Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Heat processing apparatus, method of automatically tuning control constants, and storage medium










Image Number 12 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.








 
 
  Recently Added Patents
Energy storage device package
Email certificates
(4929
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same
Organic dual-gate memory and method for producing same
Power device and method of packaging same
Methods of diagnosing a plasmodium infection
  Randomly Featured Patents
Projector
Method and corresponding device for joint signal detection and direction of arrival estimation
Multimedia linking device and method
Motorcycle air intake component cooling system
Weapon system, notably infantry anti-tank weapon
Actuator with single surface-field motor
Dispersed oil soluble corrosion inhibitor and water soluble phosphonate scale inhibitor composition
Method for making electrically programmable memory device by doping the floating gate by implant
System for integrated mobile devices
Blank for conversion into a perforated stencil by spark erosion