Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Heat processing apparatus, method of automatically tuning control constants, and storage medium










Image Number 11 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.








 
 
  Recently Added Patents
System and method for conditionally sending a request for data to a home node
Methods and systems providing desktop search capability to software application
Method of fabricating semiconductor light emitting device
Anti-phishing system and method
System and method for operating an electric power converter
Wheel
Recombinant vectors for use in position-independent transgene expression within chromatin
  Randomly Featured Patents
Write-once read-many information recording medium, information recording method, information reproduction method, information recording apparatus, and information reproduction apparatus
Wire drawing die and method of making the same
Heat treatment of flat photochromic sheet glass
Variable speed trash belt for open-end spinning machine and method
Trailer gooseneck coupling apparatus
Process for treating a hydrocarbon-containing feed
Mechanical delaying device of shredder
Silicon carbide power devices having trench-based silicon carbide charge coupling regions therein
Aircraft cruise speed control system
Controlled thrust steering system for watercraft