Resources Contact Us Home
Heat processing apparatus, method of automatically tuning control constants, and storage medium

Image Number 12 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.

  Recently Added Patents
Method for playing digital media files with a digital media player using a plurality of playlists
Method for forming a semiconductor device using selective epitaxy of group III-nitride
Point-of-sale cart
Economic filtering system for delivery of permission based, targeted, incentivized advertising
Processor micro-architecture for compute, save or restore multiple registers, devices, systems, methods and processes of manufacture
Information repository search system
Method and system for encrypting data in a wireless communication system
  Randomly Featured Patents
System and method for enabling pairing of a companion device with a mate device for performing a companion service
Method of producing aggregated abrasive grains
Vehicle occupant protection apparatus including an inflatable curtain and a housing containing the curtain
Mattress cover
Single handed u-shaped handle for computer controller
Semiconductor device and method of manufacturing the semiconductor device
Game machine notifying formation of a specific prize mode
Rodent models of human amyloidoses
Charging apparatus and image forming apparatus
Feedhorn, radio wave receiving converter and antenna