Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Heat processing apparatus, method of automatically tuning control constants, and storage medium










Image Number 11 for United States Patent #7860585.

A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.








 
 
  Recently Added Patents
Semiconductor device and method of adjusting characteristic thereof
Host route convergence based on sequence values
Controller
Digital broadcasting system and method of processing data
Support for a portable electronic device
System, method, and computer readable medium for a force-based wheelchair joystick
Voltage level shift circuits and methods
  Randomly Featured Patents
Moisture curable hot melt adhesive and method for bonding substrates using same
Marble buster game
Systems and methods for interpreting communications packets
Electroacoustic delay line apparatus
Storage device
Information recording and reproduction apparatus to be controlled by temporal information
Apparatus for treating gases and particulate solids in a fluid bed
Indicating apparatus for a motor vehicle
Fold over belt pack
Method for prediction of postoperative prognosis and diagnosis kit