Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods of fabricating a barrier layer with varying composition for copper metallization










Image Number 17 for United States Patent #7863179.

Various embodiments provide improved processes and systems that produce a barrier layer with decreasing nitrogen concentration with the increase of film thickness. A barrier layer with decreasing nitrogen concentration with film thickness allows the end of barrier layer with high nitrogen concentration to have good adhesion with a dielectric layer and the end of barrier layer with low nitrogen concentration (or metal-rich) to have good adhesion with copper. An exemplary method of depositing a barrier layer on an interconnect structure is provided. The method includes (a) providing an atomic layer deposition environment, (b) depositing a barrier layer on the interconnect structure with a first nitrogen concentration during a first phase of deposition in the atomic layer deposition environment. The method further includes (c) continuing the deposition of the barrier layer on the interconnect structure with a second nitrogen concentration during a second phase deposition in the atomic layer deposition environment.








 
 
  Recently Added Patents
Light emitting diode package and method of fabricating the same
Methods and systems for adapting a user environment
Medical injector
Dielectric insulation medium
Administrable compositions
Modification of an object replica
Secure data exchange between data processing systems
  Randomly Featured Patents
Magnetic recording medium
Method for fabricating complementary field effect transistor devices
Binder for planning calendar/appointment book and kit
Echinacea plant named `Balsomselo`
Nuclear reactor having control clusters with hydraulic actuation
Marking for painted objects and method of applying the marking
Systems and methods for measuring signal propagation delay between circuits
Computer controlled labelling machine
Sulfuric acid extraction of uranium from its ores
Catheter steering assembly providing asymmetric left and right curve configurations