Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Heat processing apparatus, method of automatically tuning control constants, and storage medium










Image Number 11 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.








 
 
  Recently Added Patents
Techniques for generating and displaying a visual flow of user content through a social network
Apparatus and method for storing event information for an HVAC system
Mechanisms for marking the orientation of a sawed die
Visually tracking an object in real world using 2D appearance and multicue depth estimations
Delivery of captions, content advisory and other data through digital interface
Mobile communication apparatus
Semiconductor device and manufacturing method thereof
  Randomly Featured Patents
Polypeptide comprising repeated cell-adhesive core sequences
Mixing device
Apparatus for inspecting slight defects on a photomask pattern
Enhanced friction of micropatterned surfaces immersed in magnetorheological fluid
System and method for controlling the water flow of household appliances
Eryngium planum plant named Calypso
Chrysanthemum plant named `Dekalgarve`
Structure of shelf at balcony
Clamping article and method
Ceiling mountable hanging apparatus