Resources Contact Us Home
Heat processing apparatus, method of automatically tuning control constants, and storage medium

Image Number 12 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.

  Recently Added Patents
Charged particle source with integrated electrostatic energy filter
System and method for investing public deposits
Method and system of extending battery life of a wireless microphone unit
Image scanner and image forming apparatus
Device for producing a connection grid with an integrated fuse
Method and system for placing an emergency call
Virtual multi-cluster clouds
  Randomly Featured Patents
Apparatus and method of improving network performance using virtual interfaces
Simplified sound reproducing device driven by a spring motor
Vehicle braking apparatus and vehicle braking method
Portable tape player and tape container
Ruggedized homogeneous thin dielectric film focus sensor
Method and system for controlling amplifier power in an optical communications network having add/drop capability
Direct digital amplitude modulator
Highly sensitive piezoresistive element