Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor device and manufacturing method thereof










Image Number 14 for United States Patent #7863162.

A manufacturing method of a semiconductor device in which the oxygen and carbon concentrations are reduced at the interface of each layer making up the semiconductor multilayer film. A first semiconductor layer is formed on a single-crystal substrate in a first reactor; the substrate is transferred from the first reactor to a second reactor through a transfer chamber; and a second semiconductor layer is formed on the first semiconductor layer in the second reactor. During substrate transfer, hydrogen is supplied when the number of hydrogen atoms bonding with the surface atoms of the first semiconductor layer is less than the number of surface atoms of the first semiconductor layer, and the supply of hydrogen is stopped when the number of hydrogen atoms bonding with the surface atoms of the first semiconductor layer is greater than the number of surface atoms of the first semiconductor layer.








 
 
  Recently Added Patents
Methods and systems for automated segmentation of dense cell populations
Power generating apparatus of renewable energy type and method of attaching and detaching blade
Snap-engagement structure
Parallel processing computer systems with reduced power consumption and methods for providing the same
Recombinant vectors for use in position-independent transgene expression within chromatin
Visualization of information associated with applications in user interfaces
Semiconductor memory device and method for driving the same
  Randomly Featured Patents
Healthy Bird.TM. Avian Nutrition System
Apparatus and method for transmitting message in a mobile communication system
Method of fabricating field emission arrays employing a hard mask to define column lines and another mask to define emitter tips and resistors
Image recognition apparatus
Liquid crystal display device
Mobile phone
Skate with pivoting front wheels
Boot support plate for ski binding
Pruning baler
Apparatus for strip casting having a heated orifice