Image Number 17 for United States Patent #7863179.

Various embodiments provide improved processes and systems that produce a barrier layer with decreasing nitrogen concentration with the increase of film thickness. A barrier layer with decreasing nitrogen concentration with film thickness allows the end of barrier layer with high nitrogen concentration to have good adhesion with a dielectric layer and the end of barrier layer with low nitrogen concentration (or metal-rich) to have good adhesion with copper. An exemplary method of depositing a barrier layer on an interconnect structure is provided. The method includes (a) providing an atomic layer deposition environment, (b) depositing a barrier layer on the interconnect structure with a first nitrogen concentration during a first phase of deposition in the atomic layer deposition environment. The method further includes (c) continuing the deposition of the barrier layer on the interconnect structure with a second nitrogen concentration during a second phase deposition in the atomic layer deposition environment.








 
 
  Recently Added Patents
Systems and methods of device-free motion detection and presence detection
Data scrambling in memory devices
Carrier sense multiple access (CSMA) protocols for power line communications (PLC)
Character input device and program for displaying next word candidates based on the candidates' usage history
Press nut
System and method for stranded file opens during disk compression utility requests
Output circuit
  Randomly Featured Patents
Pen holder for a clip-board
Portion of a shoe upper
YW35 steel and a low temperature fishplate made of the same
Projection screen for displaying two-dimensional and three-dimensional motion pictures and method of use thereof
Methods for promoting growth using porcine growth hormone analogs
Apparatus and methods for deployment of vascular prostheses
Instruments and techniques for disc space preparation
Process for the preparation of solid photoactivator formulations: sulphonated zinc or aluminum phthalocyanine solutions
Bus structure for modularized chip with FPGA modules
Jewelry converter apparatus