Resources Contact Us Home
Heat processing apparatus, method of automatically tuning control constants, and storage medium

Image Number 12 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.

  Recently Added Patents
Driving support device, method, and program
Power generating apparatus of renewable energy type and method of attaching and detaching blade
Method and system for remote delivery of email
Pattern data conversion for lithography system
Data processing system, data processing method, and image forming apparatus
Limit switch
Client network device and method for adjusting parameters of client traffic windows based on discovery of other network devices
  Randomly Featured Patents
Torque transmission device
Rice cultivar `Ahrent`
Male shield
Frequency estimation
Efficient integrated digital video transcoding
Assembly apparatus for electrical connectors
Navigation system for displaying a structure-shape map
Bistable high-voltage bidirectional switch
Metal non-oxide coated nano substrates
Method for disposal of radioactive waste