Resources Contact Us Home
Heat processing apparatus, method of automatically tuning control constants, and storage medium

Image Number 11 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.

  Recently Added Patents
Account managing device, image processing system, and storage medium
Horizontal cable manager
Once daily formulations of tetracyclines
Method and apparatus for transcoding and transrating in distributed video systems
Electrophotographic photoreceptor, image-forming apparatus, and electrophotographic cartridge
Systems and methods for sensing external magnetic fields in implantable medical devices
Cellulose derivative and hydrogel thereof
  Randomly Featured Patents
Method of producing a reinforced endless toothed belt having a fabric cover
Method and apparatus for at-speed testing of digital circuits
Hydrocarbon fluid transfer system
Reproducing machine cycle out control system
Flexible and reinforced tubing
Generation of plants with altered oil content
Universal anchor for hoisting assembly
Assembly jig and method for making wing panels
Container with corner handle
Display shelf