Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Heat processing apparatus, method of automatically tuning control constants, and storage medium










Image Number 11 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.








 
 
  Recently Added Patents
Adsorptive molded parts and the use thereof
Process for brominating unsaturated organic compounds with removal of quaternary ammonium or quaternary phosphonium monochlorides
Performance apparatus and electronic musical instrument
Relative pose estimation of non-overlapping cameras using the motion of subjects in the camera fields of view
System and method for detecting deadlock in a multithread program
Transferring data by touch between touch-screen devices
System and method for combined I/Q generation and selective phase interpolation
  Randomly Featured Patents
Self-supporting columnar antenna array
Electronic imaging system having a sensor for correcting perspective projection distortion
Colloidal suspensions for use as a lubricant or additive
Filing device with retractable tabs
CAM Cell Circuit having decision circuit
Actively cooled fuel processor
Data processing system programmable pre-read capability
Tray insert for tape cartridges and tape cassettes
Safe/arm explosive transfer mechanism
Chair