Resources Contact Us Home
Heat processing apparatus, method of automatically tuning control constants, and storage medium

Image Number 12 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.

  Recently Added Patents
Communication system and data transmission method thereof
Handover signaling in wireless networks
Phosphonate compounds
Color variation control process for molding plastic and composite multi-color articles
Information terminal, setting information distribution server, right information distribution server, network connection setting program and method
Methods and systems for sending messages regarding an emergency that occurred at a facility
Boundary acoustic wave device
  Randomly Featured Patents
Process for preparing a coating with improved resistance to yellowing and the resulting coating
Tool dispenser having an ornamental sidewall
Combined hand shower and support
Silicone resin/silicone rubber composite material
Gardening tool
Pixel clock generator and image forming apparatus
Compact upright bioreactor for the elimination of nutrients
Inverter control unit
Conductive composition and production method thereof, antistatic coating material, antistatic coating, antistatic film, optical filter, and optical information recording medium, and capacitors
High speed interface for dynamic random access memory (DRAM)