Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor device and manufacturing method thereof










Image Number 14 for United States Patent #7863162.

A manufacturing method of a semiconductor device in which the oxygen and carbon concentrations are reduced at the interface of each layer making up the semiconductor multilayer film. A first semiconductor layer is formed on a single-crystal substrate in a first reactor; the substrate is transferred from the first reactor to a second reactor through a transfer chamber; and a second semiconductor layer is formed on the first semiconductor layer in the second reactor. During substrate transfer, hydrogen is supplied when the number of hydrogen atoms bonding with the surface atoms of the first semiconductor layer is less than the number of surface atoms of the first semiconductor layer, and the supply of hydrogen is stopped when the number of hydrogen atoms bonding with the surface atoms of the first semiconductor layer is greater than the number of surface atoms of the first semiconductor layer.








 
 
  Recently Added Patents
Liquid crystal display and method of driving the same
Method for generating optical codes for a print-context
Semiconductor device and method of forming discontinuous ESD protection layers between semiconductor die
Digital display devices and digital projectors with expanded color gamut
Methods for isolating ligands of the human bitter taste receptor TAS2R49
Method for incubating the contents of a receptacle
Image forming apparatus
  Randomly Featured Patents
Multimode filter for de-blocking and de-ringing
Table top
Diisocyanate derivatives as lubricant and fuel additives and compositions containing same
Transport apparatus and boxing apparatus provided with same
Compounds and methods for modulating tissue permeability
9-dihydro-9-O-alkyldesmycosin derivatives
Starting apparatus, starting method, control method and exhaust filtration apparatus of internal combustion engine
Electrostatic chucks with flat film electrode
Communication apparatus and method
Composite concrete on cold formed steel section floor system