Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods of fabricating a barrier layer with varying composition for copper metallization










Image Number 16 for United States Patent #7863179.

Various embodiments provide improved processes and systems that produce a barrier layer with decreasing nitrogen concentration with the increase of film thickness. A barrier layer with decreasing nitrogen concentration with film thickness allows the end of barrier layer with high nitrogen concentration to have good adhesion with a dielectric layer and the end of barrier layer with low nitrogen concentration (or metal-rich) to have good adhesion with copper. An exemplary method of depositing a barrier layer on an interconnect structure is provided. The method includes (a) providing an atomic layer deposition environment, (b) depositing a barrier layer on the interconnect structure with a first nitrogen concentration during a first phase of deposition in the atomic layer deposition environment. The method further includes (c) continuing the deposition of the barrier layer on the interconnect structure with a second nitrogen concentration during a second phase deposition in the atomic layer deposition environment.








 
 
  Recently Added Patents
Liquid formulations of carboxamide arthropodicides
Method and apparatus for allocating erasure coded data to disk storage
Compositions and methods using microspheres and non-ionic contrast agents
Vertical axis wind turbines
Flat panel display device and stereoscopic display device
Wire guide
Composition comprising a mixture of dextro- and levo-amphetamines complexed with ion-exchange resin particles to form drug resin particles
  Randomly Featured Patents
Synchronized express and local trains for urban commuter rail systems
Base connector, socket connector and complex type connector
Polarization diversity detection without a polarizing beam splitter
Magnet arrangement for an NMR tomography system, in particular for skin and surface examinations
Organic EL display
Thrust bearing
Medication dose control system
Cryotherapy method for detecting and treating vulnerable plaque
Low-cost highly aesthetic and durable shingle
Glass handling and processing system