Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Heat processing apparatus, method of automatically tuning control constants, and storage medium










Image Number 12 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.








 
 
  Recently Added Patents
Pet cremation urn
Data processing system, data processing method, and image forming apparatus
Methods and systems for representing missed approach information in perspective view on a cockpit display
Horizontal card holder
Network fault detection
Device for producing a connection grid with an integrated fuse
Automotive lighting system
  Randomly Featured Patents
Laser beam source with a laser element containing a thin crystal disk as a laser-active medium
Quality of service for a stackable network switch
Retractable line guidance for self-propelled machines
Drive shaft apparatus for a susceptor
Water soluble wound dressing materials
Toy elevator safety override drive mechanism
Holographic storage medium comprising polyfunctional epoxy monomers capable of undergoing cationic polymerization
Method and apparatus for identifying universal resource locator rewriting in a distributed data processing system
Cable connection device
Triaxial fabric forming machine and components thereof