Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods of fabricating a barrier layer with varying composition for copper metallization










Image Number 13 for United States Patent #7863179.

Various embodiments provide improved processes and systems that produce a barrier layer with decreasing nitrogen concentration with the increase of film thickness. A barrier layer with decreasing nitrogen concentration with film thickness allows the end of barrier layer with high nitrogen concentration to have good adhesion with a dielectric layer and the end of barrier layer with low nitrogen concentration (or metal-rich) to have good adhesion with copper. An exemplary method of depositing a barrier layer on an interconnect structure is provided. The method includes (a) providing an atomic layer deposition environment, (b) depositing a barrier layer on the interconnect structure with a first nitrogen concentration during a first phase of deposition in the atomic layer deposition environment. The method further includes (c) continuing the deposition of the barrier layer on the interconnect structure with a second nitrogen concentration during a second phase deposition in the atomic layer deposition environment.








 
 
  Recently Added Patents
Tri-material dual-species neutron spectrometer
Aware manufacturing of integrated circuits
Signal processor and signal processing method
Integrated circuit devices having conductive structures with different cross sections
Tab visibility
Image processing apparatus capable of using replacement component, image forming apparatus capable of using replacement component, and method of administrating replacement component
Pressure-sensitive adhesive composition having an improved release behavior
  Randomly Featured Patents
Method and system for managing personalized settings in a mobile vehicle
Fan blade structure
Signal transfer circuit and image pickup device
Cover member for illuminated push button switch and method for manufacturing same
Method and device for inserting a plurality of individual sheetlike forms of administration in a dispenser by forming a multilayer pile
Data writing with plasmon resonator
Sofa
Ankle foot orthosis
Navigation tool for exploring a knowledge base
Vitamin D receptor modulators