Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor device and manufacturing method thereof










Image Number 14 for United States Patent #7863162.

A manufacturing method of a semiconductor device in which the oxygen and carbon concentrations are reduced at the interface of each layer making up the semiconductor multilayer film. A first semiconductor layer is formed on a single-crystal substrate in a first reactor; the substrate is transferred from the first reactor to a second reactor through a transfer chamber; and a second semiconductor layer is formed on the first semiconductor layer in the second reactor. During substrate transfer, hydrogen is supplied when the number of hydrogen atoms bonding with the surface atoms of the first semiconductor layer is less than the number of surface atoms of the first semiconductor layer, and the supply of hydrogen is stopped when the number of hydrogen atoms bonding with the surface atoms of the first semiconductor layer is greater than the number of surface atoms of the first semiconductor layer.








 
 
  Recently Added Patents
Systems and methods for implementing multi-application tabs and tab sets
Paging of a user equipment (UE) within a wireless communications system
Non-volatile semiconductor memory and data processing method in non-volatile semiconductor memory
Data converter with configurable functions
Motion control system and X-ray measurement apparatus
Method for using directing cells for specific stem/progenitor cell activation and differentiation
Active pellet without chemical additives
  Randomly Featured Patents
Home-use fuel cell system
Film-forming method and film-forming device
Removing the gibbs phenomenon in fourier transform processing in digital filters or other spectral resolution devices
Anti-infective agents against intracellular pathogens
Method and system for reclaiming aggregate from concrete waste material
Magnetic tape apparatus having a differential braking mechanism with a buckling spring member
Distributed feedback semiconductor laser with monitor
Drum frame system for cranes
Computer-based communication systems and arrangements associated therewith for indicating user status
Policy based quality of service