Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor device and manufacturing method thereof










Image Number 14 for United States Patent #7863162.

A manufacturing method of a semiconductor device in which the oxygen and carbon concentrations are reduced at the interface of each layer making up the semiconductor multilayer film. A first semiconductor layer is formed on a single-crystal substrate in a first reactor; the substrate is transferred from the first reactor to a second reactor through a transfer chamber; and a second semiconductor layer is formed on the first semiconductor layer in the second reactor. During substrate transfer, hydrogen is supplied when the number of hydrogen atoms bonding with the surface atoms of the first semiconductor layer is less than the number of surface atoms of the first semiconductor layer, and the supply of hydrogen is stopped when the number of hydrogen atoms bonding with the surface atoms of the first semiconductor layer is greater than the number of surface atoms of the first semiconductor layer.








 
 
  Recently Added Patents
Automated banking machine operated responsive to data bearing records with improved resistance to fraud
Glossing system for paper and paperboard coating
Method for forming a molded component for an item
Electromagnetic wave information detection apparatus and electromagnetic wave information detection method
System and method for accelerating input/output access operation on a virtual machine
Systems, methods and machine readable mediums for defining and executing new commands in a spreadsheet software application
Local sense amplifier circuit and semiconductor memory device including the same
  Randomly Featured Patents
Silver selenide film stoichiometry and morphology control in sputter deposition
Method and apparatus implementing a communication protocol for use in a control system
Adaptive receiving antenna for beam repositioning
Apparatus for measuring the optical characteristics of an optical system to be examined
Simple roof palm design barzebo
Mounted body and method for manufacturing the same
Test case pattern matching
Engine braking process for a supercharged internal-combustion engine
Razor head of a wet razor
Head gasket assemnly and method for sealing an internal combustion engine