Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods of fabricating a barrier layer with varying composition for copper metallization










Image Number 17 for United States Patent #7863179.

Various embodiments provide improved processes and systems that produce a barrier layer with decreasing nitrogen concentration with the increase of film thickness. A barrier layer with decreasing nitrogen concentration with film thickness allows the end of barrier layer with high nitrogen concentration to have good adhesion with a dielectric layer and the end of barrier layer with low nitrogen concentration (or metal-rich) to have good adhesion with copper. An exemplary method of depositing a barrier layer on an interconnect structure is provided. The method includes (a) providing an atomic layer deposition environment, (b) depositing a barrier layer on the interconnect structure with a first nitrogen concentration during a first phase of deposition in the atomic layer deposition environment. The method further includes (c) continuing the deposition of the barrier layer on the interconnect structure with a second nitrogen concentration during a second phase deposition in the atomic layer deposition environment.








 
 
  Recently Added Patents
Compositions substantially free of sodium chloride and methods for the storage of red blood cells
High purity diphenyl sulfone, preparation and use thereof for the preparation of a poly(aryletherketone)
Cover panel for frame based door lock
Sitagliptin intermediate compounds, preparation methods and uses thereof
Method for assembling a camera module, and camera module
Compact light shield for flash photography
Termite tubing preventative for non-wood materials
  Randomly Featured Patents
Feed device for a sewing machine
Method of producing ferrous sintered alloys with superior abrasion resistance
Automatic cooking medium level control systems and methods
Carbon-enhanced fluoride ion cleaning
Device for supporting a horizontal guided glass strand
Fundus camera
Address decoding scheme for DDR memory
Image forming apparatus having colorant holding regions and a colorant repelling region
Short detector for PROMS
Endoscopically deliverable ultrasound imaging system and method of use