Resources Contact Us Home
Heat processing apparatus, method of automatically tuning control constants, and storage medium

Image Number 12 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.

  Recently Added Patents
System and method for computational unification of heterogeneous implicit and explicit processing elements
Method for generating multi-antenna signals
Light transformation particle and photobioreactor
Portable communication terminal, communication method and control program
Motor drive component verification system and method
Bezel-less electronic display
Light fixture
  Randomly Featured Patents
Method and apparatus for opening of containers
Novel benzotrifluoride aryl ether gas separation membranes
Image sensor having self-aligned and overlapped photodiode and method of making same
System and method for self-powered communications networks
Universal doorhanger for literature
Communication apparatus having a light emitting unit that emits light in a variety of colors
Controlling the crystallization of polyesters by means of their water content
Basic triphendioxazine dyestuffs
Motor vehicle
Oval decorative reflector for vehicle light with multiple LED's